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Journal of Vacuum Science and Technology
1672-7126
2005 Issue 2
Design of Cryopump Installed in Drift Tube of Neutral Beam Injector
CHEN Changqi;Ge Rui;Wang Jun;Nie Jinliang;Oyang Zhengrong;Hu Chundong
..............page:154-158
Effect of Ar Pressure on Stress and Microstructure of Al Films Grown on Si Wafers
SONG Xueping;Rao Shuling;Fang Wei;Sun Zhaoqi
..............page:150-153,158
Influence of Properties of Microwave Electron Cyclotron Resonance Plasma on Diamond-Like Carbon Film Deposition
Chen Xiaomeng;Deng Xinlu;Zhang Zhiguo;Liu Tianwei;Ding Wanyu;Xu Jun
..............page:146-149
Growth of High Mobility Transparent Conducting In2O3:Mo Thin Film
LI Xifeng;Miao Weina;Zhang Qun;Huang Li;Zhang Zhuangjian;Hua Zhongyi
..............page:142-145,149
Inhomogeneous Plasmas Produced by Double Plasma Device
Ma Jinxiu;Li Yangfang;Li Jingju;Xiao Delong;Wang Hai;Wan Shude;Wen Yizhi;Xie Jinlin;Yu Chuangxuan;Gao Jinxiang
..............page:138-141
Properties of Diamond Like Carbon Films Prepared by Unbalanced Magnetron Sputtering
Xu Junqi;Hang Lingxia;Hui Yingxue
..............page:134-137,141
Evaluation and Simulation of Leakage of Multi-Level Series Seal
Liu Yang;YU Jianping;SUN Chong;Cui Zhanpeng;Liu Zhanqing
..............page:127-133
Preparation and Properties of Phosphorus Doped Diamond-like Carbon Films
Wang Jin;Sunny C.H.Kwok;Chen Junying;Yang Ping;HUANG Nan;P.K.Chu
..............page:123-126
Microstructures and Thermal Stability of Poly[2-methoxy-5-(3'-methyl) butoxy]-p-Phenylene Vinylene Film Modified by N Ion Implantation
Li Baoming;Wu Hongcai;Liu Xiaozeng;Gao Chao;Sun Jianping
..............page:120-122,126
Temporal Evolution in an Ion-matrix Sheath During Plasma Immersion Ion Implantation
Huang Yongxian;Tian Xiubo;YANG Shiqin;Huang Zhijun;Ricky Fu;Paul K.Chu
..............page:115-119
Diagnostic of Microwave ECR Unbalanced Magnetron Sputtering Plasma by Langmuir Probe
Zhang Zhiguo;Chen Xiaomeng;Liu Tianwei;Xu Jun;Deng Xinlu;DONG Chuang
..............page:110-114
Influence of ZnTe Insertion Layer on CdS/CdTe Photovoltaic Device Performance
Song Huijin;YAN Qiang;Zheng Jiagui;Feng Lianghuan;Wu Lili;Zhang Jingquan;Cai Wei;Cai Yaping;Li Wei;Li Bing
..............page:105-109
3-D Numerical Reconstruction of Low Energy Electron High Resolution Holograms
Ling Li;Sun Yi;Gu Changxin;Shan Liying
..............page:100-104
Microstructures and Ferroelectric Properties of Ba0.6Sr0.4TiO3 Thin Films
Chen Hongwei;Yang Chuanren;Fu Chunlin;Zhao Li;Gao Zhiqiang
..............page:96-99
Preparation and Characterization of p-type Transparent Conductive Tin-gallium Oxide Films
Ji Zhenguo;Chen Chen;Wang Chao;Zhou Qiang;ZHAO Lina
..............page:93-95,99
Monte Carlo Simulation of Cu Thin Film Growth by Magnetron Sputtering
Liu Zuli;Zhang Xuefeng;Yao Kailun;Hung Yunmi
..............page:83-87,114
Extremely High Vacuum Molecular Shield Facilities with Changeable Wing in Low-earth Orbit
Da Daoan;ZHANG Hualin;Yan Shaoguang
..............page:79-82,92