Journal of Vacuum Science and Technology 2004 Issue 4 zhen kong she ji shou ce ( di san ban )2004 nian 5 yue chu ban ,2004 2005 nian du zhen kong ji jia ge

zhen kong she ji shou ce ( di san ban )2004 nian 5 yue chu ban ,2004 2005 nian du zhen kong ji jia ge

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zhen kong ke xue yu ji shu xue bao yao nin he zuo han

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2004'vm&se quan guo zhen kong ye jin yu biao mian gong cheng xue shu yan tao hui hui yi ji yao

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zhong guo zhen kong xue hui shen ban cheng gong 2010 nian di shi ba jie guo ji zhen kong da hui

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zhong guo zhen kong xue hui zhen kong ke xue yu ji shu xue bao zu jie

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Electron Cyclotron Resonance Chemical Vapor Deposition System with Permanent-Magets
wu zhen yu ; liu yi ; wang jia you ; yang yin tang

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Reactive Ion Etching of HfO2 Films
wang xu di ; liu ying ; hong yi zuo ; fu shao jun ; xu xiang dong

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Etching of HfO2 with Inductively Coupled Plasma of CHF3,Ar,and H2
xin zuo ; ning zhao yuan ; ye chao ; xu sheng hua ; gan zhao qiang ; huang song ; chen jun ; di xiao lian

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Technological Study of Fabrication of RF MEMS in Series
yu ying ; luo zhong zuo ; weng xin qiao

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Non-Destructive,Low Temperature Growth of Indium-Tin-Oxide Films on Flexible Organic Substrates by Electron Beam Evaporation
li sheng lin ; feng kai ; liu hao ran ; liu guo hua ; zhang de xian

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Vacuum Sealing of Sapphire Output Windows in High Power Microwave Device Fabrication
yuan guang jiang ; lu yu hua ; luo ji run ; yan xu ; wu er sheng ; guo he zhong

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Microwave Annealing in Titanium Silicidation
ou yang si ke ; wang tao ; dai yong bing ; wu jian sheng ; he xian zuo ; shen he sheng

..............page:296-298

Ti-Si-N Coating on Slit Inner Walls by Plasma Enhanced Chemical Vapor Deposition
ma qing song ; ma sheng li ; xu ke wei

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Growth of WO3 Electrochromic Films by Low Voltage Reactive Ion Plating
ren hao ; luo yu qiang ; li zuo lin ; bi jun

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Growth of Diamond Thin Films with Smooth Surface and High Transmittance on Quartz Glass Substrates
hao tian liang ; shi cheng ru ; han gao rong

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Development of Hall Ion Source for Film Growth by Ion Beam Assisted Deposition
you da wei ; ren jing xue ; huang xiao gang ; wu jian jun

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Spectral Matching Between Input Reflective Radiation of Objects and Super S25 & New S25 Photo Cathodes
liu lei ; chang ben kang

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Development of Fluorinated Diamond-like Carbon Film
zhang ru zhi ; liu gui chang ; deng xin lv

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Microstructure and Properties of Ti-Si-N Nanocomposite Films Deposited by Reactive Sputtering
mei fang hua ; shao zuo ; hu xiao ping ; li ge yang ; gu ming yuan

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Dynamics Study of Al Extraction from Al2O3 by Al Sub-sulphidization
wu guo yuan ; liu da chun ; dai yong nian

..............page:263-266,270

Surface Diffusion in Annealing of SrTiO3 Film Grown by Laser Molecular Beam Epitaxy
wei xian hua ; zhang ying ; deng xin wu ; huang wen ; li jin long ; li yan rong

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Argon Plasma Generated by DC Glow and Magnetron Assisted Discharge:a Study of Spatial Resolved Optical Emission Spectroscopy
yu hong ; zhang jia liang ; ren chun sheng ; wang you nian ; ma teng cai

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Optimization of Hop and Flu Spacers in HOPFED
zhong xue fei ;wilbert wan der poel;daniel den engelsen; yin han chun

..............page:249-254,262

Formation of nc-Ge and nc-Si Particles in Ge-SiO2 and Si-SiO2 Thin Films
cheng zuo fei ; wu xue mei ; zhu ge lan jian

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Critical Role of Contacts in Nanoelectronic Devices
hou shi min ; shen zi yong ; zhao xing zuo ; xue zeng quan ; wu quan de

..............page:241-244