..............page:137-145
..............page:146-150+182
..............page:151-155+200
..............page:156-160
A Tilt-Proof MEMS Electrostatic Parallel-Plate Actuator
Wang Qiang;Wang Weimin;Qiu Chuankai;Yu Junsheng;State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering;Institute of Optics and Electronics;Chinese Academy of Sciences;School of Optoelectronic Information;University of Electronic Science and Technology of China;
..............page:161-165
Research Status in Micro-Mixers
Jiang Feng;Liu Guojun;Yang Zhigang;Wang Tengfei;Tang Chunxiu;Liang Shihai;College of Mechanical Science and Engineering;Jilin University;
..............page:166-176
..............page:177-182
..............page:183-187
..............page:188-194
..............page:195-200
..............page:201-204