..............page:545-553
..............page:554-558+580
..............page:559-564
Combined MEMS 3D Vector Acoustic Sensors
Guo Nan;Zhang Guojun;Liu Mengran;Jian Zeming;Zhang Wendong;Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education;North University of China;Key Laboratory of Science and Technology on Electronic Test & Measurement;North University of China;
..............page:565-569+596
..............page:570-575
..............page:576-580
..............page:581-585
..............page:586-591+610
..............page:592-596
Study of the Frequency Selective Surface by Using UV-LIGA Technique
Lin Binbin;Chen Di;Lin Shujing;Xie Yao;Yuan Tao;Cui Daxiang;Key Lab for Thin Film and Microfabrication Technology of Ministry of Education;Department of Instrument Science and Engineering;School of Electronic Information and Electrical Engineering;Shanghai Jiao Tong University;
..............page:597-602
..............page:603-610
..............page:611-612