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Application of the High-Efficient X-Ray Lithography in the Fabrication of Single-Order Gratings
Shi Bailing;Dong Lianhe;Zhu Xiaoli;Xie Changqing;Cao Leifeng;Kuang Longyu;Liu Shenye;School of Optoelectronic Engineering;Changchun University of Science and Technology;Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology;Institute of Microelectronics;Chinese Academy of Sciences;National Key Laboratory of High-Temperature and High-Density Plasma Physics;Research Center of Laser Fusion;China Academy of Engineering Physics;
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