..............page:137-141
..............page:142-147+156
..............page:148-156
..............page:157-161+203
Design and Fabrication of RF Attenuators Based on MEMS Switches
Jia Zhihao;Duan Junping;Wang Wei;Mao Jing;Cui Jianli;Zhao Long;Wang Minghuan;Zhang Binzhen;Science and Technology on Electronic Test & Measurement Laboratory;North University of China;Key Laboratory of Instrumentation Science & Dynamic Measurement of Ministry of Education;North University of China;
..............page:162-166+203
..............page:167-172+190
..............page:173-177+184
..............page:178-184
Study on Vertical Degree of ICP Silicon Deep Etching Groove Wall
Liu Fangfang;Zhan Minghao;Xu Gaobin;Huang Bin;Guan Peng;Micro Electromechanical System Research Center of Engineering and Technology of Anhui Province;School of Electronic Science & Applied Physics;Hefei University of Technology;North General Electronics Group Co.;Ltd.;Norinco Group;
..............page:185-190
..............page:191-196
..............page:197-203