..............page:277-285+296
..............page:286-296
..............page:297-301
..............page:302-307
..............page:308-314
Research Development of the Plasma Etching for Phase Change Materials
Li Juntao;Liu Bo;Song Zhitang;Feng Gaoming;Zhu Nanfei;Ren Jiadong;Feng Songlin;State Key Laboratory of Functional Materials for Informatics;Shanghai Institute of Micro-System and Information Technology Chinese Academy of Sciences;University of the Chinese Academy of Sciences;Semiconductor Manufacturing International Corporation;
..............page:315-323
..............page:324-327
..............page:328-332
..............page:333-336+340
..............page:337-340
..............page:341-342