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Micronanoelectronic Technology
1671-4776
2006 Issue 2
Influencing Factory Analysis of Al Thin Film CMP
YUAN Yu-jie;LIU Yu-ling;ZHANG Yuan-xiang;CHENG Dong-sheng
..............page:107-111
Laser Stage System for E-Beam Lithography Machine
QIAO Jun-xian;WANG Zhao-zhi;HU Song;ZHANG Zheng-rong;XING Wei;TANG Xiao-ping;WANG Shu-rong
..............page:102-106
Simulation of Laterally Oscillating Microresonators
WANG Min;WANG Xiao-jing;LIU Yong-wu;CHEN Xiao-yang
..............page:98-101
Computation of Electrostatic Forces with Edge Effects for Micro-Structures
ZHAO Jian;WANG Hong-xi;JIA Jian-yuan
..............page:95-97,111
Formation of Langmuir-Blodgett Monolayer of Nano Gold Particles
QU Peng;WANG Ying;ZHANG Ya-fei
..............page:85-88,106
Photonic Crystal Microcavity Light-Emitting Diode
LUO Yan-heng;ZHANG Rui-jun
..............page:80-84,94
Fabrication of Silicon Single Electron Transistors
ZHANG Yang;HAN Wei-hua;YANG Fu-hua
..............page:73-79
Progress of Semiconductor Photonic Crystal Active Devices
TANG Hai-xia;WANG Qi-ming
..............page:65-72