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Micronanoelectronic Technology
1671-4776
2004 Issue 7
Application of small plasma cleaning/etching instruments
zheng liang ; tang ming
..............page:42-46
Progresses of biochip scanner
zhang chun mei ; hu song ; tang xiao ping ; yao han min
..............page:35-38
The reliability of MEMS devices in shock environments
fang xu wen ; tang jie ying ; huang qing an
..............page:31-34
MEMS and its applications of diamond films
cui yu ting
..............page:27-30
Preparation,microstructure and photoluminescence properties of embedded thin films of nc-SiC/SiO2
shi li wei ; li yu guo ; wang qiang ; xue cheng shan ; zhuang hui zhao
..............page:23-26,30
Synthesis of GaP nanocrystals by elemental reactions under solvothermal conditions
xin chun yu ; liu zhen gang ; yu mei yan ; li kai ; gai li gang ; wang zuo zuo
..............page:20-22
Photonic crystal and photonic crystal passive device
zhang rui jun ; deng hai li
..............page:15-19,34
The 65nm/45nm process and its relevant technology
weng shou song
..............page:10-14
Research and development of SiGeC ternary alloy
zhao lei ; zuo yu hua ; wang qi ming
..............page:1-9,14