1671-4776
2004 Issue 3
Spintronics and spin electric devices
chen pei yi ; deng ning
chen pei yi ; deng ning
..............page:1-5,20
Nanoelectronics
guo shu tian
guo shu tian
..............page:6-13,24
The Cu interconnection and its relevant technology
weng shou song
weng shou song
..............page:14-16,36
GaN bizarre surface grown on silicon (111) substrate by the hot wall chemical vapor deposition
sun zhen cui ; cao wen tian ; wei qin qin ; xue cheng shan ; wang shu yun
sun zhen cui ; cao wen tian ; wei qin qin ; xue cheng shan ; wang shu yun
..............page:17-20
Preparation of (Y2O3·CaO) -ZrO2 ultrafine powders and influence of conditions on particle size
chen ru fen ; song xiu qin
chen ru fen ; song xiu qin
..............page:21-24
Ferroelectric material in MEMS
guo dong yun ; wang yun bo ; fu cheng ju ; yu jun
guo dong yun ; wang yun bo ; fu cheng ju ; yu jun
..............page:25-28
Finite element analysis of bimorph thermal actuators
jiang yan feng ; zhang xiao bo
jiang yan feng ; zhang xiao bo
..............page:29-31,43
Design of a high-resolution capacitive microaccelerometer
zhang shao feng ; chen hua ling
zhang shao feng ; chen hua ling
..............page:32-36
Research of the capacitive force micro-sensor
liu jing chun ; deng yong he ; li yu zuo
liu jing chun ; deng yong he ; li yu zuo
..............page:37-38
Technologies used in preparation and test of low dielectric constant materials for VLSI
wen liang ; wang jia you ; yang yin tang
wen liang ; wang jia you ; yang yin tang
..............page:39-43
Using DSP to achieve image acquisition and processing in the bottom side alignment system
ke xue ; luo zheng quan
ke xue ; luo zheng quan
..............page:44-46
..............page:46