Micronanoelectronic Technology 2003 Issue 7 Evaluation of the onset voltage of a micro fabrication colloid thruster

Evaluation of the onset voltage of a micro fabrication colloid thruster
xiong ji jun ; zhou zhao ying ; ye xiong ying ; wang xiao hao

..............page:445-448

Fabrication and experiment of a MEMS based cold gas thruster
tang fei ; ye xiong ying ; zhou zhao ying

..............page:441-444

Nanoelectronic devices
guo rong hui ; zhao zheng ping ; liu yu gui ; wu yi bin ; lv miao ; yang yong jun

..............page:557-561

E-beam nano-lithography technology research
liu yu gui ; wang wei jun ; luo si wei

..............page:562-563

Design and fabrication of signal processing integrated circuit for accelerometer
lan mu jie ; liu xiao wei ; chen wei ping ; liu ya chun ; wang mei ; wang dong wang

..............page:564-566,576

Research on intelligent robot
wang yu long ; xiong ji jun ; zhang wen dong

..............page:567-569

Pipe inspection mobile microrobot system based on electromagnetic micromotor with 4mm diameter
chen jia pin ; li zhen bo ; zhang zuo

..............page:570-572

Design techniques for MEMS safety locks
gao yang ; wen gui yin ; zhao xiao lin ; chen wen yuan ; zhang zuo

..............page:573-576

The influence of MEMS techniques on the fire control system
duan xiu sheng ; cheng yuan zeng ; sun shu ying

..............page:577-578,582

Simulation and analysis of basic RTD-based circuits
cheng ; xu jun

..............page:579-582

Design of integrated sensor for atmosphere research
wu yu ; fang zhen ; zhao zhan ; chen chao ; zhang bo jun

..............page:583-585,589

Driver applied in micro or small electromechanical stronglink
zhang wei ping ; chen wen yuan ; zhao xiao lin ; gao yang ; wu xiao sheng

..............page:586-589

Current situation in the development of micromanipulator driven by piezoelectric actuator
rong wei bin ; qu dong sheng ; sun li ning

..............page:590-594

Research on a piezoresistive mass flow sensor
wang xiao bao ; qian jin ; zhang da cheng

..............page:449-451

An electromagnetically actuated miniature valve for high pressure control
fan rui li ; li yong ; chen xu peng ; ye xiong ying ; zhou zhao ying

..............page:452-455,460

Research into micro chemical thrusters
chen xu peng ; li yong ; zhou zhao ying

..............page:456-460

A novel integrated humidity sensor compatible with CMOS
gu lei ; qin ming ; huang qing an

..............page:461-463,466

A resonant beam pressure sensor with a peninsular structure
chen de yong ; cui da fu ; gao xiao tong ; fan zhao yan ; wang li

..............page:464-466

Study on an integrated five-dimension micro force/torque sensor
sun li ning ; tang xue yan ; rong wei bin

..............page:467-469

Design and fabrication of CMOS-compatible polysilicon diaphragms for pressure sensor applications
zhou zuo xin ; qin ming ; huang qing an

..............page:470-473

Research of SU-8 photoresist micro-actuator
qin ning ; zhao zhan ; chen shao feng ; xia shan hong

..............page:474-476

The out-of-chip mechanical method for actuating MEMS parts
wang zuo ; yao han min ; du chun lei ; jiao yu zhong

..............page:477-480

Trace explosive detection with chemical sensor,biosensor and MEMS sensor techniques
zhang cheng mei ; mei tao ; kong de yi ; zhang yan

..............page:481-483,491

Temperature properties and compensation for silicon piezoresistive sensors
fan shang chun ; peng chun rong

..............page:484-488

Study on the temperature compensation method of piezoresistance silicon film sensor
guo tao ; shi yun bo ; zhang wen dong

..............page:489-491

A new touch mode capacitive pressure sensor with two deformable diaphragms
JIAO Yu-zhong

..............page:492-495

Synthesis of dimethyl carbonate by ultrafine particle catalysts
jiang zuo ; wang shu ming

..............page:496-498

Preparation of highly oriented PZT film by 0-3 composite method
chen chao ; zuo jia ru ; lu jian ; yang yan

..............page:499-502

Six-axis force/torque sensor for micro-testing system for MEMS
he de jian ; zhang hong hai ; liu sheng ; wang xue fang ; wang zhi yong

..............page:503-505,511

Characterization of the pressure wave in piezoelectrically actuated micro jet
feng zuo ying ; zhou zhao ying ; ye xiong ying ; wang guo hui

..............page:506-511

na mi ji shu -- shi chang guang kuo de gao ji shu qian yan
zhong xian xin

..............page:512-513,519

Stress-induced resistance changes in carbon nanotubes
wang wan lu ; wang yong tian ; liao ke jun ; liu gao bin ; li yong ; ma yong

..............page:514-516

Enhanced humidity effect of carbon nanotubes by chemical modified
wang wan lu ; wu zi hua ; liao ke jun ; liu gao bin ; wan bu yong ; wang yong tian

..............page:517-519

A target indirect measurement method of microthrust
tang fei ; ye xiong ying ; zhou zhao ying

..............page:438-440,444

Study on data acquisition of vacuum micro electronic pressure sensor array
pan yin song ; wen zhi yu ; liang yu qian ; jiang zi ping

..............page:435-437

Investigation of PZT piezoelectric thick-film made by screen printing compatible with MEMS
wang wei ; liu xiao wei ; mo bing ; wang juan

..............page:432-434

Design of Mach-Zehnder interferometer for Si-based ARROW pressure sensor
xiao su yan ; wang dong hong ; liu xiao wei ; qin jian yong

..............page:429-431,437

Analysis of electrochemical behaviors on the carbon nanotube electrode
hu chen guo ; wang wan lu ; ma yong ; wu zi hua ; hu jiang chuan

..............page:520-522,525

Precise control of poly(N-isopropylacrylamide) nanogel by photopolymerization
qiao xiang li ; hou zheng chi ; sheng kang long ; yao si de

..............page:523-525

Nano-material and Microelectrode Biosensors
wang li ; cai xin xia ; li hua qing ; guo zeng jun ; rao neng gao

..............page:526-528

Structure of La-, Ca-PbTiO3 nanocrystals and phonon characteristics
deng zuo ; zhang ming sheng

..............page:529-530,535

Self-assembly and nanotechnology
zheng ming bo ; cao jie ming ; tang zuo ; chang xin ; deng shao gao ; ma xian jia ; huan da jun ; tao jie ; xu guo yue

..............page:531-535

The controlling of nanoparticle agglomerates
feng la jun ; liu yi hui ; lei a li

..............page:536-539,542

The conductivity of single walled nanotube films in terahertz region
han jia guang ; zhu zhi yuan ; wang zhen zuo ; yu li ping ; zhang wei ; sun li tao ; wang ting tai

..............page:540-542

Large-scale preparation of aligned carbon nanotubes arrays
li zuo ; bai xiao dong ; xu hua ming ; liang ji

..............page:543-545

Study on making nano-patterns by atom standing wave lens
chen yuan pei ; chen xu nan ; li zhan ; chen xian zhong

..............page:546-549,556

The growth of ZnO nano-film by RF magnetic sputtering
li jing ; wu sun tao ; zhong can

..............page:550-551

Single poly EEPROM
ren tao ; liu zhi hong ; zhu jun

..............page:552-556

Overview of worldwide MEMS industry and market
CUI Zheng

..............page:1-4

Research of dry etching simulator in micromachining
zhou rong chun ; zhang hai xia ; hao yi long

..............page:5-7

Effect of buffer layer on resonant states in material GaAs/Ga1-xAlxAs
yang xiao feng

..............page:8-10

Theoretical study on lattice vibration energy and specific heat of staff in nano-machine and micro-machine
huang jian ping ; li sheng zuo ; wu xue zhong ; luo bing

..............page:11-13,18

Part-library-based method of MEMS design
lu gui zhang ; zhao xin

..............page:36-39,43

Multi-port-element network based MEMS system level modeling methodology
ma bing he ; huo peng fei ; yuan wei zheng

..............page:40-40

Meso-piezoresistance effect
wen ting dun ; zhang wen dong

..............page:41-43

An equivalent circuit macromodel for a multi-layer beam electromechanical coupled system
rong hua ; huang qing an ; li wei hua

..............page:44-47

Modeling and simulation of nonlinear behavior of mechanical-electrostatic coupled MEMS devices
sun zhen xin ; huang qing an ; li wei hua

..............page:48-50

The integrated design and visualization of MEMS process
tang hua feng ; yuan wei zheng

..............page:51-53

Simulation of integrated wind flow sensor system on a chip
zhu zuo ; qin ming ; huang qing an

..............page:54-56

Electroplated CoNiMnP magnet array for MEMS actuator
zhang bo jun ; zhao zhan ; chen shao feng

..............page:385-387

Two membrane microwave MEMS switches
zhu jian ; yu yuan wei ; lu le ; jia shi xing ; zhang long

..............page:382-384

MEMS-based micro fuel cell and its air supplying method by piezoelectric fan
yang xing ; zhou zhao ying ; ye xiong ying ; wang xiao hao

..............page:378-381

Research of actuation characteristic of a curved cantilever electrostatic actuator
liu su yan ; niu kai ; ye xiong ying ; zhou zhao ying

..............page:375-377

A novel composite membrane bridge structure for RF MEMS phase shifter and switched tunable capacitor
zuo ; xiao zhi yong ; wu guo ying ; jin yu feng ; hao yi long

..............page:371-374

Bonding for poly(dimethylsiloxane) microfluidic chip by oxygen plasma treatment under medium vacuum
shen de xin ; zhang chun quan ; luo zhong zuo ; zhou yong liang ; zhang feng ; li jia ; tian zhao wu

..............page:369-370

Optical detection on micro biochemical chip
li feng ; wu yi hui ; ju hui ; he min ying

..............page:365-368

Designing of capillary electrophoresis chips based on linear-arrayed electrode for μTAS
chen chao ; zhao zhan ; zhang bo jun

..............page:362-364,368

Electrochemical biosensors
cai xin xia ; li hua qing ; rao neng gao ; wang li ; cui da fu

..............page:359-361

The research of biochip for electrophoresis
yi fu ting ; jiang xiong ping ; peng liang qiang ; zhang ju fang ; han yong

..............page:356-358,361

Simulation, fabrication and characterization of planar microsprings
chen di ; shi lei ; zhu jun ; li jian hua ; ni zhi ping ; liu jing quan ; li yi gui

..............page:57-60

Simulation and analysis for gas flow and heat transfer in micro nozzle
wang mo ran ; chen ze jing ; li zhi xin

..............page:61-64

Simulations and optimization for micro gas flowmeter
wang mo ran ; chen ze jing ; li zhi xin

..............page:65-67,73

Fitting correction for an analytical model of pull-in voltage of fixed-fixed beams
nie meng ; huang qing an ; wang jian hua ; rong hua

..............page:68-70

Study of multifunction sensor with data readout
chen wei ping ; tian li ; tian lei ; li ming jiang ; sun li ning

..............page:426-428

Analysis of model and fabrication of AlGaN based PIN ultraviolet detectors
zhou jin ; hao yi long ; wu guo ying

..............page:422-425

A novel electrostatically driven torisional micromirror
wang cong shun ; xiong chun yang ; yang zhen chuan ; zhang da cheng ; fang jing

..............page:419-421

Optimizing resistance of round hollow wire at high frequency
FENG Yong-jian;ZHANG Tao

..............page:415-418

Novel torsion-mirror optical actuators
wu wen gang ; li da chao ; yuan yong ; sun wei ; yan gui zhen ; hao yi long ; jin shi jiu

..............page:410-414

Theoretical study on resonant tunneling magnetometer
tang xue hua ; you zheng ; yang jian zhong

..............page:407-409

An uncooled infrared imaging system based on bi-material cantilever pixels
wang zuo bing ; ye tian chun ; chen da peng ; wu xiao ping ; zhang qing chuan ; pan liang ; duan zhi hui

..............page:404-406,418

Design and optimization of MEMS optical switch actuated by piezoelectric cantilever based on Si
fang hua jun ; liu jian she ; ren tian ling ; liu li tian

..............page:400-403

Integrated optical interferometer based on bonding technology
li yi gui ; hui chun ; zuo xiao yu ; yu gen yi bo

..............page:397-399

RF MEMS membrane switches on GaAs substrates
zheng wei bin ; huang qing an ; li fu xiao ; liao xiao ping

..............page:395-396,403

Study and fabrication of microstructure array chip based on light addressable potentiometric sensors
han zuo hong ; zhang hong ; gu li bo ; xu lei ; chen shao feng ; wang li ; wang lei

..............page:391-394

Design and simulation of a miniature electric field sensor based on MEMS technique
pei qiang ; xia shan hong ; gong chao ; bai qiang ; chen shao feng

..............page:388-390

Effects on separating resolution and efficiency of electrophoresis chip
liu gang ; wen zhi yu ; li xia ; zhang liu qiang ; peng shu cheng

..............page:347-350

ji yu afm wei jia gong de dan jing gui biao ceng xing zhi de yan jiu
zhao qing liang ; liang ying chun ; cheng kai ; dong shen

..............page:261-264,266

Laser locally heating and bonding for microsystem packaging
lai jian jun ; chen xi qu ; zhou hong ; liu sheng ; yi xin jian

..............page:257-260

Research on laser assisted bonding and packaging system for plastic biochips
chen xi qu ; lai jian jun ; liu sheng ; yi xin jian

..............page:254-256

Design and fabrication of humidity sensor for MEMS hermetic package test
xiong zuo ; yi xin jian ; chen si hai ; chen ming xiang ; zhou shao bo

..............page:251-253

Design and fabrication of microheater array for MEMS wafer-level scale hermetic package
chen si hai ; chen ming xiang ; yi xin jian ; liu sheng ; zhang hong hai ; huang zhu lin ; wang xue fang ; wang zhi yong

..............page:249-250

Nanoindentation and nanoscratch measurements on the mechanical properties of SiO2 film
zhang hai xia ; zhang tai hua ; zuo yong

..............page:245-248

Investigation of AFM-based nano-indentation on micro-machined silicon surface
zhao qing liang ; liang ying chun ; cheng kai ; dong shen

..............page:241-244

Investigation on Au-Si wafer bonding for MEMS device packaging
liu xue song ; zuo gui zhen ; hao yi long ; zhang hai xia

..............page:238-240,248

Study on packaging technology in MEMS
shi yun bo ; liu jun ; zhang wen dong

..............page:235-237

Low voltage separation model and its control system for electrophoresis chip
li xia ; wen zhi yu ; li xing hai ; wu ying ; peng shu cheng

..............page:344-346,350

Design and experiment research of integrated capillary electrophoresis chip
tian li ; liu xiao wei ; wang xi lian ; tian lei ; ao ming sheng ; xiong jun

..............page:340-343

Micro biochemical analysis system
wen zhi yu ; chen gang ; pan yin song ; xu yi ; li xia ; jiang zi ping

..............page:338-339,343

Development of the purification for metallothionein (MT)
wang xiang ; zhang da cheng ; li zuo ; wang zuo ; ren hong wei ; han tie gang ; yu mei min

..............page:335-337

Research on the micro-heater and temperature sensor in PCR biochip
xi wen zhu ; zuo wei ping ; du li qun ; guo ji hong

..............page:332-334,337

Computer numerical analysis of electrokinetic injection in chip capillary electrophoresis
zheng jiu wen ; zuo wei ping ; liu chong ; bai ji ling

..............page:328-331

Research of microchip capillary electrophoresis laser-induced fluorescence detection system
chen dong ; zuo wei ping ; hao ying guang ; ma ling zhi

..............page:324-327

Fabrication and thermal analysis of microchamber in PCR biochip
liu da zhen ; zuo wei ping ; guo ji hong ; du li qun

..............page:321-323,327

Research on reliability of the MEMS convective accelerometer
yang yong jun ; lin hai feng ; shi qian ; xu ai dong

..............page:317-320

BioMEMS--bridging of biomedical diagnostics and treatments
yu xiao mei ; zhang da cheng

..............page:351-355

Effect of process stress on resonance frequency of the double linear vibratory gyroscope
xie ming mei ; zuo an ping ; wang shou rong

..............page:314-316

Fabrication of UV-LIGA micro acceleration switch
chen guang zuo ; he xiao ping ; shi zhi gui ; ding yuan ping ; zhao long

..............page:312-313,316

Design of micromachined gyroscope with electromagnetic actuation and capacitive detection
song chao hui ; jia meng jun ; li zuo xin

..............page:309-311

A micromachined piezoresistive accelerometer and its design optimization
huang shu sen ; guo nan xiang ; huang zuo ; song chao hui ; li xin zuo ; wang yue lin

..............page:305-308

Design of a micromechanical inclinometer with two strained silicon beams
kong de yi ; zhang tao ; mei tao ; ni lin ; sun zuo ; tao yong chun

..............page:302-304

Design of capacitive accelerometer for environment vibration measurement
zhou zai fa ; huang qing an ; qin ming

..............page:298-301

System analysis and design of a MEMS tunneling accelerometer
dong hai feng ; jia yu bin ; hao yi long

..............page:295-297

Study of vacuum packaging and vacuum level testing technologies of MEMS packaging
zhang li hua ; li jun ; shao chong jian

..............page:267-270

Three-dimensional micromaching on Cu--application of confined etchant layer technique (CELT)
liu zhu fang ; jiang li min ; tang zuo ; zhang li ; tian zhao wu ; liu pin kuan ; qu dong sheng ; sun li ning ; ye xiong ying ; zhou zhao ying ; tian zhong qun

..............page:265-266

Flip chip bonding technology used in modern micro-photoelectron package
pei wei hua ; deng zuo ; chen hong da

..............page:231-234

Direct measurement of force in biology with AFM
wang yan xia ; li yan ning ; fu xing ; li zheng guang ; hu xiao tang

..............page:228-230

Test structure for determination of thermal conductivity of surface micromachined polysilicon thin films
xu gao bin ; huang qing an

..............page:224-227

A MEMS testing system using computer microvision
feng ya lin ; li da chao ; jin cui yun ; hao yi long ; zhang da cheng ; jin shi jiu

..............page:221-223,234

Application of microscopic interferometry in dynamic testing system of MEMS
guo tong ; hu xiao dong ; li da chao ; hu chun guang ; hu xiao tang

..............page:218-220

Combine and design SPM based on commonly used platform of SPM
zhao yu le

..............page:197-199

Micro-and nano-fabrication by EC-SPM
tang zuo ; mao bing wei ; tian zhong qun

..............page:192-196

Study on sputtering process of tin oxide
feng hai yu ; huang yuan qing ; feng yong jian

..............page:189-191

Study of the demolding effects of the Ni and Ni-PTFE self-lubricated molding inserts
zhang peng ; liu gang ; tian yang chao

..............page:186-188

Study on computer simulation of proximity lithography
tian xue hong ; liu gang ; tian yang chao ; zhang xin yi ; zhang peng

..............page:181-185

Progress of scanning probe lithography and study on scanning plasma etching technology
wang hai ; zuo jia ru ; zhao gang

..............page:177-180,185

The fabrication technology of silicon tip
wang yan hua ; sun dao heng

..............page:164-166

Design and fabrication of microcalorimeter for measuring heat capacity of thin films
song qing lin ; cui zuo ; xia shan hong ; chen shao feng

..............page:122-125

Research for sandwich MEMS device by vacuum bonding
yang guo yu ; shui guo hua ; zhang zheng yuan ; wen zhi yu

..............page:120-121

The status and tendency of next generation lithography
li yan qiu

..............page:116-119,125

Fabrication technique of deep electrical isolation trenches using DRIE and medium refill
zhu yong ; zuo gui zhen ; wang cheng wei ; wang yang yuan

..............page:113-115

Applications of pulsed laser microfabrication technology in MEMS
li yan ning ; tang jie ; rao zhi jun ; song xiao hui ; hu xiao dong ; fu xing ; hu xiao tang

..............page:159-163

Study on the processing technique of microstructure based on AFM
sun tao ; zuo yong da ; xia jia fei ; liang ying chun ; cheng kai ; dong shen

..............page:154-158

Research and application of thick photoresist lithography using UV light
li zuo ; tan zhi min ; xue zuo ; liu li tian

..............page:151-153

Design on X-ray masks for LIGA station in 3B1 beamline
huang jun rong ; peng liang qiang ; yi fu ting ; jiang yi jian ; zhang ju fang ; han yong

..............page:147-150

Neural networks method for parameter determination of yttrium oxide ultrafine making
huang zuo ; zheng qi lun

..............page:98-100

Application of fuzzy neural network in target recognition
zhang yan jun ; liu jun ; zhang wen dong

..............page:96-97

The research and development of MEMS CAD tool IMEE
zhang hai xia ; guo hui ; xiao zhi yong ; zhou rong chun ; hao yi long

..............page:92-95

Developments of topology optimization method and its application in micro-mechanism design
zuo jin kui ; hao xiu chun ; wang li ding

..............page:87-91

Transient field analysis for series MEMS switch
gu hong ming ; lv miao ; dan fu zuo ; gao zuo xin ; liang chun guang

..............page:84-86

Mechanical analyzing of V-shaped cantilever electrothermal actuator
zhang yong yu ; shen xue zuo ; chen xiao yang

..............page:80-83

Creation and verification of the controlled source macromodel of equivalent circuit for cantilever beam
wen fei na ; li wei hua ; rong hua

..............page:76-79

A new micromechanical anchor structure
liu zu zuo ; huang qing an

..............page:74-75,83

Software development of the meteorological monitoring microsystem
hu de sheng ; zhang zhong ping ; huang qing an

..............page:71-73

Research on moulding of microstructure at BSRF
han yong ; peng liang qiang ; chen di ; yi fu ting ; zhang ju fang ; huang jun rong

..............page:145-146

Relative humidity effect on AFM anodic oxidation of metal film
kuang deng feng ; liu qing gang ; guo wei lian ; zhang shi lin ; hu xiao tang

..............page:142-144

Electrochemically prepared submicron ordered porous alumina film
han yu ; xie kai

..............page:137-141

SU-8 photoresist and its application in MEMS
liu jing quan ; cai bing chu ; chen di ; zhu jun ; zhao xiao lin ; yang chun sheng

..............page:132-136

Assembly of sub-micrometer spheres into 3D periodic structure
yu shang ci ; xu jing ; xie kai ; long yong fu

..............page:129-131

The research of SU8 resist using UV lithography
yi fu ting ; zhang ju fang ; peng liang qiang ; han yong

..............page:126-128,141

Two-photon laser three-dimensional microfabrication and three-dimensional optical data storage technology
yuan da jun ; zhou yong jun ; jiang zhong wei ; huang wen hao ; xia an dong ; zuo jia ru ; liu yun ping

..............page:173-176

Finite element analysis on vacuum microelectronic acceleration sensor
peng shu cheng ; wen zhi yu ; wen zhong quan ; pan yin song ; li xia

..............page:292-294,301

Solution of the stiffness of 2-D capacitive silicon microaccelerometer
liu zuo ; wen zhi yu ; zhang liu qiang ; liang yu qian ; wen zhong quan ; li xia

..............page:289-291

Dynamics analysis and imitation of silicon micro-machined gyroscope using for circumrotation carrier
wang hong wei ; zhu jia lin ; zhang wei ; zhang fu xue

..............page:284-288

A novel piezoresistive accelerometer with high accuracy and overload ability
zeng zhao jun ; shi jin jie

..............page:281-283,288

Design of comb-driving micro-silicon accelerometers based on structure parameters
liu zong lin ; wu xue zhong ; li sheng zuo

..............page:277-280

Influence factors and enhancement on property of micro-silicon gyroscopes
wu xue zhong ; liu zong lin ; li sheng zuo

..............page:274-276,280

Micromachined accelerometer based on resonant principle
jia yu bin ; hao yi long ; zhong ying ; zhang zuo

..............page:271-273

Microfabrication of micron metallic powder with laser sintering
chen ji min ; zuo tie zuo

..............page:170-172

Nano-IC fabrication by SAL601 chemical amplified negative resist
wang yun xiang ; liu ming ; chen bao qin ; xu qiu xia

..............page:167-169

The test structure and examination of Au-Si bonding intensity
wang xiang ; li zuo ; wang zuo ; wang ying ; tian da yu ; zhang da cheng

..............page:110-112

Effects of annealing on gas sensing performance and microstructure of nano-grain ZnO films
ma yong ; wang wan lu ; liao ke jun ; ge fang fang

..............page:108-109,112

Research of critical dimension loss control in the ICP etch of deep Silicon trenches
wang cheng wei ; zuo gui zhen ; zhu yong

..............page:104-107

Formation of selective thick porous silicon layers for insulating Si substrate
chen zhong min ; liu ze wen ; liu li tian ; li zhi jian

..............page:101-103

Lattice vibration quantization of staff in nano-machine and micro-machine
huang jian ping ; li sheng zuo ; wu xue zhong ; luo bing

..............page:14-18

The influence of built-electric on the band offsets of strained MQW
xu li ping

..............page:19-21

Analysis on the mechanical preference of microresonators with meander suspensions
zhao jiang ming ; shen xue zuo ; zhang hai xia ; chen xiao yang

..............page:22-26

Study on modeling of virtual assembly in MEMS design
zhou zuo yun ; zhao xin ; lu gui zhang

..............page:27-30

A feasible framework for virtual operation of MEMS devices
tan yi yong ; zhao xin ; lu gui zhang

..............page:31-35

A new structure for measuring MEMS films fracture strength--thermal actuator
mei nian song ; huang qing an

..............page:215-217

Nanoindentation applying to mechanical measurement for MEMS
zhang tai hua

..............page:212-214

Measurement technique of in-plane motion for micro-structure based on blur image synthesis
jin cui yun ; li da chao ; feng ya lin ; jin shi jiu ; zeng zhou mo ; hao yi long ; zhang da cheng

..............page:208-211

Development of packaging technologies for microsystems
Jin Yu-feng;WANG Zhen-feng;WEI Jun

..............page:207

Analysis of error induced by residual charges in mechanical parameters
jiang yan feng ; huang qing an

..............page:204-206,211

Study on judging the initial contact point in nanoindentation
yang shu ming ; zhu qiang ; zhao ze xiang ; jiang zhuang de

..............page:200-203