Home | Survey | Payment| Talks & Presentations | Job Opportunities
Journals   A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
Micronanoelectronic Technology
1671-4776
2003 Issue 7
Evaluation of the onset voltage of a micro fabrication colloid thruster
xiong ji jun ; zhou zhao ying ; ye xiong ying ; wang xiao hao
..............page:445-448
Fabrication and experiment of a MEMS based cold gas thruster
tang fei ; ye xiong ying ; zhou zhao ying
..............page:441-444
Nanoelectronic devices
guo rong hui ; zhao zheng ping ; liu yu gui ; wu yi bin ; lv miao ; yang yong jun
..............page:557-561
E-beam nano-lithography technology research
liu yu gui ; wang wei jun ; luo si wei
..............page:562-563
Design and fabrication of signal processing integrated circuit for accelerometer
lan mu jie ; liu xiao wei ; chen wei ping ; liu ya chun ; wang mei ; wang dong wang
..............page:564-566,576
Research on intelligent robot
wang yu long ; xiong ji jun ; zhang wen dong
..............page:567-569
Pipe inspection mobile microrobot system based on electromagnetic micromotor with 4mm diameter
chen jia pin ; li zhen bo ; zhang zuo
..............page:570-572
Design techniques for MEMS safety locks
gao yang ; wen gui yin ; zhao xiao lin ; chen wen yuan ; zhang zuo
..............page:573-576
The influence of MEMS techniques on the fire control system
duan xiu sheng ; cheng yuan zeng ; sun shu ying
..............page:577-578,582
Simulation and analysis of basic RTD-based circuits
cheng ; xu jun
..............page:579-582
Design of integrated sensor for atmosphere research
wu yu ; fang zhen ; zhao zhan ; chen chao ; zhang bo jun
..............page:583-585,589
Driver applied in micro or small electromechanical stronglink
zhang wei ping ; chen wen yuan ; zhao xiao lin ; gao yang ; wu xiao sheng
..............page:586-589
Current situation in the development of micromanipulator driven by piezoelectric actuator
rong wei bin ; qu dong sheng ; sun li ning
..............page:590-594
Research on a piezoresistive mass flow sensor
wang xiao bao ; qian jin ; zhang da cheng
..............page:449-451
An electromagnetically actuated miniature valve for high pressure control
fan rui li ; li yong ; chen xu peng ; ye xiong ying ; zhou zhao ying
..............page:452-455,460
Research into micro chemical thrusters
chen xu peng ; li yong ; zhou zhao ying
..............page:456-460
A novel integrated humidity sensor compatible with CMOS
gu lei ; qin ming ; huang qing an
..............page:461-463,466
A resonant beam pressure sensor with a peninsular structure
chen de yong ; cui da fu ; gao xiao tong ; fan zhao yan ; wang li
..............page:464-466
Study on an integrated five-dimension micro force/torque sensor
sun li ning ; tang xue yan ; rong wei bin
..............page:467-469
Design and fabrication of CMOS-compatible polysilicon diaphragms for pressure sensor applications
zhou zuo xin ; qin ming ; huang qing an
..............page:470-473
Research of SU-8 photoresist micro-actuator
qin ning ; zhao zhan ; chen shao feng ; xia shan hong
..............page:474-476
The out-of-chip mechanical method for actuating MEMS parts
wang zuo ; yao han min ; du chun lei ; jiao yu zhong
..............page:477-480
Trace explosive detection with chemical sensor,biosensor and MEMS sensor techniques
zhang cheng mei ; mei tao ; kong de yi ; zhang yan
..............page:481-483,491
Temperature properties and compensation for silicon piezoresistive sensors
fan shang chun ; peng chun rong
..............page:484-488
Study on the temperature compensation method of piezoresistance silicon film sensor
guo tao ; shi yun bo ; zhang wen dong
..............page:489-491
Synthesis of dimethyl carbonate by ultrafine particle catalysts
jiang zuo ; wang shu ming
..............page:496-498
Preparation of highly oriented PZT film by 0-3 composite method
chen chao ; zuo jia ru ; lu jian ; yang yan
..............page:499-502
Six-axis force/torque sensor for micro-testing system for MEMS
he de jian ; zhang hong hai ; liu sheng ; wang xue fang ; wang zhi yong
..............page:503-505,511
Characterization of the pressure wave in piezoelectrically actuated micro jet
feng zuo ying ; zhou zhao ying ; ye xiong ying ; wang guo hui
..............page:506-511
na mi ji shu -- shi chang guang kuo de gao ji shu qian yan
zhong xian xin
..............page:512-513,519
Stress-induced resistance changes in carbon nanotubes
wang wan lu ; wang yong tian ; liao ke jun ; liu gao bin ; li yong ; ma yong
..............page:514-516
Enhanced humidity effect of carbon nanotubes by chemical modified
wang wan lu ; wu zi hua ; liao ke jun ; liu gao bin ; wan bu yong ; wang yong tian
..............page:517-519
A target indirect measurement method of microthrust
tang fei ; ye xiong ying ; zhou zhao ying
..............page:438-440,444
Study on data acquisition of vacuum micro electronic pressure sensor array
pan yin song ; wen zhi yu ; liang yu qian ; jiang zi ping
..............page:435-437
Investigation of PZT piezoelectric thick-film made by screen printing compatible with MEMS
wang wei ; liu xiao wei ; mo bing ; wang juan
..............page:432-434
Design of Mach-Zehnder interferometer for Si-based ARROW pressure sensor
xiao su yan ; wang dong hong ; liu xiao wei ; qin jian yong
..............page:429-431,437
Analysis of electrochemical behaviors on the carbon nanotube electrode
hu chen guo ; wang wan lu ; ma yong ; wu zi hua ; hu jiang chuan
..............page:520-522,525
Precise control of poly(N-isopropylacrylamide) nanogel by photopolymerization
qiao xiang li ; hou zheng chi ; sheng kang long ; yao si de
..............page:523-525
Nano-material and Microelectrode Biosensors
wang li ; cai xin xia ; li hua qing ; guo zeng jun ; rao neng gao
..............page:526-528
Structure of La-, Ca-PbTiO3 nanocrystals and phonon characteristics
deng zuo ; zhang ming sheng
..............page:529-530,535
Self-assembly and nanotechnology
zheng ming bo ; cao jie ming ; tang zuo ; chang xin ; deng shao gao ; ma xian jia ; huan da jun ; tao jie ; xu guo yue
..............page:531-535
The controlling of nanoparticle agglomerates
feng la jun ; liu yi hui ; lei a li
..............page:536-539,542
The conductivity of single walled nanotube films in terahertz region
han jia guang ; zhu zhi yuan ; wang zhen zuo ; yu li ping ; zhang wei ; sun li tao ; wang ting tai
..............page:540-542
Large-scale preparation of aligned carbon nanotubes arrays
li zuo ; bai xiao dong ; xu hua ming ; liang ji
..............page:543-545
Study on making nano-patterns by atom standing wave lens
chen yuan pei ; chen xu nan ; li zhan ; chen xian zhong
..............page:546-549,556
The growth of ZnO nano-film by RF magnetic sputtering
li jing ; wu sun tao ; zhong can
..............page:550-551
Single poly EEPROM
ren tao ; liu zhi hong ; zhu jun
..............page:552-556
Overview of worldwide MEMS industry and market
CUI Zheng
..............page:1-4
Research of dry etching simulator in micromachining
zhou rong chun ; zhang hai xia ; hao yi long
..............page:5-7
Theoretical study on lattice vibration energy and specific heat of staff in nano-machine and micro-machine
huang jian ping ; li sheng zuo ; wu xue zhong ; luo bing
..............page:11-13,18
Part-library-based method of MEMS design
lu gui zhang ; zhao xin
..............page:36-39,43
Multi-port-element network based MEMS system level modeling methodology
ma bing he ; huo peng fei ; yuan wei zheng
..............page:40-40
Meso-piezoresistance effect
wen ting dun ; zhang wen dong
..............page:41-43
An equivalent circuit macromodel for a multi-layer beam electromechanical coupled system
rong hua ; huang qing an ; li wei hua
..............page:44-47
Modeling and simulation of nonlinear behavior of mechanical-electrostatic coupled MEMS devices
sun zhen xin ; huang qing an ; li wei hua
..............page:48-50
The integrated design and visualization of MEMS process
tang hua feng ; yuan wei zheng
..............page:51-53
Simulation of integrated wind flow sensor system on a chip
zhu zuo ; qin ming ; huang qing an
..............page:54-56
Electroplated CoNiMnP magnet array for MEMS actuator
zhang bo jun ; zhao zhan ; chen shao feng
..............page:385-387
Two membrane microwave MEMS switches
zhu jian ; yu yuan wei ; lu le ; jia shi xing ; zhang long
..............page:382-384
MEMS-based micro fuel cell and its air supplying method by piezoelectric fan
yang xing ; zhou zhao ying ; ye xiong ying ; wang xiao hao
..............page:378-381
Research of actuation characteristic of a curved cantilever electrostatic actuator
liu su yan ; niu kai ; ye xiong ying ; zhou zhao ying
..............page:375-377
A novel composite membrane bridge structure for RF MEMS phase shifter and switched tunable capacitor
zuo ; xiao zhi yong ; wu guo ying ; jin yu feng ; hao yi long
..............page:371-374
Bonding for poly(dimethylsiloxane) microfluidic chip by oxygen plasma treatment under medium vacuum
shen de xin ; zhang chun quan ; luo zhong zuo ; zhou yong liang ; zhang feng ; li jia ; tian zhao wu
..............page:369-370
Optical detection on micro biochemical chip
li feng ; wu yi hui ; ju hui ; he min ying
..............page:365-368
Designing of capillary electrophoresis chips based on linear-arrayed electrode for μTAS
chen chao ; zhao zhan ; zhang bo jun
..............page:362-364,368
Electrochemical biosensors
cai xin xia ; li hua qing ; rao neng gao ; wang li ; cui da fu
..............page:359-361
The research of biochip for electrophoresis
yi fu ting ; jiang xiong ping ; peng liang qiang ; zhang ju fang ; han yong
..............page:356-358,361
Simulation, fabrication and characterization of planar microsprings
chen di ; shi lei ; zhu jun ; li jian hua ; ni zhi ping ; liu jing quan ; li yi gui
..............page:57-60
Simulation and analysis for gas flow and heat transfer in micro nozzle
wang mo ran ; chen ze jing ; li zhi xin
..............page:61-64
Simulations and optimization for micro gas flowmeter
wang mo ran ; chen ze jing ; li zhi xin
..............page:65-67,73
Fitting correction for an analytical model of pull-in voltage of fixed-fixed beams
nie meng ; huang qing an ; wang jian hua ; rong hua
..............page:68-70
Study of multifunction sensor with data readout
chen wei ping ; tian li ; tian lei ; li ming jiang ; sun li ning
..............page:426-428
Analysis of model and fabrication of AlGaN based PIN ultraviolet detectors
zhou jin ; hao yi long ; wu guo ying
..............page:422-425
A novel electrostatically driven torisional micromirror
wang cong shun ; xiong chun yang ; yang zhen chuan ; zhang da cheng ; fang jing
..............page:419-421
Optimizing resistance of round hollow wire at high frequency
FENG Yong-jian;ZHANG Tao
..............page:415-418
Novel torsion-mirror optical actuators
wu wen gang ; li da chao ; yuan yong ; sun wei ; yan gui zhen ; hao yi long ; jin shi jiu
..............page:410-414
Theoretical study on resonant tunneling magnetometer
tang xue hua ; you zheng ; yang jian zhong
..............page:407-409
An uncooled infrared imaging system based on bi-material cantilever pixels
wang zuo bing ; ye tian chun ; chen da peng ; wu xiao ping ; zhang qing chuan ; pan liang ; duan zhi hui
..............page:404-406,418
Design and optimization of MEMS optical switch actuated by piezoelectric cantilever based on Si
fang hua jun ; liu jian she ; ren tian ling ; liu li tian
..............page:400-403
Integrated optical interferometer based on bonding technology
li yi gui ; hui chun ; zuo xiao yu ; yu gen yi bo
..............page:397-399
RF MEMS membrane switches on GaAs substrates
zheng wei bin ; huang qing an ; li fu xiao ; liao xiao ping
..............page:395-396,403
Study and fabrication of microstructure array chip based on light addressable potentiometric sensors
han zuo hong ; zhang hong ; gu li bo ; xu lei ; chen shao feng ; wang li ; wang lei
..............page:391-394
Design and simulation of a miniature electric field sensor based on MEMS technique
pei qiang ; xia shan hong ; gong chao ; bai qiang ; chen shao feng
..............page:388-390
Effects on separating resolution and efficiency of electrophoresis chip
liu gang ; wen zhi yu ; li xia ; zhang liu qiang ; peng shu cheng
..............page:347-350
ji yu afm wei jia gong de dan jing gui biao ceng xing zhi de yan jiu
zhao qing liang ; liang ying chun ; cheng kai ; dong shen
..............page:261-264,266
Laser locally heating and bonding for microsystem packaging
lai jian jun ; chen xi qu ; zhou hong ; liu sheng ; yi xin jian
..............page:257-260
Research on laser assisted bonding and packaging system for plastic biochips
chen xi qu ; lai jian jun ; liu sheng ; yi xin jian
..............page:254-256
Design and fabrication of humidity sensor for MEMS hermetic package test
xiong zuo ; yi xin jian ; chen si hai ; chen ming xiang ; zhou shao bo
..............page:251-253
Design and fabrication of microheater array for MEMS wafer-level scale hermetic package
chen si hai ; chen ming xiang ; yi xin jian ; liu sheng ; zhang hong hai ; huang zhu lin ; wang xue fang ; wang zhi yong
..............page:249-250
Nanoindentation and nanoscratch measurements on the mechanical properties of SiO2 film
zhang hai xia ; zhang tai hua ; zuo yong
..............page:245-248
Investigation of AFM-based nano-indentation on micro-machined silicon surface
zhao qing liang ; liang ying chun ; cheng kai ; dong shen
..............page:241-244
Investigation on Au-Si wafer bonding for MEMS device packaging
liu xue song ; zuo gui zhen ; hao yi long ; zhang hai xia
..............page:238-240,248
Study on packaging technology in MEMS
shi yun bo ; liu jun ; zhang wen dong
..............page:235-237
Low voltage separation model and its control system for electrophoresis chip
li xia ; wen zhi yu ; li xing hai ; wu ying ; peng shu cheng
..............page:344-346,350
Design and experiment research of integrated capillary electrophoresis chip
tian li ; liu xiao wei ; wang xi lian ; tian lei ; ao ming sheng ; xiong jun
..............page:340-343
Micro biochemical analysis system
wen zhi yu ; chen gang ; pan yin song ; xu yi ; li xia ; jiang zi ping
..............page:338-339,343
Development of the purification for metallothionein (MT)
wang xiang ; zhang da cheng ; li zuo ; wang zuo ; ren hong wei ; han tie gang ; yu mei min
..............page:335-337
Research on the micro-heater and temperature sensor in PCR biochip
xi wen zhu ; zuo wei ping ; du li qun ; guo ji hong
..............page:332-334,337
Computer numerical analysis of electrokinetic injection in chip capillary electrophoresis
zheng jiu wen ; zuo wei ping ; liu chong ; bai ji ling
..............page:328-331
Research of microchip capillary electrophoresis laser-induced fluorescence detection system
chen dong ; zuo wei ping ; hao ying guang ; ma ling zhi
..............page:324-327
Fabrication and thermal analysis of microchamber in PCR biochip
liu da zhen ; zuo wei ping ; guo ji hong ; du li qun
..............page:321-323,327
Research on reliability of the MEMS convective accelerometer
yang yong jun ; lin hai feng ; shi qian ; xu ai dong
..............page:317-320
BioMEMS--bridging of biomedical diagnostics and treatments
yu xiao mei ; zhang da cheng
..............page:351-355
Effect of process stress on resonance frequency of the double linear vibratory gyroscope
xie ming mei ; zuo an ping ; wang shou rong
..............page:314-316
Fabrication of UV-LIGA micro acceleration switch
chen guang zuo ; he xiao ping ; shi zhi gui ; ding yuan ping ; zhao long
..............page:312-313,316
Design of micromachined gyroscope with electromagnetic actuation and capacitive detection
song chao hui ; jia meng jun ; li zuo xin
..............page:309-311
A micromachined piezoresistive accelerometer and its design optimization
huang shu sen ; guo nan xiang ; huang zuo ; song chao hui ; li xin zuo ; wang yue lin
..............page:305-308
Design of a micromechanical inclinometer with two strained silicon beams
kong de yi ; zhang tao ; mei tao ; ni lin ; sun zuo ; tao yong chun
..............page:302-304
Design of capacitive accelerometer for environment vibration measurement
zhou zai fa ; huang qing an ; qin ming
..............page:298-301
System analysis and design of a MEMS tunneling accelerometer
dong hai feng ; jia yu bin ; hao yi long
..............page:295-297
Study of vacuum packaging and vacuum level testing technologies of MEMS packaging
zhang li hua ; li jun ; shao chong jian
..............page:267-270
Three-dimensional micromaching on Cu--application of confined etchant layer technique (CELT)
liu zhu fang ; jiang li min ; tang zuo ; zhang li ; tian zhao wu ; liu pin kuan ; qu dong sheng ; sun li ning ; ye xiong ying ; zhou zhao ying ; tian zhong qun
..............page:265-266
Flip chip bonding technology used in modern micro-photoelectron package
pei wei hua ; deng zuo ; chen hong da
..............page:231-234
Direct measurement of force in biology with AFM
wang yan xia ; li yan ning ; fu xing ; li zheng guang ; hu xiao tang
..............page:228-230
A MEMS testing system using computer microvision
feng ya lin ; li da chao ; jin cui yun ; hao yi long ; zhang da cheng ; jin shi jiu
..............page:221-223,234
Application of microscopic interferometry in dynamic testing system of MEMS
guo tong ; hu xiao dong ; li da chao ; hu chun guang ; hu xiao tang
..............page:218-220
Micro-and nano-fabrication by EC-SPM
tang zuo ; mao bing wei ; tian zhong qun
..............page:192-196
Study on sputtering process of tin oxide
feng hai yu ; huang yuan qing ; feng yong jian
..............page:189-191
Study of the demolding effects of the Ni and Ni-PTFE self-lubricated molding inserts
zhang peng ; liu gang ; tian yang chao
..............page:186-188
Study on computer simulation of proximity lithography
tian xue hong ; liu gang ; tian yang chao ; zhang xin yi ; zhang peng
..............page:181-185
Progress of scanning probe lithography and study on scanning plasma etching technology
wang hai ; zuo jia ru ; zhao gang
..............page:177-180,185
The fabrication technology of silicon tip
wang yan hua ; sun dao heng
..............page:164-166
Design and fabrication of microcalorimeter for measuring heat capacity of thin films
song qing lin ; cui zuo ; xia shan hong ; chen shao feng
..............page:122-125
Research for sandwich MEMS device by vacuum bonding
yang guo yu ; shui guo hua ; zhang zheng yuan ; wen zhi yu
..............page:120-121
The status and tendency of next generation lithography
li yan qiu
..............page:116-119,125
Fabrication technique of deep electrical isolation trenches using DRIE and medium refill
zhu yong ; zuo gui zhen ; wang cheng wei ; wang yang yuan
..............page:113-115
Applications of pulsed laser microfabrication technology in MEMS
li yan ning ; tang jie ; rao zhi jun ; song xiao hui ; hu xiao dong ; fu xing ; hu xiao tang
..............page:159-163
Study on the processing technique of microstructure based on AFM
sun tao ; zuo yong da ; xia jia fei ; liang ying chun ; cheng kai ; dong shen
..............page:154-158
Research and application of thick photoresist lithography using UV light
li zuo ; tan zhi min ; xue zuo ; liu li tian
..............page:151-153
Design on X-ray masks for LIGA station in 3B1 beamline
huang jun rong ; peng liang qiang ; yi fu ting ; jiang yi jian ; zhang ju fang ; han yong
..............page:147-150
Application of fuzzy neural network in target recognition
zhang yan jun ; liu jun ; zhang wen dong
..............page:96-97
The research and development of MEMS CAD tool IMEE
zhang hai xia ; guo hui ; xiao zhi yong ; zhou rong chun ; hao yi long
..............page:92-95
Developments of topology optimization method and its application in micro-mechanism design
zuo jin kui ; hao xiu chun ; wang li ding
..............page:87-91
Transient field analysis for series MEMS switch
gu hong ming ; lv miao ; dan fu zuo ; gao zuo xin ; liang chun guang
..............page:84-86
Mechanical analyzing of V-shaped cantilever electrothermal actuator
zhang yong yu ; shen xue zuo ; chen xiao yang
..............page:80-83
A new micromechanical anchor structure
liu zu zuo ; huang qing an
..............page:74-75,83
Software development of the meteorological monitoring microsystem
hu de sheng ; zhang zhong ping ; huang qing an
..............page:71-73
Research on moulding of microstructure at BSRF
han yong ; peng liang qiang ; chen di ; yi fu ting ; zhang ju fang ; huang jun rong
..............page:145-146
Relative humidity effect on AFM anodic oxidation of metal film
kuang deng feng ; liu qing gang ; guo wei lian ; zhang shi lin ; hu xiao tang
..............page:142-144
Electrochemically prepared submicron ordered porous alumina film
han yu ; xie kai
..............page:137-141
SU-8 photoresist and its application in MEMS
liu jing quan ; cai bing chu ; chen di ; zhu jun ; zhao xiao lin ; yang chun sheng
..............page:132-136
Assembly of sub-micrometer spheres into 3D periodic structure
yu shang ci ; xu jing ; xie kai ; long yong fu
..............page:129-131
The research of SU8 resist using UV lithography
yi fu ting ; zhang ju fang ; peng liang qiang ; han yong
..............page:126-128,141
Two-photon laser three-dimensional microfabrication and three-dimensional optical data storage technology
yuan da jun ; zhou yong jun ; jiang zhong wei ; huang wen hao ; xia an dong ; zuo jia ru ; liu yun ping
..............page:173-176
Finite element analysis on vacuum microelectronic acceleration sensor
peng shu cheng ; wen zhi yu ; wen zhong quan ; pan yin song ; li xia
..............page:292-294,301
Solution of the stiffness of 2-D capacitive silicon microaccelerometer
liu zuo ; wen zhi yu ; zhang liu qiang ; liang yu qian ; wen zhong quan ; li xia
..............page:289-291
Dynamics analysis and imitation of silicon micro-machined gyroscope using for circumrotation carrier
wang hong wei ; zhu jia lin ; zhang wei ; zhang fu xue
..............page:284-288
A novel piezoresistive accelerometer with high accuracy and overload ability
zeng zhao jun ; shi jin jie
..............page:281-283,288
Design of comb-driving micro-silicon accelerometers based on structure parameters
liu zong lin ; wu xue zhong ; li sheng zuo
..............page:277-280
Influence factors and enhancement on property of micro-silicon gyroscopes
wu xue zhong ; liu zong lin ; li sheng zuo
..............page:274-276,280
Micromachined accelerometer based on resonant principle
jia yu bin ; hao yi long ; zhong ying ; zhang zuo
..............page:271-273
Microfabrication of micron metallic powder with laser sintering
chen ji min ; zuo tie zuo
..............page:170-172
Nano-IC fabrication by SAL601 chemical amplified negative resist
wang yun xiang ; liu ming ; chen bao qin ; xu qiu xia
..............page:167-169
The test structure and examination of Au-Si bonding intensity
wang xiang ; li zuo ; wang zuo ; wang ying ; tian da yu ; zhang da cheng
..............page:110-112
Effects of annealing on gas sensing performance and microstructure of nano-grain ZnO films
ma yong ; wang wan lu ; liao ke jun ; ge fang fang
..............page:108-109,112
Research of critical dimension loss control in the ICP etch of deep Silicon trenches
wang cheng wei ; zuo gui zhen ; zhu yong
..............page:104-107
Formation of selective thick porous silicon layers for insulating Si substrate
chen zhong min ; liu ze wen ; liu li tian ; li zhi jian
..............page:101-103
Lattice vibration quantization of staff in nano-machine and micro-machine
huang jian ping ; li sheng zuo ; wu xue zhong ; luo bing
..............page:14-18
Analysis on the mechanical preference of microresonators with meander suspensions
zhao jiang ming ; shen xue zuo ; zhang hai xia ; chen xiao yang
..............page:22-26
Study on modeling of virtual assembly in MEMS design
zhou zuo yun ; zhao xin ; lu gui zhang
..............page:27-30
A feasible framework for virtual operation of MEMS devices
tan yi yong ; zhao xin ; lu gui zhang
..............page:31-35
A new structure for measuring MEMS films fracture strength--thermal actuator
mei nian song ; huang qing an
..............page:215-217
Nanoindentation applying to mechanical measurement for MEMS
zhang tai hua
..............page:212-214
Measurement technique of in-plane motion for micro-structure based on blur image synthesis
jin cui yun ; li da chao ; feng ya lin ; jin shi jiu ; zeng zhou mo ; hao yi long ; zhang da cheng
..............page:208-211
Development of packaging technologies for microsystems
Jin Yu-feng;WANG Zhen-feng;WEI Jun
..............page:207
Analysis of error induced by residual charges in mechanical parameters
jiang yan feng ; huang qing an
..............page:204-206,211
Study on judging the initial contact point in nanoindentation
yang shu ming ; zhu qiang ; zhao ze xiang ; jiang zhuang de
..............page:200-203