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Micronanoelectronic Technology
1671-4776
2003 Issue 4
A new technique for fabrication of nanodevices-nanoimprint lithography
liang ying xin ; wang tai hong
..............page:2-7
Analysis of thermos-field distribution characteristics in vertical-cavity surface emitting lasers
liu li xin ; zhao hong dong ; cao meng
..............page:8-11
Application of planar photonic-bandgap structure in microwave & millimeter-wave IC
zhang wen mei ; li xiao wei ; mao jun fa ; sun xiao zuo
..............page:12-17,44
Preparing thick-film sensitive ceramic material with nano-powders
wang meng kui ; wang zhi fan ; liu wen lei
..............page:18-22,26
Research on preparation of Cu/Mo compound powder by hydrogen reducing Cu/Mo compound
li zai yuan ; di yu chun ; tian yan wen ; wang tian ran
..............page:23-26
MEMS-IDT surface acoustic wave gyro
lv zhi qing ; hu ai min
..............page:27-29,33
Characteristic and application of polyimide in MEMS
deng jun yong ; feng yong jian
..............page:30-33
Research and development of in-situ measurement on mechanical parameters in MEMS field
jiang yan feng ; huang qing an
..............page:34-39
90 nm process and its relevant technology
weng shou song
..............page:40-44