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Micronanoelectronic Technology
1671-4776
2002 Issue 4
Solid state nanoelectronic device and molecular electronic device
guo wei lian
..............
page:1-7
Si single-electron transistor with in-plane point-contact metal gates
sun jin peng ; wang tai hong
..............
page:8-10,36
Single-electron transistor and its fabrication
guo hui ; guo wei lian ; zhang shi lin ; liang hui lai
..............
page:11-18
Influence of substrate temperature of nanocrystalline SnO2 thin films
wang zhan he ; jiang yun chen ; zhu zuo
..............
page:19-21
Preparation nanometer Si clusters by RF magnetron sputtering technique
ma zhen chang ; zong wan hua ; heng cheng lin ; qin guo gang ; wu zheng long
..............
page:22-24,29
Carbon narotube and its fabrication technology
zhang chen
..............
page:25-29
Application of DUV deep lithography in LIGA process
yu guo bin ; yao han min ; hu song ; chen xing jun
..............
page:30-32
Prime study of an electromagnetic microrelay fabricated by UV-LIGA technology
zhang peng ; liu gang ; tian yang chao
..............
page:33-36
A new type of projection electron beam lithography with angular limitation
gu wen zuo ; zhang fu an
..............
page:37-41
Applications of process technology of EB direct-writing gate and T-shape gate
liu yu gui ; wang wei jun ; luo si wei ; jiang ze liu
..............
page:42-43
wo guo na mi yan jiu ji gou ji jin
..............
page:44
guo nei wai na mi ji shu yan jiu ji hua yu dong tai shi ling
..............
page:44-46
na mi chan pin jie shao
..............
page:46-47
dian zi 13 suo wei na yan jiu zhong xin
..............
page:48