1672-6030
2011 Issue 5
Design and Fabrication of a Novel Rocking-Mass Micromachined Gyroscope
WANG Xiong;XIAO Ding-bang;ZHOU Ze-long;CHEN Zhi-hua;WU Xue-zhong;LI Sheng-yi
WANG Xiong;XIAO Ding-bang;ZHOU Ze-long;CHEN Zhi-hua;WU Xue-zhong;LI Sheng-yi
..............page:412-416
A Low-Stress Anodic Bonding Method to Avoid Pull-in Effect
HOU Zhan-qiang;DONG Pei-tao;XIAO Ding-bang;WU Xue-zhong
HOU Zhan-qiang;DONG Pei-tao;XIAO Ding-bang;WU Xue-zhong
..............page:446-450
Effect of Bonding Temperature on Electroosmotic Flows of PMMA Electrophoresis Chip
LIU Yuan-yuan;LIU Xiao-wei;YIN Jing-hua
LIU Yuan-yuan;LIU Xiao-wei;YIN Jing-hua
..............page:468-470
Dimensional Metrology at PTB to Support Optical Fabrication
DAI Gao-liang;SCHULZ Michael;EHRET Gerd;DANZEBRINK Hans-Ulrich;FLUEGGE Jens;BOSSE Harald
DAI Gao-liang;SCHULZ Michael;EHRET Gerd;DANZEBRINK Hans-Ulrich;FLUEGGE Jens;BOSSE Harald
..............page:377-391
High-Productivity Ultraprecise Polishing Technique of CVD Diamond Film
YUAN Ze-wei;JIN Zhu-ji;WANG Kun;WEN Quan
YUAN Ze-wei;JIN Zhu-ji;WANG Kun;WEN Quan
..............page:451-458
Parameter Calibration and Optimization Algorithm for Laser Inner Diameter Measurement System
ZHANG Fu-min;QU Xing-hua;LIU Hong-xuan
ZHANG Fu-min;QU Xing-hua;LIU Hong-xuan
..............page:459-463
Fabrication of High Rigidity Micro Deformable Mirror Based on PZT Thick-Film Actuator
MA Jian-qiang;LI Bao-qing;XU Xiao-hui;CHU Jia-ru
MA Jian-qiang;LI Bao-qing;XU Xiao-hui;CHU Jia-ru
..............page:427-431
Analysis of Refractive-Index Sensitivity of Nanoporous Waveguide Based Leaky Mode Resonance Sensor
ZHANG Zhe;QI Zhi-mei
ZHANG Zhe;QI Zhi-mei
..............page:397-401
Fabrication of Micro/Nanofluidic System with Water-Dissolvable Nanowires
XU Sheng-yong;WU Xiu-dong;ZHUANG Qian-wei;XUE Jiong-wei;SUN Wei-qiang
XU Sheng-yong;WU Xiu-dong;ZHUANG Qian-wei;XUE Jiong-wei;SUN Wei-qiang
..............page:392-396
Photothermal Microactuator Manufactured by Excimer Laser
ZHANG Hai-jun;ZHAO Dong-wei;YI Fu-ting;WANG Bo;ZHANG Dong-xian
ZHANG Hai-jun;ZHAO Dong-wei;YI Fu-ting;WANG Bo;ZHANG Dong-xian
..............page:436-439
Development of Biomimetic Micro Sensor for Urea Based on Molecular Imprinting
REN Zhen-xing;BIAN Chao;XUE Qian-nan;HAN Jing-hong;XIA Shan-hong
REN Zhen-xing;BIAN Chao;XUE Qian-nan;HAN Jing-hong;XIA Shan-hong
..............page:417-421
Fabrication of Parylene-Based Flexible Microelectrode Arrays
RUI Yue-feng;WANG Ya-jun;LIU Jing-quan;YANG Chun-sheng
RUI Yue-feng;WANG Ya-jun;LIU Jing-quan;YANG Chun-sheng
..............page:422-426
Design and Experiment of Metallic Nanoparticle Preparation Equipment
LI Kai;LUO Jiang-shan;LUO Bing-chi;TAN Xiu-lan;NIU Gao
LI Kai;LUO Jiang-shan;LUO Bing-chi;TAN Xiu-lan;NIU Gao
..............page:402-407
..............page:封3
Acceleration Fatigue Experiment of Polysilicon Beam
HAN Lei;JU Yi;CHEN Long-long;TANG Jie-ying
HAN Lei;JU Yi;CHEN Long-long;TANG Jie-ying
..............page:464-467
Micro-Heating Technology Based on Electron Beam Lithography
KONG Xiang-dong;HAN Li;CHU Ming-zhang;XUE Hong
KONG Xiang-dong;HAN Li;CHU Ming-zhang;XUE Hong
..............page:440-445
Design and Performance Analysis of an Air-Breathing Micro Direct Methanol Fuel Cell
ZHANG Bo;ZHANG Yu-feng;YUAN Zhen-yu;ZHANG Tao;LIU Xiao-wei
ZHANG Bo;ZHANG Yu-feng;YUAN Zhen-yu;ZHANG Tao;LIU Xiao-wei
..............page:432-435
One-Step Hydrothermal Method to Synthesize Nano/Micro-Sized ZnO Spheres
XU Shuang;MENG Qing-hui;CHENG Ji-hang
XU Shuang;MENG Qing-hui;CHENG Ji-hang
..............page:408-411