1672-6030
2011 Issue 1
Improved Model of Residual Stress on Top Electrode Membrane of Fixed-Fixed Beam RF MEMS Switches
CHEN Jun-shou;YOU Zheng;LI Bin
CHEN Jun-shou;YOU Zheng;LI Bin
..............page:16-20
MEMS Geometric Parameters Measurement Based on White Light Phase Shifting Interferometry
MA Long;GUO Tong;ZHAO Jian;XU Lin-yan;CHEN Jin-ping;FU Xing;HU Xiao-tang
MA Long;GUO Tong;ZHAO Jian;XU Lin-yan;CHEN Jin-ping;FU Xing;HU Xiao-tang
..............page:39-43
Electrical Trimming Properties of Poly-Si Nano Thin Film Resistors Based on Current-Induced Recrystallization
SHI Chang-zhi;CUI Hong-yun;LIU Xiao-wei;CHUAI Rong-yan;LI Zhi
SHI Chang-zhi;CUI Hong-yun;LIU Xiao-wei;CHUAI Rong-yan;LI Zhi
..............page:11-15
Micromachined Sandwich Interferometric Accelerometer with Force Feedback Control
WU Kang;YE Xiong-ying;CHEN Feng;LIU Li-tao;ZHOU Zhao-ying
WU Kang;YE Xiong-ying;CHEN Feng;LIU Li-tao;ZHOU Zhao-ying
..............page:21-25
Fabrication of Superhydrophobic Surfaces on Ti6Al4V Alloy and Its Wettability
LIAN Feng;ZHANG Hui-chen;PANG Lian-yun;LI Jie
LIAN Feng;ZHANG Hui-chen;PANG Lian-yun;LI Jie
..............page:6-10
Design of an MEMS-Based Distributed and Low Level AHPRS
GUO Jian-dong;SONG Yan-guo;XIA Pin-qi
GUO Jian-dong;SONG Yan-guo;XIA Pin-qi
..............page:26-32
Piezoelectric-Stack Pump for Micro-Reagents Dispense
KONG Xiang-bing;CHEN Li-guo;SHAO Chao;LIU De-li;QU Dong-sheng
KONG Xiang-bing;CHEN Li-guo;SHAO Chao;LIU De-li;QU Dong-sheng
..............page:33-38
Design and Applications of IR Detector Based on LiTaO3 Crystal Thin Wafer
TAN Qiu-lin;ZHANG Wen-dong;LIU Jun;XUE Chen-yang;XIONG Ji-jun
TAN Qiu-lin;ZHANG Wen-dong;LIU Jun;XUE Chen-yang;XIONG Ji-jun
..............page:73-77
Measuring the Concentration of High Scattering Matters with Multi-Optical Path Method
LIN Ling;LI Jing-yao;LI Gang
LIN Ling;LI Jing-yao;LI Gang
..............page:48-52
..............page:封3
Effect of Tool Centering Error on Slow Tool Servo Turning for Off-Axis Parabolic Mirrors
GUAN Chao-liang;DAI Yi-fan;YIN Zi-qiang
GUAN Chao-liang;DAI Yi-fan;YIN Zi-qiang
..............page:89-94
Manufacturing Technique and Measurement of Micro-Piezoelectric Cantilever Beam for Ambient Vibration Energy Collection
CHU Jin-kui;LI Tao;HAN Bing-feng;XIONG Ye-sheng
CHU Jin-kui;LI Tao;HAN Bing-feng;XIONG Ye-sheng
..............page:1-5
Electrochemical Milling of Micro Slot
CHEN Hui;WANG Yu-kui;WANG Zhen-long;ZHAO Wan-sheng
CHEN Hui;WANG Yu-kui;WANG Zhen-long;ZHAO Wan-sheng
..............page:83-88
Fabrication of GaN-Based MEMS Structures Using Dry-Etch Technique
YANG Zhen-chuan;L(U) Jia-nan;YAN Gui-zhen;CHEN Jing
YANG Zhen-chuan;L(U) Jia-nan;YAN Gui-zhen;CHEN Jing
..............page:78-82
Out-of-Core Incremental Algorithm and Visualization Technique for 3D Laguerre Model
LI Jun-chen;LI Xu-dong;SHENG Jie
LI Jun-chen;LI Xu-dong;SHENG Jie
..............page:65-72
Fast North-Seeking Method Based on 1/8 Period Prediction
DONG Gui-mei;FENG Li;LIN Yu-chi;GAO Yong-hui;QI Yong-yue
DONG Gui-mei;FENG Li;LIN Yu-chi;GAO Yong-hui;QI Yong-yue
..............page:53-57
Recognition Algorithm for Multi-Biometric Fusion Based on SVM
LIU Tie-gen;LI Xiu-yan;WANG Yun-xin;DENG Shi-chao
LIU Tie-gen;LI Xiu-yan;WANG Yun-xin;DENG Shi-chao
..............page:44-47
Design of Scanning Parameters Optimization for PI Controller
CHEN Dai-xie;YIN Bo-hua;LIN Yun-sheng;HAN Li;LI Min
CHEN Dai-xie;YIN Bo-hua;LIN Yun-sheng;HAN Li;LI Min
..............page:58-64