Nanotechnology and Precision Engineering 2007 Issue 4 Mechanical Properties of 3D Silicon Nanosprings Fabricated by FIB

Mechanical Properties of 3D Silicon Nanosprings Fabricated by FIB
LAI Xi-hu;XU Jun;WU Wen-gang;JING Guang-yin;HAO Yi-long

..............page:351-354

Microstructure Metallization Using Electroless Gold Plating
YANG Bo;LI Zhi-hong

..............page:347-350

Buckling of Grating Light Modulator Array
ZHANG Zhi-hai;HUANG Shang-lian;ZHANG Jie;SUN Ji-yong;FU Hong-qiao

..............page:343-346

Filling and Morphology of PP Micro-Array by Micro Injection Molding
LU Zhen;ZHANG Kai-feng

..............page:339-342

Protection of the Pad and the Structures on Chip During Front-Side Wet Etching in MEMS Post-Processing
ZHANG Xiao-duo;QIN Ming

..............page:335-338

Low-Temperature Bonding for Electrochemiluminescence Chemiluminescence Microfluidic Chip with ITO Glass
QI Na;LUO yi;YANG Fan

..............page:331-334

Preparation and Characterization of Pb(ZrxTi1-x)O3 Thin Film on Indium Tin Oxide
LIU Shuang;wu Ya-lei;XU Xiao-hui;WEN Li;HUANG Wen-hao;CHU Jia-ru

..............page:327-330

Application of Fuzzy Neural Network in the Internal Stress of SU-8 Photoresist
ZHU Shen-miao;DU Li-qun;IAU Chong;YU Li-chuan;WANG Zhi-hong

..............page:323-326

Design and Experimental Research of a Cell Electrical Impedance Spectroscopy Chip
XIAO Ming-fei;YANG Xing;ZHOU Zhao-ying;WU Ying;XIE Ming-chao;WU Ting

..............page:302-306

Floating-Reference Method of Noninvasive Blood Glucose Concentration Measurement
CHEN Wen-liang;YANG Yue;XU Ke-xin;MA Zhen

..............page:298-301

Design of a New ∑-Δ Voltage-to-Frequency Converter Used for Accelerometer Interface Circuit
SHI Chang-zhi;LIU Xiao-wei;TAN Xiao-yun

..............page:293-297

Design of MEMS Latch Mechanism of Lateral Orientation Deformation Based on LIGA Technology
LI Hua;SHI Geng-chen

..............page:289-292

Model of Reliability Prediction
XIONG Ji-jun;GAO Jian-fei;GUO Tao;FAN Bo

..............page:285-288

Theory and Experiment of PI-Cantilever
ZHONG Yan-chao;LIANG Jing-qiu;LI Xiao-qi;LI Wei;WANG Shu-rong;LIANG Zhong-zhu;SUN De-gui

..............page:281-284

Design of Piezoresistive Micro-Cantilever with Stress Concentration Regions
MEI De-qing;WANG Yan-cheng;CHEN Zi-chen

..............page:277-280

Influence of Exciting Power on the Resonant Frequency of the Micromechanical Resonant Beam
FAN Shang－chun;WANG Cai－xia

..............page:273-276

Design of the Sub-Wavelength Wire-Grid Polarizers
MENG Fan－tao;CHU Jin－kui;HAN Zhi－tao;ZHAO Kai－chun

..............page:269-272

Novel MEMS Infrared Radiation Source Based on Photonic Crystal Structure
WANG Guo-xun;JI Xin-ming;ZHOU Jia;BAO Zong-ming;BAO Min-hang;HUANG Yi-ping

..............page:266-268

Fabrication and Characterization of PZT Thick Film Actuators Array for MEMS Deformable Mirror
XU Xiao-hui;FENG Yan;LIU Shuang;LI Bao-qing;CHU Jia-ru

..............page:261-265

Preparation of Thermal Polyurethane(TPU) Nanotubes Using a Porous Template Method
QU Jian-bo;SHE Xi-lin;YUAN Fang

..............page:256-260

N-Type Area of PN Junction Etched in BOE Solution
WANG Hui-quan;JIN Zhong-he;LI Tie;MA Hui-lian;WANG Yue-lin

..............page:253-255

Sub-Wavelength Gratings Based on X-Ray Lithography
LI Yi-gui;SUGIYAMA Susumu

..............page:249-252

Micro-Etching Holes in the Thin Film Fabrication
LI Bo;XU Chen;SONG Yi-chao;SHEN Guang-di

..............page:245-248

Scale Effect on Young's Modulus of a Silicon Nano-Plate
WANG Jing;HUANG Qing-an;Yu Hong

..............page:242-244

Inspiration on Development and Industrialization of Micro/Nano Science and Technology
DING Heng-gao;ZHU Rong

..............page:235-241

Stability of Micro-Scale Separated Plane Poiseuille Flow
YOU Xue-yi;ZHENG Jing-ru

..............page:319-322

North Finding Algorithm Based on Real-Time Transmit Method
LIN Ming-chun;XIA Gui-suo;LIN Yu-chi;HUANG Yin-guo

..............page:315-318

2D Nano-Displacement Measurement with Diffraction Grating
XIA Hao-jie;FEI Ye-tai;FAN Guang-zhao;CHENG Fang

..............page:311-314

Mathematical Model and Experiment of Vibration-Based Piezoelectric Generator
HE Xue-feng;WEN Zhi-yu;WEN Zhong-quan;SHANG Zheng-guo;LIE Hai-tao;LIAO Hai-yang

..............page:307-310