Comparison of Three Dimensional Coordinate Measurement Data and CAD Models
CLAUDET A Andre;KURFESS R Thomas

..............page:241-248

Straightness Measurement for Long Movements
KNAPP W;BRINGMANN B

..............page:249-256

Influence of Flow Velocity Profile on Mixing Effect in Micromixer
YU Hai-yan;XIAO Song-shan;CHEN He;FAN Shi-fu

..............page:290-294

Design Model of the Quantum Micro-Propulsion
CHENG Guang-gui;DING Jian-ning;WANG Quan

..............page:295-298

Nano-Level Vibration Test and Compensation Based on Tunneling Effect
LI Meng-chao;FU Xing;HU Xiao-tang

..............page:299-302

Characteristics and Fabrications of InN Nanowire Material
XIE Zi-li;ZHANG Rong;XIU Xiang-qian;LIU Bin;JIANG Ruo-lian;GU Shu-lin;HAN Ping;ZHAO Hong;ZHU Shun-ming;SHI Yi;ZHENG You-dou

..............page:303-306

Design of a Nanofabrication Probe with a Force Sensor
GAO Wei;GENDA Satoshi;KUDO Yasuto;KIYONO Satoshi;Patten A John

..............page:307-313

Design and Simulation of a Wafer Stage for Extreme Ultra Violet Lithography
ZHU Tao;LI Yan-qiu

..............page:314-318

XY Precise Positioning Work-Stage Based on Giant Magneto-Strictive and Piezo-Electric Ceramics
LI Cui-hong;MENG Yong-gang;TIAN Yu;WEN Shi-zhu

..............page:257-261

Mathematical Model and Error Analysis of the Articulated Arm Flexible CMM
WANG Xue-ying;LIU Shu-gui;WANG Bin;ZHANG Guo-xiong

..............page:262-267

Worktable Precision Adjustment Based on Error Analysis of Ballbar Transducer and Linear Grating Sensor
TAO Tao;MEI Xue-song;JIANG Ge-dong;SUN Nuo-gang

..............page:268-272

Quality Factor of Microcantilever Based on Digital Tuning Method
ZHU Long-yang;LU Jian;WU Ya-lei;XU Xiao-hui;CHU Jia-ru

..............page:273-277

Mechanical Analysis and Computation of Parallel Springs
MU Xin-ming;WANG Jian-hua;YANG Mi

..............page:278-282

A Novel Tunable Lateral Sensing Capacitive Silicon Micromachined Accelerometer with High Sensitivity
SONG Fei;WANG Xin;WANG Yi-song;CHEN Jing

..............page:283-289