Nanotechnology and Precision Engineering 2003 Issue 1 Basic Problems about Thermal Deformation Error in Precision Technology

Journals A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

Nanotechnology and Precision Engineering
1672-6030
2003 Issue 1

..............page:79-84

Precision Nanometrology of Large Silicon Wafer Flatness
gao wei ;yamada tomohiko;furukawa masaru;nakamuba tomohisa;shimizu hiroki;kiyono satoshi

..............page:71-78

Characterization of Surface Systems
Whitehouse D J

..............page:62-70

Ultra-Precision Machining of Optical Microstructures
li rong bin ; du xue ; zhang zhi hui ; gao dong ; zhao wei ming

..............page:57-61

Grinding Damage in Fine Ceramics
zhang zuo ; meng jian

..............page:48-56

..............page:38-47

A Novel Silicon Micromachined Resonant Accelerometer
zhong ying ; zhang guo xiong ; li xing fei

..............page:34-37

..............page:31-33

..............page:24-30

Development of a Small Coordinate Measuring Machine with Micro/Nano-Accuracy
fan guang zhao ; zhu zhi liang ; zhong tian dong

..............page:17-23

..............page:11-16

..............page:7-10

Progress on the Sub-Atomic Measuring Machine
hocken robert j; wang chun hai

..............page:1-6