1001-9669
2001 Issue 4
MICROMECHANICAL SiN BEAM RESONANT PRESSURE SENSOR
chen de yong ; cui da fu ; yu zhong yao ; wang li
chen de yong ; cui da fu ; yu zhong yao ; wang li
..............page:543-547
BASIC FACTS OF FUNDING ON MICRO/NANOTECHNOLOGY IN DIVISION OF MECHANICAL ENGINEERING, NSFC
li ming ; lei yuan zhong
li ming ; lei yuan zhong
..............page:548-551
..............page:554-560
MICROMACHINED INFRARED THERMOPILE DETECTOR
xu zuo yi ; xiong bin ; wang zuo ; wang yue lin
xu zuo yi ; xiong bin ; wang zuo ; wang yue lin
..............page:539-542
..............page:535-538
PACKAGING OF WAVEGUIDE DEVICES BASED ON BULK SILICON MEMS TECHNOLOGY
liu dong dong ; hu hai bo ; tang yan zhe ; ding chun ; wang yue lin
liu dong dong ; hu hai bo ; tang yan zhe ; ding chun ; wang yue lin
..............page:531-534
STUDY ON DYNAMIC CHARACTERISTIC OF A NOVEL SILICON MICROMACHINED GYROSCOPE
xiong bin ; che lu feng ; wang yue lin
xiong bin ; che lu feng ; wang yue lin
..............page:527-530
TECHNOLOGY OF SILICON-BASED MEMS
hao yi long ; zhang li xian ; li zuo ; zhang da cheng
hao yi long ; zhang li xian ; li zuo ; zhang da cheng
..............page:523-526
FAILURE ANALYSIS OF MICROACCELEROMETER UNDER IMPACT LOADING
wang li sen ; hu yu qun ; li zhi hong ; yu tong xi ; zhao ya zuo
wang li sen ; hu yu qun ; li zhi hong ; yu tong xi ; zhao ya zuo
..............page:516-522
MATERIALS WEAR AND WEAR IN MICRO-ELECTRO-MECHANICAL SYSTEMS
deng zhong min ; xie ji jia ; zhou cheng en ; hong you shi
deng zhong min ; xie ji jia ; zhou cheng en ; hong you shi
..............page:511-515
PREPARATION AND TRIBOLOGICAL PROPERTIES OF C60-TERMINATED SELF-ASSEMBLED MONOLAYERS
ren si li ; zhao ya zuo ; yang sheng rong ; meng yong hong ; wang zhan hui
ren si li ; zhao ya zuo ; yang sheng rong ; meng yong hong ; wang zhan hui
..............page:507-510
RESEARCH ON COUPLED ELECTRO-MECHANICAL ANALYSIS AND APPLICATION FOR TYPICAL COMPONENTS IN MEMS
wang cong shun ; zhang wei bin ; fang jing ; cui yun jun ; shen jian ; chang sheng
wang cong shun ; zhang wei bin ; fang jing ; cui yun jun ; shen jian ; chang sheng
..............page:503-506
ACCELERATED RELAXATION ALGORITHM FOR THE SIMULATION OF COUPLED ELECTROSTATIC-MECHANICAL SYSTEMS
gao xing shan ; lin sheng yong ; zhu xi ping
gao xing shan ; lin sheng yong ; zhu xi ping
..............page:500-502
ON THE MODELING OF PROTOTYPE SYSTEM OF THE DESKTOP MICRO-FACTORY
zhao hong ce ; yuan wei zheng ; ma bing he
zhao hong ce ; yuan wei zheng ; ma bing he
..............page:495-499
COMPUTER-AIDED DESIGN AND SIMULATION FOR MEMS DEVICES
sun ke hao ; qian jin ; zhang li xian ; yu tong xi ; zhao ya zuo
sun ke hao ; qian jin ; zhang li xian ; yu tong xi ; zhao ya zuo
..............page:488-494
COMPUTER SIMULATION SYSTEM OF SILICON ANISOTROPIC ETCHING
jiang yan feng ; huang qing an
jiang yan feng ; huang qing an
..............page:484-487
FEM SIMULATION OF COMB-GIMBAL MICROMACHINED GYROSCOPE
che lu feng ; xiong bin ; wang yue lin
che lu feng ; xiong bin ; wang yue lin
..............page:481-483
CHARACTERISTICS OF MICRO SCALE FLOW
li zhan hua ; cui hai hang
li zhan hua ; cui hai hang
..............page:476-480
..............page:471-475
PROGRESS OF STUDY ON MICROSCALE THERMAL PROPERTIES OF MICRO-ELECTRO-MECHANICAL SYSTEMS
yu zuo ; tang zuo an ; wei guang fen
yu zuo ; tang zuo an ; wei guang fen
..............page:465-470
GAS FLOWS IN A MICROTUBE/MICROCHANNEL
sun de jun ; qin feng hua ; yin xie yuan
sun de jun ; qin feng hua ; yin xie yuan
..............page:460-464
SOME IDEAS OF STANDARDIZATION OF MEASUREMENT AND EVALUATION OF MEMS MATERIALS' MECHANICAL PROPERTIES USING NANOINDENTATION
zhao ze xiang ; wang hai rong ; jiang zhuang de
zhao ze xiang ; wang hai rong ; jiang zhuang de
..............page:456-459
DEVELOPMENT OF A LONG-RANGE MONOLITHIC LOADING SYSTEM WITH NANOMETER RESOLUTION
wang hai rong ; zhao ze xiang ; jiang zhuang de
wang hai rong ; zhao ze xiang ; jiang zhuang de
..............page:452-455
ADVANCED OPTICAL MEASUREMENT TECHNOLOGY IN THE SEMICONDUCTOR AND MEMS
he xiao yuan ; kang xin ; heng wei ; huang qing an
he xiao yuan ; kang xin ; heng wei ; huang qing an
..............page:447-451
MEASUREMENT OF THE FRACTURE PROPERTY OF POLYSILICON MICRO STRUCTURE
ye xiong ying ; zhu jun hua ; lv xiao qing ; zhou zhao ying ; zuo yu zuo
ye xiong ying ; zhu jun hua ; lv xiao qing ; zhou zhao ying ; zuo yu zuo
..............page:443-446
FAILURE MECHANISM OF DEVICES WITH DUCTILE COATING UNDERGOING THE MICRO-SCRATCHING
zhao man hong ; tang shan ; wei yue guang
zhao man hong ; tang shan ; wei yue guang
..............page:437-442
RESEARCH ON TENSION MEASUREMENTS FOR MINISIZE MATERIALS
zhang tai hua ; yang ye min ; zhao ya zuo ; yu tong xi ; sun qing ping
zhang tai hua ; yang ye min ; zhao ya zuo ; yu tong xi ; sun qing ping
..............page:430-436
THE TESTING METHOD OF MECHANICAL PROPERTIES OF THIN FILMS
chen long qing ; zhao ming ; zhang tong yi
chen long qing ; zhao ming ; zhang tong yi
..............page:413-429
MECHANICAL BEHAVIORS OF CARBON NANOTUBES
gao yong gang ; shi xing hua ; zhao ya zuo
gao yong gang ; shi xing hua ; zhao ya zuo
..............page:402-412
RESIDUAL STRESSES IN MICRO-ELECTRO-MECHANICAL SYSTEMS
qian jin ; liu ; zhang da cheng ; zhao ya zuo
qian jin ; liu ; zhang da cheng ; zhao ya zuo
..............page:393-401
SOME CONSIDERATIONS ABOUT THE ATTITUDE CONTROL MEANS OF MICRO SATELLITES
xue ming lun ; li zhan hua
xue ming lun ; li zhan hua
..............page:389-392
MECHANICAL PROPERTIES AND SCALING EFFECTS IN MICRO-ELECTRO-MECHANICAL SYSTEMS
mei tao ; kong de yi ; zhang pei qiang ; wu xiao ping
mei tao ; kong de yi ; zhang pei qiang ; wu xiao ping
..............page:373-379
..............page:380-384
RESEARCH OF THE SIZE EFFECT ON STRENGTH OF POLYSILICON MICRO-ELECTRO-MECHANICAL DEVICES
ding jian ning ; meng yong gang ; wen shi zhu
ding jian ning ; meng yong gang ; wen shi zhu
..............page:385-388