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Carbon-Doped Titanium Oxide Films by DC Reactive Magnetron Sputtering Using CO2 and O2 as Reactive Gas
Dong Xie;Feng Wen;Wenmao Yang;Xueyuan Li;Yongxiang Leng;Guojiang Wan;Hong Sun;Nan Huang;School of Physical Science and Technology;Southwest Jiaotong University;Key Laboratory for Advanced Technologies of Materials;Ministry of Education;School of Materials Science and Engineering;Southwest Jiaotong University;Key Laboratory of Tropical Biological Resource of Chinese Educational Ministry;School of Materials and Chemical Engineering;Hainan University;Institute of Mechanical Manufacturing Technology;China Academy of Engineering Physics;
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