Optics and Precision Engineering 2011 Issue 1 Design of beam shaping unit for deep ultraviolet lithographic illumination system

Design of beam shaping unit for deep ultraviolet lithographic illumination system
ZHAO Yang;GONG Yan

..............page:29-34

Thermal design of electric cabinet for high-resolution space camera
CHEN Li-heng;XU Shu-yan

..............page:69-76

Application of multi-mode combined polishing to optical manufacturing
XUAN Bin;XIE Jing-jiang;SONG Shu-mei

..............page:41-50

Self-mixing velocimetry based on verical-cavity surface-emitting laser
L(U) Liang;ZHANG Ke;DAI Ji-jun;ZHU Jun;ZHEN Sheng-lai;HAO Wen-liang;YU Ben-li

..............page:23-28

Temperature characteristic of in-fiber Mach-Zehnder interferometer using twin-core fiber
FAN Lin-yong;JIANG Wei-wei;ZHAO Rui-feng;PEI Li;JIAN Shui-sheng

..............page:1-9

Nonlinear ultrasonic test of micro-nano crack
DUN Yi;SHI Xiao-hong;WANG Guang-long;ZHOU Zhao-ying

..............page:132-137

Structural analysis of ground-based large telescopes
ZHOU Chao;YANG Hong-bo;WU Xiao-xia;ZHANG Jing-xu

..............page:138-145

Combined hot-film anemometers for measuring flow speed vectors
QUE Rui-yi;ZHU Rong;LIU Peng;ZHOU Zhao-ying

..............page:103-109

Superior application of LED to street lighting
JIN Peng;YU Chun-yu;ZHOU Qi-feng;WANG Yi-feng;WU Na

..............page:51-55

Off-axis parabolic/Lloyd mirror interferometric systems for manufacturing plane holographic gratings
Bayanheshig;SHAO Xian-xiu;CUI Ji-cheng;LI Wen-hao;QI Xiang-dong

..............page:56-63

Arbitrary shaped ROI image coding using Run-length coding and generalized Exp-Golomb coding
XU Yong;XU Zhi-yong;ZHANG Qi-heng

..............page:175-182

Statics analysis and structure parameter design of robot shoulder joint based on orthogonal mechanism
CUI Bing-yan;JIN Zhen-lin

..............page:77-82

Moving object detection based on variant block difference in complex scenes
ZHU Juan-juan;GUO Bao-long

..............page:183-191

Design of symmetrical microwave power sensor
WANG De-bo;LIAO Xiao-ping

..............page:110-117

Carbon nanotube sensors based on 555 multivibrators
ZHAO Zhen-gang;LIU Xiao-wei;WANG Xin;JIN Hai-yan;TAN Xiao-yun

..............page:118-123

Distortion correction for images in planar metrology
SU Cheng-zhi;WANG En-guo;HAO Jiang-tao;CAO Guo-hua;XU Hong-ji

..............page:161-167

Digital microfluidic chip by electrostatic manipulation in low voltage
LIU Xiang;GAO Hua-min;LI Tie;ZHOU Ping;WANG Yue-lin

..............page:97-102

Removal function for fabrication of WolterⅠgrazing mirror by elastic ball tool
WANG Yong-gang;CUI Tian-gang;MA Wen-sheng;CHEN Bin;CHEN Bo

..............page:10-16

Super-resolution reconstruction of image in high accuracy image measuring system
ZHANG Jin;WANG Zhong;LI Ya-jie;YE Sheng-hua

..............page:168-174

Error correction of satellite orbit predicted by vehicle-borne tracking and position device
ZHANG Pei-lu;GUO Li-hong;WANG Jian-jun;YU Guo-quan

..............page:64-68

Online estimation for scale factor of north-finder based on rate biased ring laser gyroscope
ZHANG Yan;WU Wen-qi;Wu Mei-ping

..............page:146-152

Assessment of storage reliability for FOGs by multivariate degradation data
CHAO Dai-hong;MA Jing;CHEN Shu-ying

..............page:35-40

Al doped poly-Si micro-heater for thermomechanical fabrication of micro/nano structure
RONG Hao;ZHAO Gang;CHU Jia-ru

..............page:124-131

Measurement of thickness of metal thin film by using chromatic confocal spectral technology
MA Xiao-jun;GAO Dang-zhong;YANG Meng-sheng;ZHAO Xue-sen;YE Cheng-gang;TANG Yong-jian

..............page:17-22

guang xue jing mi gong cheng zheng gao jian ze

..............page:封3

Vibration damping design for airborne electro-optical surveillance platform
WANG Ping;WANG Wei;DING Jin-wei;CHENG Zhi-feng;LIU Jia-yan

..............page:83-89

Acoustic emission real-time detecting instruments for metal cracks in machining exact details
ZHENG Geng-feng;MA Shun-feng;JIN Long-xu

..............page:153-160

Influence of built-up edge phases on characteristics of surface profile of micro cutting
LIU Zhi-bing;WANG Xi-bin

..............page:90-96