Preface
Liding Wang

..............page:前插1

Experimental facility of line magnetic fluid traveling wave pump
ZHAO Meng;ZOU Ji-bin;SHANG Jing;QI Ming

..............page:1213-1217

Micro direct methanol fuel cells based on silicon and non-silicon MEMS technologies
TANG Xiao-chuan;ZHANG Yu-feng;YUAN Zhen-yu;WANG Xi-lian;LIU Xiao-wei

..............page:1218-1222

Design of fuze MEMS electrostatic detection array
HAO Xiao-hui;XU Li-xin;CUI Zhan-zhong;CHEN Xi

..............page:1223-1227

Comparative analysis of Sigma Delta modulation and pulse code modulation in micro-accelerometer
TAN Xiao-yun;ZHOU Xian-zhong;JIANG Yi-ming;CHEN Wei-ping

..............page:1228-1232

Design of MEMS microwave power coupler based on GaAs for Ku-band
ZHU Qiu-yao;LIAO Xiao-ping

..............page:1233-1237

Steady electroosmotic flow in diverging microchannels
WANG Xiao-zhang;WANG Chao-hui;JIANG Zhuang-de

..............page:1238-1243

Compact band reject filter for micro electromechanical systems
HUANG Chuang;CHEN Di;CHEN Xiang;LIU Jing-quan;ZHU Jun;WEI Wen-jie;WEI Ze-yong;LI Hong-qiang

..............page:1244-1250

Design of thin film bulk acoustic resonatorunder unique mode
MO Shao-meng;CHEN Jian-ming;WU Guang-min;ZHAO Jian-jun

..............page:1251-1256

Low-g micro inertial switch based on Archimedes' spiral
CHEN Guang-yan;WU Jia-li;ZHAO Long;WANG Chao

..............page:1257-1261

MEMS hybrid power-generator from vibration energy
ZHANG Yang-jian;SAN Hai-sheng

..............page:1262-1266

Two and a half dimension hexahedral meshing for MEMS design
YAN Wei;ZHANG Xiao-duo;XU Fan;XU Bo

..............page:1448-1452

Fully digital smart temperature sensor with quartz tuning fork resonator
XU Jun;YOU Bo;LI Xin;MA Jing

..............page:1453-1459

High temperature pressure sensor for harsh environment
ZHAO Li-bo;ZHAO Yu-long

..............page:1460-1466

Driving microrotor by using optical tweezers
ZHAI Xiao-min;HUANG Wen-hao

..............page:1467-1472

Characterization of triaxial piezoresistive high-g accelerometer by Hopkinson bar method
DONG Pei-tao;LI Yuan;WU Xue-zhong;HOU Zhan-qiang;XIAO Ding-bang;QIN Jin-gui;WANG Xiao-feng

..............page:1473-1478

Design of highg piezoresistive micro-accelerometer
LIU Feng-li;HAO Yong-ping

..............page:1442-1447

Modeling and application of piezoelectric vibration-based power generator
HE Xue-feng;WEN Zhi-yu;WEN Zhong-quna

..............page:1436-1441

Design of skylight polarization measurement system
CUI Yan;CAO Nan-nan;CHU Jin-kui;ZHAO Kai-chun;WANG Ti-chang

..............page:1431-1435

Design and control of dual-stage feed drive system in ultra-precision machine tools
LI Guo;WANG Bo;DONG Shen;WANG Shi-lei

..............page:1426-1430

Preisach modeling of hysteresis for fast tool servo system
WANG Xiao-hui;SUN Tao

..............page:1421-1425

Design and fabrication of bulk micromachined tunneling gyroscope with fan-shaped comb drivers
WANG Ling-yun;LI Wen-wang;ZHUANG Gen-huang;SUN Dao-heng

..............page:1415-1420

Thermal effect onequivalent spring constants of double-clamped beams with different mass arrangements
WU Kang;YE Xiong-ying;LIU Li-tao;DU Min;ZHOU Zhao-ying

..............page:1409-1414

Role of configurational entropy in molecular sieving through nanofilter arrays
LI Zi-rui（The Singapore-MIT Alliance ,Singapore 117576）;LIU Gui-rong（The Singapore-MIT Alliance ,Singapore 117576;Department of Mechanical Engineering,National University of Singapore,Singapore 117576）;HAN Jongyoon;WANG Jian-sheng（The Singapore-MIT Alliance ,Singapore 117576;Department of Physics,National University of Singapore,Singapore 117542）;CHEN Yu-zong（The Singapore-MIT Alliance ,Singapore 117576;Department of Pharmacy,National University of Singapore,Singapore 117543）

..............page:1403-1408

Variable-focus liquid lens with suspended conical ring
SUN Kai-ge;KANG Ming;OUYANG Fan;YUE Rui-feng

..............page:1397-1402

Design of heater integrated into micro direct methanol fuel cell
ZHANG Qian;WANG Xiao-hong;ZHENG Xiang

..............page:1391-1396

Capacitive pressure sensor with circular island structure
ZOU Li-ming;GUO Hang

..............page:1385-1390

Design of interface circuit of closed-loop accelerometer with self-test function
LIU Yun-tao;YIN Liang;CHEN Wei-ping;WU Qun

..............page:1379-1384

Fabrication of micro energy director on polymethyl methacrylate substrate for micro ultrasonic bonding
TAO Lin;LUO Yi;ZHANG Yan-guo;ZHANG Zong-bo;WANG Xiao-dong

..............page:1373-1378

Design of MEMS hybrid energy generator for multi-frequency vibration
REN Jing;CHEN Xu-yuan

..............page:1367-1372

Electromechanical coupling characteristics for force-balanced vacuum microelectronic accelerometer
YANG Yin-chuan;LI Dong-ling;SHANG Zheng-guo

..............page:1361-1366

Driving-modet est of dual-mass MEMS gyroscope
YIN Yong;WANG Shou-rong;WANG Cun-chao;YANG Bo;SHENG Ping;TIAN Zhong

..............page:1355-1360

Micro integrated pressure, temperature, and relative humidity sensor using adhesive bonding with SU-8
ZHANG Jian-gang;PANG Cheng;FANG Zhen;ZHAO Zhan

..............page:1350-1354

Micro-machined vibrating ring gyroscope
CHEN Li;CHEN De-yong;WANG Jun-bo

..............page:1344-1349

Development of ion-drag EHD micropump
YU He;ZHANG Qiang;QIAO Da-yong;YU Jian

..............page:1338-1343

Tapered slot antenna on micromachined silicon substrate
HOU Fang;ZHU Jian;YU Yuan-wei;CHEN Chen

..............page:1333-1337

Design of piezoelectric power generator in tire
LIAO Hai-yang;ZHONG Zheng-qing

..............page:1327-1332

Reduction of hysteresis for spin valve film by annealing method
LI Wei;LIU Hua-rui;REN Tian-ling;LIU Li-tian

..............page:1322-1326

Image analysis on ICPF actuated micro-robot
NIE Lin;CHEN Wei;LI De-sheng;GUO Shu-xiang

..............page:1316-1321

CMOS interface circuit for closed-loop accelerometer
YIN Liang;CHEN Wei-ping;LIU Xiao-wei;ZHOU Zhi-ping

..............page:1311-1315

Dielectrophoretic traps and micro-motor for driving and sorting latex spheres: from discrete devices to a lab-on-a-chip
LIU Yong-hong;ZHAO Zhan;PANG Cheng;FANG Zhen

..............page:1306-1310

Design and fabrication of floating electrode unidirectional SAW actuator
ZHANG Jun-feng;LI Yi-gui;HUI Chun

..............page:1300-1305

Numerical simulations on over-plating by deformed meshes
ZHU Xue-lin;WANG Xiang;CHU Jia-ru

..............page:1293-1299

Handwriting detecting system for space pen
WANG Wei;LI De-sheng;GAO Zong-yu;ZHOU Wei;ZHANG Peng-fei

..............page:1286-1292

Silicon micromachined resonant accelerometer based on ZnO nanowire
CHEN Guo-wei;ZHU Rong

..............page:1279-1285

Noise analysis of special-gas IR detector
XU Chen;DAI Tian-ming;SONG Yi-chao;LI Xiao-bo;DENG Chen

..............page:1274-1278

Fabrication of metal micro-precision sieves with high open areas using UV-LIGA process
MING Ping-mei;ZHU Di;ZHOU Feng;HU Yang-yang;ZENG Yong-bin

..............page:1267-1273

Optical sensor for product oil identification
ZHUGE Jing-chang;ZENG Zhou-mo;LU Li;LI Jian;ZHANG Yu

..............page:1479-1484

Kinetic people model learning of modified HMM
SU Bo-chao;CHEN Gang;CHE Ren-sheng

..............page:1485-1495