Study of High Resolution Lateral Piezoelectric Actuator
ZHANG Wangzhong 1;CHEN Daren 1;ZHU Jingmin 2 (1.Laboratory of Functional Inorganic materials;Shanghai Institute of Ceramics;Chinese Academy of Science;Shanghai;200050;China; 2.Department of Physics;Xixi Campus;Zhejiang University;Hangzhou;310027;Chin
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