Electronics and Packaging 2002 Issue 5 Etch Process of 0.5 μm CMOS

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Electronics and Packaging
1681-1070
2002 Issue 5

Etch Process of 0.5 μm CMOS
mo ke wei ; liu li yan ; zhou bin ; wu hong qiang

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Poly Stack Etch of Flash Memory
mo ke wei ; xiao jun ; han zuo

..............page:11-14,31

..............page:15-16,38

sog ju bu ping tan hua ji shu yan jiu
li hong zheng ; chen hai feng ; guo jing lei

..............page:17-20

pbl ge li ji shu
chen zhi yong ; zheng ruo cheng ; xu zheng

..............page:21-23,64

..............page:24-26

arc gong yi ji shu yan jiu
wen wan liang ; zhou lin

..............page:27-31

guan yu pbl die ceng fu shi hou pitting de yan jiu
mo ke wei ; liu li yan ; wu hong qiang ; zhou bin

..............page:32-34

..............page:35-38

..............page:39-42,50

..............page:43-46

..............page:47-50

..............page:51-54

..............page:55-60

..............page:61-64

..............page:20

2.4ghz de chu li qi

..............page:31

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..............page:64