Chinese Journal of Sensors and Actuators 2006 Issue 5 The Research of Testing and Calibration Technology Based on Micro-Mechanical Gyro

The Research of Testing and Calibration Technology Based on Micro-Mechanical Gyro
YANG Jin-xian;YUAN Gan-nan;XU Liang-chen

..............page:2264-2267

Frequency and Damping Characteristics of Micro-Machined Gyroscope Working at Atmospheric Pressure
LIU Xiao-wei;CHEN Hong;CHEN Wei-ping;LU Xue-bin;HAN Tian

..............page:2268-2271

Development and Analysis of Piezoelectric Micro-Machined Ultrasonic Transducers in Silicon Substrate
HAO Zhen-hong;TANG Liang;QIAO Dong-hai;WANG Cheng-hao

..............page:2272-2275

Application of Microphone in Sound Collection System for Aircraft in Low Altitude
ZHANG Chao-qian;LOU Wen-zhong;QIAO Jie

..............page:2276-2278,2282

Solution of the Pico Slider's Air Bearing Pressure Using a Multigrid Control Volume Method Based Additive Correction
RUAN Hai-lin;WANG Yu-juan;DUAN Chuan-lin;CHEN Yun-fei

..............page:2260-2263

Anti-Stiction Structure for Silicon Condenser Microphone
PAN Xin;WANG Cheng-hao;XU Lian;WEI Jian-hui

..............page:2279-2282

Effect of Anode Flow Pattern Design on the Performance of Micro Air-Breathing DMFC
ZHONG Ling-yan;WANG Xiao-hong;JIANG Ying-qi;LIU Li-tian

..............page:2163-2166

Preparation of Porous-Silicon-Based Electrocatalytic Electrodes for Micro Direct Methanol Fuel Cell
LIU Xiao-wei;SUO Chun-guang;ZHANG Yu-feng;ZHANG Bo;HU Ze-xian

..............page:2167-2170

A High Overloaded Piezoresistive Accelerometer Based on SOI Materials with Cantilever Beam
ZHAO Yu-long;ZHAO Li-bo;JIANG Zhuang-de

..............page:2171-2173,2176

A Dual-Axis Capacitive Micromechanical Accelerometer
REN Jie;FAN Shang-chun

..............page:2174-2176

Design and Virtual Fabrication Process of a New Kind of Capacitive Accelerometer
JIN Tong;ZHAO Xin;TAN Yi-yong;SUN Guang-yi;LU Gui-zhang

..............page:2177-2181,2185

Micro Leverage Design for Micromechanical Silicon Oscillating Accelerometer
QIU An-ping;SU Yan;SHI Qin;HUANG Li-bin

..............page:2204-2207

Detection of the Output Signals of Micromachined Gas Inertial Sensor Based on Convection Heat Transfer
ZHAO Yan;SU Yan;WANG Qing

..............page:2208-2211

Design and Simulation of A Three-Axis Micromachined Gyroscope
TANG Qun;WANG Shou-rong

..............page:2212-2214,2219

A Portable System for Determination of Hemoglobin Based on Optic Biosensor
ZHOU Ai-yu;YUE Wei-wei;HE Bao-shan;LIU Chun-xiu;YANG Qing-de;CAI Xin-xia

..............page:2092-2095,2099

Study on Preparation and Sensing Mechanism of Reconstitution Nano-Lipiod Biomembranes
LIU Sheng-ping;CHEN Guo-ming;WEI Yun-long;GAO Ying

..............page:2088-2091

Gas-Sensing Properties and Structure of Pd/SnO2/SiO2/Si Integrated Thin Films
WANG Lei;DU Jun;MAO Chang-hui;YANG Zhi-min;XIONG Yu-hua

..............page:2084-2087,2091

DMMP Gas Sensitivity of QCM Based on PVDF Films
YING Zhi-hua;JIANG Ya-dong;WANG Hua;XIE Guang-zhong;DU Xiao-song

..............page:2081-2083

Study of glucose and Uric Acid Biosensors Based on Screen-Printed Carbon Paste Electrodes Modified by Carbon Nanotubes
WANG You;XU Hui;LI Guang

..............page:2077-2080,2083

Research on the Application of the Time-Serial Analysis Based Kalman Filter in MEMS Gyroscope Random Drift Compensation
LI Jie;ZHANG Wen-dong;LIU Jun

..............page:2215-2219

Study of a Decoupled Z-Axis MEMS Gyroscope
XIE Jian-bing;YUAN Wei-zheng;CHANG Hong-long

..............page:2220-2222

An Interface Circuit for Capacitive Vibratory Microgyroscopes
JIANG Qing-hua;YUAN Wei-zheng;CHANG Hong-long

..............page:2223-2225

On Improving the Accuracy of Micromachined Gyroscopes Based on Multi-Sensors Fusion
ZHANG Peng;CHANG Hong-long;YUAN Wei-zheng;HU Min

..............page:2226-2229

Study on the Circuit of Driving Loop Control for Micromachined Vibratory Gyroscope
LI Qian;LI Xiao-ying;CHANG Hong-long;JIANG Qing-hua

..............page:2230-2232,2235

Micro-Accelerometer Utilizing Digital Control and PWM Electrostatic Servo Technique
AN Kang;SU Yan

..............page:2233-2235

A Signal Detecting Method for the Double Capacitive Output Micromachined Gyroscope
MO Bing;LIU Xiao-wei;TAN Xiao-yun;YIN Liang;DING Xue-wei;TANG Jia-yu

..............page:2236-2239

Design of the Micromachined Gyroscope Interface ASIC
LIU Xiao-wei;MO Bing;WANG Chao;TAN Xiao-yun;XU Xiao-wei;QI Xiang-kun

..............page:2240-2244

One Single Chip Micro Inertial Measurement Unit
CHANG Hong-long;JIANG Qing-hua;CUI Jin-qiang;LI Qian;YUAN Wei-zheng;YANG Fang

..............page:2245-2247,2251

An Inertial Force Actuated Bistable Switch Supported by Four Cosine-Shaped Cantilever Beams
CHEN Guang-yan;ZHENG Ying-bin;ZHAO Long;WU Rui

..............page:2248-2251

A Charge Delta-Sigma Modulator for Differential-Capacitance Sensors
WANG Zhan-fei;LI Zhi-hong

..............page:2252-2254,2259

Study on the Dynamic Characteristics of An Active-Head Slider Using a PZT Cantilever
DUAN Chuan-lin;WANG Yu-juan;CHEN Yun-fei

..............page:2255-2259

Design of Vector Hydrophone Based on Resonant Tunnelling Diodes
ZHANG Bin-zhen;XIE Bin;XUE Chen-yang;ZHANG Wen-dong;CHEN Shang

..............page:2283-2285,2289

Study of a Novel Magnetic Bead-Based Microchip for DNA Analysis
WANG Yu-ji;CHEN Xiang;WANG Bin;JIN Qing-hui;ZHAO Jian-long

..............page:2107-2110

The Facture and Performance Study of Cl2 Sensor Based on Laser Micro-Machining on Al2O3 Microstructure
SHI Yun-bo;ZHANG Hong-quan;HU Zhu-ping;FENG Qiao-hua;XIANG Jin-juan;GUO Jian-ying

..............page:2103-2106

Human Health Parameters Acquisition SYSTEM Based on MEMS and Radio Frequency Network
YU Hai-qian;LIAO Hai-yang;WANG Han

..............page:2100-2102,2106

Development of Explosive Detection with MEMS
KONG De-yi;ZHU Jian-bin;QI Yong-guang;LIN Bing-tao;ZHANG Zheng-yong;ZHANG Tao;LU Wei

..............page:2096-2099

The Effects of Panax on Gene Expression Profile of Aging Mice Brain Based on the cDMA microarray
YE Fang;YUAN Wei-zheng;WANG Yu-Bo

..............page:2122-2125

Micro Electrochemical Immunosensor Based on Micro/Nano Fabrication Technology
XU Yuan-yuan;BIAN Chao;CHEN Shiao-feng;XIA Shan-hong

..............page:2149-2152

Design and Analysis of Velocity Hydrophone with Co-Oscillating Sphere and Inner MEMS Accelerometers
AN Peng;YUAN Wei-zheng;ZHANG Cheng-liang

..............page:2286-2289

Finite Element Emulation of A Capacitive Microfabricated Ultrasonic Transducer
SONG Guang-de;GUAN Zhi-jian;LI Da-chao

..............page:2290-2292,2296

Research of Cantilever Acoustic Sensor Based on Resonant Tunneling Diode
ZHANG Wen-dong;WANG Jian;XUE Chen-yang;XIONG Ji-jun;ZHANG Bin-zhen;TONG Zhao-min

..............page:2293-2296

Study of Micro Direct Methanol Fuel Cell Plate Configuration
ZHANG Yu-feng;LIU Xiao-wei;WANG Xi-lian;WANG Wei;SUC Chun-guang

..............page:2153-2155,2159

Modeling and Optimized Design for the Cathode of MEMS μPEMFC
DONG Pei-tao;LI Xin-xin;CHEN Cong;XIA Bao-jia;WANG Yue-lin;FENG Song-lin;LI Sheng-yi

..............page:2156-2159

Numerical Simulation of μDMFC Performance
ZHANG Bo;ZHANG Yu-feng;LIU Xiao-wei;QIAO Yu-hua;ZHANG Peng

..............page:2160-2162

The Study of Stochastic Resonance in Carbon Nanotubes Ionization Gas Sensor
HUI Guo-hua;WU Li-li;PAN Min;CHEN Yu-quan;ZHANG Xiao-bin

..............page:2119-2121,2125

Study of Carbon Nanotubes Gas Sensor Based on Stochastic Resonance
WU Li-li;HUI Guo-hua;PAN Min;CHEN Yu-quan;ZHANG Xiao-bin

..............page:2114-2118

QCM Gas Sensor Based on Modified Zeolite for the Nerve Agent Simulant DMMP Detection
YANG Juan-juan;REN Nan;ZHOU Jia;ZHANG Ya-hong;LIU Quan;HUANG Yi-ping;TANG Yi

..............page:2111-2113,2118

Simulation of Plastic Flow in Microchannel Figuration of Microfluidic Chip Under Hot Embossing
WEI Yuan-jie;LIUChong;LI Jing-min;PENG Jia;ZHU Lian-yi

..............page:2008-2010,2014

Numerical Stimulation on Operating Process of Ice Valve for Controlling Micro/Nano Fluidics
YANG Yang;LIU Jing

..............page:2022-2024

Research and Fabrication of a Bi-directional Piezoelectric Micropump
WANG Wei;TIAN Li;BAO Zhi-yong;LIU Xiao-wei;WANG Xi-lian;YANG Song-tao

..............page:2018-2021

Finite Element Analysis of Temperature Effect in Polymer Hot Embossing
XU Min;LUO Yi;WANG Xiao-dong;LI Nan;LIU Chong

..............page:2015-2017,2021

Transient Elastic Thermal Stress Analysis for Laser Machining Polymer Microchannels
XIANG Heng-fu;FU Jian-zhong;CHEN Zi-chen

..............page:2011-2014

XPS Analysis on Grafting Modification of Fe3O4 Nanopowders
CUI Sheng;SHEN Xiao-dong;LIN Ben-lan;XU Na

..............page:2322-2325

Electrophoresis Deposition of Carbon Nanotubes in MEMS Structures and Their Field Emission Characteristics
GUO Lin-rui;CHEN Feng;YE Xiong-ying;LIU Li-tao;WU Kang;ZHOU Zhao-ying

..............page:2340-2343

Preparation and Study on Dispersion of Hydro-Based Nanosized TiO2 Suspension
LIN Ben-lan;SHEN Xiao-dong;CUI Sheng

..............page:2314-2317

Synthesis and Property of SnO2 Nanorods Doped Cd2+
ZHAO He-yun;LI You-huan;WU Xing-hui

..............page:2318-2321,2325

Synthesis and Characterization of Antimony-Doped Tin Oxide Nanopowders
YANG Fen;ZHANG Xue-jun;GAN Fu-xing

..............page:2326-2330

A Rapid and Simple Route to Synthesizing ZnO Nanorods by Using Microwave Irradiation
KONG Xiang-rong;QIU Chen;LIU Qiang;LIU Lin;ZHENG Wen-jun

..............page:2331-2333,2336

Study on the Effects of Machining Error on the Z-Axis Silicon Microgyroscope
SHI Qin;QIU An-ping;SU Yan;ZHU Xin-hua

..............page:2182-2185

Design and Analysis of Damping in Multi-Ranged Piezoresistive Micro Accelerometer
MAO Hai-yang;XIONG Ji-jun;ZHANG Wen-dong;GUO Tao;XU Dong

..............page:2186-2189

A Signal Process Circuit of Capacitive Micro-Accelerometer
LIU Hai-tao;WEN Zhi-yu;WEN Zhong-quan

..............page:2190-2192,2196

Design of Force-Balance Accelerometer with Frame Structure
CHEN Wei-ping;ZHAO Zhen-gang;LIU Xiao-wei;HAN Tian

..............page:2193-2196

The Design Of A Piezoresistive Three-Axis Accelerometer
SUN Jian;ZHAO Yu-long;YUAN Guo-ying;JIANG Zhuang-de;XU Jing-bo

..............page:2197-2199

Microprobe Based on MEMS and Its Detection of the Neurotransmitter in the Olfactory Mucosa
LIU Qing-jun;XU Ying;CAI Hua;WANG Ping;Simon Ang

..............page:2145-2148

Research on Multi-Ranged Micro Accelerometer
XIONG Ji-jun;MAO Hai-yang;ZHANG Wen-dong;XU Dong;GUO Tao

..............page:2200-2203

Microstructure of Cu-Based Function Nanocomposite Material
LOU Bai-yang;ZHOU Yu-bang;XU Bin;YANG Yu-jun

..............page:2334-2336

Effect of Preparation and Activation Condition of Catalyst on Growth of CNTs
TANG Chang-xing;QU Mei-hen;YU Zuo-long

..............page:2337-2339

Glucose Concentration Detecting Technology Based on Miniature Surface Plasmon Resonance Biological Sensor
HUANG Xian;LI Da-chao;XU Ke-xin;YU Hai-xia;HUANG Fu-xiang;HU Xiao-tang

..............page:2072-2076

Love Wave Sensor and the Measurement of Mass Sensitivity
HU You-wang;SHI Jian-liang;JIA Hong-guang;WU Yi-hui

..............page:2126-2129,2134

Modeling of a Novel Magnetometer with High Sensitivity and Low Power Consumption
LIU Yu-fei;ZHAO Ben-gang;WU Ya-ming;WANG Yue-lin

..............page:2068-2071

Fabrication of GMR Linear Sensor Based on Spin Valve
LI Wei;LIU Hua-rui;LIU Peng;REN Tian-ling;LIU Li-tian

..............page:2065-2067,2071

Study on the Structure of Spin Valve for GMR Sensor with Low Coercivity
LIU Peng;LI Wei;LIU Hua-rui;YE Shuang-li;REN Tian-ling;LIU Li-tian

..............page:2061-2064

Exchange Coupling and Magnetic Properties of SmTbFeCo/Cr/TbFeCo Trilayers with Perpendicular Anisotropy
WANG Xiang;SU Shen-wei

..............page:2057-2060,2064

Study on the Effects of Shape Parameters on MEMS Hall Device Properties
SONG Ming-xin;GONG Chun-qing;HE Xun-jun;YIN Jing-hua;LIU Xiao-wei

..............page:2054-2056

Research Fabrication of Spinning Valve Multilayer Membrane GMR
WEN Dian-zhong

..............page:2050-2053,2056

The Theoretic Calculation and Experiment Confirmation of the Driving Voltage of the Tunneling Magnetometer
TANG Xue-hua;YOU Zheng;HU Xiao-li

..............page:2047-2049

Simulation and Optimized Design with CFD Software about the Track Effect on the Microchip Electrophoresis
TIAN Li;LIU Xiao-wei;WANG Wei;HU Zi-jie

..............page:2044-2046

Design of a Novel Silicon Capacitive Flow Sensor
WEI Ze-wen;QIN Ming;HUANG Qing-an

..............page:2041-2043,2046

Fabrication of Glass Microfluidic Chip by Laser Direct Writing and Wet Etching
LIU Xiao-qing;HAO Wei-wei;GAO Wei-wei;ZHOU Yong-liang

..............page:2038-2040

An Experimental Study on Dryout Characteristics under Boiling Conditions in Open Capillary Microgrooves
HU Xue-gong;TANG Da-wei

..............page:2034-2037

Assembling Carbon Nanotubes Based on DEP and Fluid Driving
TAN Miao-miao;YE Xiong-ying;WANG Xiao-hao;ZHOU Zhao-ying

..............page:2030-2033

Thermal Performance of High Heat Flux Micro Heat Sinks
JIANG Jie;HAO Ying-li

..............page:2025-2029,2033

Design and Fabrication of Low-Numerical-Aperture Amplitude-Photon Sieve
CHENG Guan-xiao;XING Ting-wen;LIN Wu-mei;ZHOU Jin-mei;QIU Chuan-kai;LIAO Zhi-jie;MA Jian-ling

..............page:2344-2347,2350

Silicon Condenser Microphone with Round Membranes
TIAN Jing;WANG Cheng-hao;XU Lian;QIAO Dong-hai;MA Jun;HAO Zhen-hong;WEI Jian-hui

..............page:2297-2299,2303

Design of a Bionic Vector Hydrophone Based on Silicon
XIE Bin;XUE Chen-yang;ZHANG Wen-dong;XIONG Ji-jun;ZHANG Bin-zhen;CHEN Shang

..............page:2300-2303

Nano-Al Film Surface and Electrical Resistivity Characterized by Fractal
FU Yong-zhong;DING Jian-ning;XIE Guo-xin;YANG Ji-chang

..............page:2304-2306,2309

Hydrothermal Synthesis LiNbP3 Nanopowders and Dielectric Properties of Their Sinters
CHEN Zhe-ning;CHENG Shi-jing;LIU Xin-rong

..............page:2307-2309

Electrochemistry Anodic Oxidation Self-Assembled TiO2 Nanotube Arrays
TIAN Tian;XIAO Xiu-feng;LIU Rong-fang

..............page:2310-2313

Synthesis Isolated Short Carbon Nanotubes by Simple One-Step Catalytic Pyrolysis Process
GONG Qiao-juan;LI He-jun;WANG Xiang;LI Ke-zhi

..............page:2348-2350

Characterization and Condition of Synthesizing CuAl2O4 Nanoparticles
SUI Xiao-tao;YU Qiao;JIANG Yan-yan;TANG Nai-ling;GU Xiu-mei;NING Gui-ling

..............page:2351-2353,2358

Controllable Synthesis of Nano-Sized TiO2 with PEG and Its Photocatalytic Activity
BAO Nan;SUN Jian;XIE Qing;MA Zhi-hui

..............page:2354-2358

Thermal Insulation of Porous Silicon under the Influence of the Micro Structural Parameter
HU Ming;ZHANG Wei;ZHANG Xu-rui;YANG Hai-bo

..............page:2359-2361,2364

Preparation of WO3 Nano-Powder with Microemulsion Methed
DIAO Xian-zhen;HOU Chang-jun

..............page:2362-2364

Fabricating of Nanometer Powders for Nd:YAG Ceramic Laser Materials
WAN Yan-fen;CAO Quan-xi;LI Shuang-chun;LI Zhen;SU Dong-jie

..............page:2365-2368

Characterization of Nanosized SnO2 by Transmission Electron Microscope
HUANG Shi-zhen;CHEN Wen-zhe;LIN wei

..............page:2369-2370

zheng gao tong zhi

..............page:封4

The Research on the Gas Sensor Based on LAPS and Nanometer Porous Silicon
ZONG Xiao-lin;CAI Hua;YU Hui;WANG Ping

..............page:2142-2144

Synthesis and H2S Gas Sensing Properties of SmFeO3 Nano-sized Powder
WANG Huan-xin;XU Jia-qiang;CHENG Zhi-xuan;PAN Qing-yi

..............page:2138-2141

Study on Micro Bi-Bridge Catalyzed LPG Transducer Technology Based on MEMS
ZHANG Hong-quan;SHI Yun-bo;GUO Jian-ying

..............page:2135-2137,2141

Study of VOCs Sensing Property of Carbon Nanotubes and Their Modified Nano-Composites
FANG Xiang-sheng;GUO Miao;CHEN Wen-ju;PAN Min;CHEN Yu-quan;ZHANG Xiao-bin

..............page:2130-2134

A New High-Speed Excimer Laser Micromachining Method for PMMA Based Capillary Electrophoresis Chip
LIU Ying;YAO Li-ying;REN Kang-ning;WU Jian;LIU Shi-bing;LUO Guo-an;CHEN Tao

..............page:2004-2007

The Simulation and Optimization on AC Electro Hydrodynamic Pumping in Microchannels
ZHANG Shan-liang;Nithin Narayananb;XU Bo

..............page:2000-2003

Study of Microchip Analytical System with Micro-Nano Monolithic Silica Column as Pretreatment Functional Part
XU Yi;ZHANG Jian;ZHANG Zhong-feng;WEN Zhi-yu

..............page:1996-1999

Bio MEMS Microfluidic Chips for Blood Sample Pretreatment
CHEN Xing;CUI Da-fu;LIU Chang-chun;LI Hui

..............page:1991-1995

Study on Mechanical Property of Silicon Nitride Thin Film and the Application in RF MEMS Switches
YU Ying;WU Qing-xin;LUO Zhong-zi

..............page:1967-1969

Development of Planar Coils Based on Micromolding Replication Techniques
LIU Bo;WU Yi-hui;ZHANG Ping

..............page:1963-1966,1969

Design and Preparation High Efficiency Thin-Film Transformer at 200MHz
ZHENG Liang;QIN Hui-bin;HU Ji;XU Jun-ming;YE Li-yun;LIU Jian

..............page:1959-1962

Dielectric Charging Effects on Capacitive RF MEMS Switches
WU Yin-feng;WAN Jiang-wen;YU Ning

..............page:1955-1958,1962

Model and Analysis of Electromagnetic Wave Radiated During Switching from Capacitive RF MEMS Switches
YUAN Xiao-lin;HUANG Qing-an;LIAO Xiao-ping

..............page:1945-1950

Analytical Modeling and Optimal Design of A Novel MEMS Microwave Power Sensor
HUANG Cong-chao;HUANG Qing-an;LIAO Xiao-ping

..............page:1938-1944,1950

Design and Simulation of On-Chip RF Magnetic Medium Inductors
ZHANG Fan;YANG Chen;LIU Feng;REN Tian-ling;LIU Li-tian

..............page:1934-1937

On-Chip Integrated Inductors with Ferrite Thin-Films for RF IC
YANG Chen;LIU Feng;REN Tian-ling;LIU Li-tian

..............page:1930-1933

Study of preparation of AlN Thin Films for FBAR Application by RF Sputtering
DONG Shu-rong;WANG De-miao

..............page:1927-1929

Effect of FBAR Electrode Shape on Transverse Coupling wave
WU Bi-yan

..............page:1924-1926,1929

Theoretical Analysis and Experimental Study of a Planar Type MEMS Electromagnetic Actuator
YANG Hao-yu;ZHAO Xiao-lin;DAI Xu-han;SHAO Guo-cheng;DING Gui-fu

..............page:1920-1923

Design of Integrated Photonic RF Phase Shifter Based on Polymer Waveguide and PDLC
DONG Wei;LIU Cai-xia;ZHANG Xin-dong;RUAN Sheng-ping;ZHOU Jing-ran;JIA Cui-ping;WANG Li-jun;CHEN Wei-you

..............page:1917-1919

Simulation and Analysis of the Resonant Properties of FBARs
TANG Liang;HAO Zhen-hong;QIAO Dong-hai

..............page:1911-1916,1919

Development of a RF MEMS Voltage Controlled Oscillator and its Phase Noise Characteristic
LI Li;ZHANG Zhi-guo;ZHAO Zheng-ping;GUO Wen-sheng

..............page:1907-1910

Analysis and Design of Capacitive Switches for Distributed RF MEMS Phase Shifters
HE Xun-jun;WU Qun;JIN Bo-shi;SONG Ming-xin;YIN Jing-hua

..............page:1881-1884

The Design and Simulation of the RF Solenoid Microinductor
FANG Dong-ming;ZHAO Xiao-lin;WANG Xi-ning;ZHOU Yong

..............page:1878-1880

A Novel Fabry-Perot MEMS Fiber Pressure Sensor Based on Phase Demodulation Method
CHEN Xu-xing;WANG Ming;RONG Hua;GE Yi-xian

..............page:1875-1877

A Matlab-Based Simulation of Pressure Control for Micro Gas Pressure Sensor Testing System
CHEN Tao;JIN Ren-cheng;ZHANG Feng-tian;WANG Hong-bin

..............page:1871-1874

Study on Contatless Conductivity Detector for Electrophoresis Microchip
ZHU Wei-wei;WEN Zhi-yu;XU Yi

..............page:1988-1990,1995

System-Level Modeling for Electrokinetic Passive Micromixers
LI Hong-wei;YUAN Wei-zheng;YE Fang

..............page:1983-1987

A new 3-D Nanogap Electrode Grid Array Biosensor Based on NEMS and Critical Problems on Fabrication
LIU Yong-hong;ZHAO Zhan

..............page:1978-1982

Performance of a Serial piezoelectric Micropump
CUI Qi-feng;LIU Cheng-liang;Xuan F.(William)Zha

..............page:1974-1977,1982

Research on the Integrated Micro-Fluidic Chip
LIU Xiao-wei;WANG Wei;TIAN Li;FU Jian-qi;CHEN Xia-jie;NI He-nan;ZENG Juan

..............page:1970-1973

On RF Characterization and Modeling of RF MEMS Bonding Wire Interconnection
WU Han-qin;LIAO Xiao-ping

..............page:1951-1954

A GaAs Pressure Sensor Based on Resonant Tunneling Diodes
WANG Jian;ZHANG Wen-dong;XUE Chen-yang;XIONG Ji-jun;ZHANG Bin-zhen;TONG Zhao-min

..............page:1844-1846,1851

Modeling of Capacitive Micro Pressure Sensor Featuring Space-Continuous Behavior
ZHANG Cheng-liang;MA Bing-he;CHANG Hong-long;YUAN Wei-zheng

..............page:1840-1843

Design and Finite Element Analysis of a Magnetically Actuated Silicon Resonant Beam
PAN Jun;HUANG Qing-an;QIN Ming

..............page:1835-1839

A Novel Fabry-Perot MEMS Fiber Pressure Sensor Based on Intensity Demodulation Method Interferometry
GE Yi-xian;WANG Ming;CHEN Xu-xing;LI Ming

..............page:1832-1834,1839

System-Level Design of Segmented Piston-like Micro Deformable Mirrors
YU Yi-ting;YUAN Wei-zheng;QIAO Da-yong;LI Xiao-ying

..............page:1761-1763,1767

Temperature Affect of the Micro Capacitive Pressure Sensor
HUANG Zhe-lin;FENG Yong-jian

..............page:1807-1809

Electrospun Aligned Polyethylene Oxide Nanofibers
WU De-zhi;SUN Dao-heng

..............page:1803-1806

Study on Ionization Effect of PHEMT
YANG Guang-lin;DU Lei;ZHUANG Yi-qi;HE Liang;HU Jin;LIU Yu-an

..............page:1800-1802

Simulation on Coupling Characteristic of Micro Optical Switch in Laser Ignition System
ZHAO Xing-hai;GAO Yang;CHENG Yong-sheng

..............page:1796-1799

Si-Based Ge Quantum Dot Infrared Photodetectors with Si3N4 as Anti-Reflection Coating
WEI Rong-shan;DENG Ning;WANG Min-sheng;ZHANG Shuang;CHEN Pei-yi;LIU Li-tian;ZHANG Jing

..............page:1771-1774

Conical Tube Employed Variable-Focus Liquid Lens Based on EWOD
KANG Ming;YUE Rui-feng;WU Jian-gang;OU YANG-Fan;LIU Li-tian

..............page:1768-1770,1774

A Wavelength Scanning Method for Measuring Micro Distance of Grating Moving Light Modulator
ZHANG Jie;HUANG Shang-lian;ZHANG Zhi-hai;SUN Ji-yong

..............page:1764-1767

The Design of the Subwavelength Wire-Grid Polarizers Based on Rigorous Couple-Wave Theory
ZHANG Na;CHU Jin-kui;ZHAO Kai-chun;MENG Fan-tao

..............page:1739-1743

Performance Analysis of Microbolometer Microbridge Structure
LI Su;WU Zhi-ming;JANG Ya-dong;YANG Xiao-yu;LI Shi-bin

..............page:1728-1730

Optimized Design for a PI-Cantilever Electromagnetic Actuation MOEMS Optical Switch
KONG Qing-feng;LIANG Jing-qiu;ZHONG Yan-chao;HOU Feng-jie;LI Jia;SUN De-gu

..............page:1735-1738,1743

Low Cost MEMS Variable Optical Attenuator for Optical Telecommunication Application
LI Hai-jun;YANG Yong-jun;WANG Jian-jun;XU Yong-qing;ZHENG Qi-long;CHEN Wei-you

..............page:1731-1734

New Type of Uncooled Infrared Detector with Polyimide Thermal-Isolation Structure
LIU Xing-ming;HAN Lin;LIU Li-tian

..............page:1725-1727,1730

Static Analysis for the Si Nanoscaled Clamped Beam
BAO Fang;YU Hong;HUANG Qing-an

..............page:1713-1716

Study on Controllable Wettability of Roughness Surfaces
ZHU Liang;FENG Yan-ying;YE Xiong-ying;WU Yan-bin;ZHOU Zhao-ying

..............page:1709-1712

Thermal and Optical Analysis of Amorphous Silicon Micro-Bolometer
LI Shi-bin;WU Zhi-ming;JIANG Ya-dong;LI Wei;LIAO Nai-man

..............page:1721-1724

A CMOS Compatible PMOS Transistor Infrared Detector
WANG Ming-zhao;YU Feng-qi;GAO Shu-qin

..............page:1717-1720

Research on Cold Characteristics of Bulk Micromachined Folded Waveguide Slow-Wave Structure
ZHU Zheng-peng;MIAO Min;QU Bo;JIN Yu-feng;FENG Jing-jun

..............page:1757-1760

The Analyses and Optimization of Micro-Type High Temperature Pressure Sensor Chip
ZHAO Yan-ping;DING Jian-ning;YANG Ji-chang;WANG Quan;XUE Wei

..............page:1829-1831

A Design for Monolithic Pressure Sensor Amplifier Circuit
ZENG Peng;ZHANG Zheng-yuan

..............page:1826-1828,1831

Design and Fabrication of a Novel Silicon Piezoresistive Pressure Microsensor for TPMS
ZHANG Yan-hong;LIU Bing-wu;LIU Li-tian;ZHANG Zhao-hua;TAN Zhi-min;LIN Hui-wang

..............page:1822-1825

Research on Capacitive Pressure Sensors Based on Flip-Chip Technology
ZHOU Wei;QIN Ming

..............page:1818-1821

Design and Fabrication of Silicon Integrated Sensor Chip Used for TPMS
ZHANG Zhao-hua;LIU Bing-wu;ZHANG Yan-hong;TAN Zhi-min;LIN Hui-wang;LIU Li-tian

..............page:1815-1817

Piezoresistive Properties of Poly-Si Nanofilms Deposited at Different Temperatures
CHUAI Rong-yan;LIU Xiao-wei;PAN Hui-yan;WANG Wei;ZHANG Ying

..............page:1810-1814

Sputtering BST Films with Substrate Synchronous Heating
ZHANG Long;LIN Li-qiang;ZHU Jian;ZHUO Min

..............page:1904-1906,1910

A Novel X-Bands RF MEMS Switch with Enhanced Power Handlings
DONG Qiao-hua;LIAO Xiao-ping

..............page:1900-1903

The Application of Polyimide(PI) in the Manufacture Process of RF MEMS Capacitive Shunt Switch
PENG Hui-yao;YU Ying;LUO Zhong-zi;WANG Pei-seng

..............page:1896-1899

IntelliSuite(R) EMagAnalysis:an S-Parameter Extraction Tool for Real Deformed Structures
XU Fan;ZHANG Shan-liang;ZHOU Lei;XU Bo

..............page:1892-1895,1899

K Band Silicon Monolithic MEMS Resonator
YU Yuan-wei;ZHANG Yong;ZHU Jian;JIA Shi-xing;CHEN Chen

..............page:1889-1891

A Novel Design for the Miniaturization of the DMTL Phase Shifter
JIN Bo-shi;WU Qun;HE Xun-jun;TANG Kai;YANG Guo-hui;Lee Jong-Chul

..............page:1885-1888

Micro Programmable for Synthesizing Spectra Grating and the Application Research
AN Fei;YUAN Wei-zheng;QIAO Da-yong;QING Chong

..............page:1754-1756,1760

Novel MEMS Torsion Micromirror with Compound Driving Structures
LI DA-chao;WU Wen-gang;YUAN Yong;CHEN Qing-hua;HAO Yi-long;HU Xiao-tang

..............page:1750-1753

Variable-Focus Liquid Microlens Based on Electrowetting on Dielectric
OU Yang-fan;WU Jian-gang;KANG Ming;YUE Rui-feng;LIU Li-tian

..............page:1747-1749

A Novel Variable Optical Attenuator Based on PDLC
ZHONG Zhi-cheng;LIU Cai-xia;ZHANG Xin-dong;WANG Ming-feng;TANG Yong;JIA Cui-ping;XUE Hai-lin;CHEN Wei-you

..............page:1744-1746

The Influence of the Thermal Stress on a Pressure Sensor in Integrated Weather Multi-Sensor Chip
YAO Su-yu;QIN Ming;HUANG Qing-an

..............page:1868-1870

Design of A Novel CMOS Capacitive Absolute Pressure Sensor
LIU Na;HUANG Qing-an;QIN Ming

..............page:1863-1867,1870

Preparation of PZT Films on Optical Fiber by Sol-ESD Method
WU Ya-lei;WU Jian-hua;CHU Jia-ru

..............page:1792-1795

Study of the Bionic Test System for Polarized Light Based on ARM
LIU Li-bing;JIN Ren-cheng;ZHAO Kai-chun;Yao Hong-yi

..............page:1788-1791

Design of USB Interface Special Driver Program for Micro-Spectrometer Based on Linux System
XIAO Yong;WEN Zhi-yu;HONG Ming-jian

..............page:1785-1787,1791

Design of Linear CCD Driving Circuit with Tunable Integration Time Based on the CPLD
JI Xian-ju;WEN Zhi-yu

..............page:1781-1784

Infrared Absorbance of SiNx and SiC
WANG Xin;YU Xiao-mei;TIAN Da-yu

..............page:1778-1780,1784

Development of MEMS Capacitance Sensor Based on Pressure Artificial Denture
HU Hong-ping;LING Yan-fei;FENG Yong-jian

..............page:1859-1862

A Diaphragm Design of Microfabircated Resonant Pressure Sensor
REN Sen;YUAN Wei-zheng;DENG Jin-jun

..............page:1855-1858,1862

The Influence of Stress on Mechanical Performance of Highly Doped Square-Shaped Silicon Diaphragm
SONG Yi-chao;XU Chen;ZHAO Lin-lin;LI Bo;SHEN Guang-di

..............page:1852-1854

A Batch Microassembly System for Fabrication of MEMS Pressure Sensors
RONG Wei-bin;CHEN Li-guo;SUN Li-ning;XIE Hui

..............page:1847-1851

Luminescent Study of Eu-Doped γ-LiAlO2 Phosphor
YANG Xue-feng;NING Gui-ling;LIN Yuan

..............page:1775-1777

Study on Resonance Response of Piezoresistive Double-Clamped Silicon Nano-Beam
ZHAO Quan-bin;JIAO Ji-wei;YANG Heng;LIN Zi-xin;LI Tie;ZHANG Ying;WANG Yue-lin

..............page:1705-1708

Effects of Fluids with Magnetic Nano-Particles in Y Shape Microchannels on the Mixing Rate
LI Zhen-guo;LI Zhan-hua

..............page:1701-1704,1708

Molecular Dynamics Simulation of the Stretching Process of Silicon Nano-Rods
FU Chen-xin;CHEN Yun-fei

..............page:1697-1700

Theoretical Study on Photo-Induced-Deforming Silicon Microcantilevers
GUO Yu-lin;XU Gu-cheng;ZHOU Jia;HUANG Yi-ping;BAO Min-hang

..............page:1693-1696

Molecular Dynamics Simulation on the Thermal Conductivity of AlN thin films
YANG Ping;SHEN Min;WANG Ming

..............page:1667-1669

Static Study of Stiction between Rough Surfaces under van der Waals Forces
DING Jian-ning;ZHANG Jian;YANG Ping;LING Zhi-yong;FAN Zhen

..............page:1663-1666

Analysis of Factors Affecting the Thermal Conductivity of Superlattice Using the Molecular Dynamics Simulation Method
HU Han;CHEN Min-hua;CHEN Yun-fei

..............page:1659-1662

Research on the Computational Method of Van Der Waals Force Between Contacting Faces in Microgear Train
YANG Ping;ZHANG Hua-zhong

..............page:1638-1640,1644

Molecular Dynamics Study of Water Molecules Confined in Parallel Si plates
CHEN Bo;CHEN Yun-fei

..............page:1635-1637

Molecular Dynamics Simulation of Electroosmotic Flow in Nanotubes
WANG Gui-ming;CHEN Min-hua;YANG Jue-kuan;CHEN Yun-fei

..............page:1629-1634

Simulation of the Energy Dissipation Mechanisms in Multiwall Carbon Nanotube Oscillators with Molecular Dynamics
WANG Xiao-hui;BI Ke-dong;WANG Yu-juan;CHEN Yun-fei

..............page:1626-1628,1634

Fast Coding Method for Counter-Meshing Gears Mechanism
GAO Yang

..............page:1566-1569

Design and Debug of the Measuring Circuits of the Wheel-Type Flow Sensor
SUN Ping;ZHANG Lu;WEI Ze-wen;QIN Ming;HUANG Qing-an

..............page:1563-1565,1569

Experimental Analysis and Simulation of Microgripper with Flexure Hinge
WANG Xu;SHEN Xue-jin;ZHANG Yong-yu

..............page:1559-1562

A Microactuator with High-Resolution and Large-Stroke Drive Features
JIANG Wen-rui;LU Ze-sheng

..............page:1555-1558,1562

Calibration and Handling Strategy of Automated Micro Assembly System
WU Jian-hua;WU Ya-lei;CHU Jia-ru

..............page:1550-1554

Study of the Thermomechanical Coupling Effect in COB Packaging Structures
LI Ming;HUANG Qing-an;SONG Jing;CHEN Fan-xiu;TANG Jie-ying;Yu Cun-jiang

..............page:1606-1609,1612

Stiction Reliability Prediction for Polysilicon Micro-Cantilevers under Shock
WANG Pei-yao;TANG Jie-ying;YU Cun-jiang;EN Yun-fei;SHI Qian

..............page:1602-1605

Research on the Fatigue Damage of a Polysilicon Beam
YU Cun-jiang;TANG Jie-ying;EN Yun-fei;SHI Qian

..............page:1599-1601,1605

A Method for Measuring Mechanical Properties of Permalloy Thin Films
LI Xue-ping;DING Gui-fu;ANDO Taeko;SHIKIDA Mitsuhiro;SATO Kazuo

..............page:1595-1598

Research of MEMS Dynamic Testing Based on Comb Silicon Micro-Resonator
ZHENG Li-na;XUE Chen-yang;ZHANG Wen-dong;XIONG Ji-jun;ZHANG Bin-zhen;KONG Fan-hua

..............page:1531-1534

A Method for In-Situ Measuring Average Stress Gradient and Equivalent Elastic Modulus of a MEMS Film
RONG Hua;WANG Ming

..............page:1527-1530

Study on Dimensional Tolerance of SU-8 Photoresist Microstructures
QIN Jiang;DU Li-qun;LIU Chong;ZHU Shen-miao

..............page:1523-1526

Research on Fusion Measurement System of Grating and Capacitive Grating with Nanometer Resolution
MAO Qian-min;LIU An-kun;SHEN Wei-min;ZHANG Zeng-yao

..............page:1519-1522

The Analyze of High Performance DC/DC Converter
WANG Ning;JIANG Ya-dong

..............page:1588-1590

The Design of Novel Bridge-Connecting Power Amplifier of Audio-Frequency
HE Wei-dong;JIANG Ya-dong

..............page:1585-1587

An Optimized Accessing Protocol for DS18B20 in Reducing Cycle Time in Large Scale Multi-site Temperature Monitoring
CHEN Liang-guang;LI Xiong-jie;XU Bin

..............page:1580-1584

An Microassembly System for Batch Bonding of MEMS Sensors
RONG Wei-bin;XIE Hui;SUN Lining

..............page:1573-1579

Molecular Dynamics Simulation of the Mechanical Properties of Bio-molecules Adsorption on Ni Nano-film
YANG Zhen-yu;ZHAO Ya-pu

..............page:1689-1692

Simulation of Single Crystal Nano-Beam by Molecular Dynamic Method
CAO Gong-bai;JIAO Ji-wei;CHEN Yun-fei;LI Tie;YANG Heng;Wang Yue-lin

..............page:1686-1688

Research on Fluid Flow and Heat Transfer of the V-Shaped Microchannel Heat Sink
LIU Ting-ting;GHO Yang;HAN Bin;HU Li

..............page:1683-1685

Theoretical and Experimental Research on a Novel Data Readout Method for SPM-Based High Density Data Storage
XU Xiao-hui;ZHAOGang;WEN Li;WU Ya-lei;CHU Jia-ru

..............page:1677-1682

Numerical Simulation on Operating Process of Freeze Tweezer for Manipulation of Micro/Nano Objects
YANG Yang;LIU Jing

..............page:1673-1676

Moleculer Dynamics Simulation of Thermal Conductivity of Nano-Films in the Direction along the Planes
XU Yue-fei;LIAO Heng-cheng

..............page:1670-1672,1676

Design and Temperature Drift Test of Pulse Modulation Constant Temperature Difference(CTD) Control Circuit of Thermal Flow Sensor
DING Gao-fei;QIN Ming;SHEN Guang-ping

..............page:1570-1572

The Weak Signal Frequency in Silicon Resonance Microsensor Measurement Based on Heterodyne Stochastic Resonance Method
HUANG Yong-mei;LIN Min

..............page:1542-1544

Resonance Frequency Measuring Technique of MEMS Microstructures
WANG Xiao-dong;WANG Tao;LI Nan;LIU Meng-wei;CUI Yan;WANG Li-ding

..............page:1538-1541

Molecular Dynamics Simulation of the Influence on Nanoscale Fluid Lubrication and Friction of Electric Double Layer
WANG Jia-jun;LIN Xiao-hui;YANG Jue-kuan;CHEN Yun-fei

..............page:1655-1658

Research on the Nanomechanical Properties of the Zaocys Dhumnades's Ventral Epidermis
ZHANG Zhan-li;YANG Ji-chang;DING Jian-ning;HU You-yao

..............page:1652-1654

Research on Friction at the Atomic Scale
LUO Bin-bin;LI Xiang;CHEN Yun-fei

..............page:1649-1651

Dynamic Stability of Torsional NEMS Actuators with Casimir Effect
GUO Jian-gang;ZHAO Ya-pu

..............page:1645-1648,1651

Molecular Dynamics Simulation of Thermal Response Process of Near-Field Thermal Storage System
HUANG Ling-juan;WANG Yu-juan;CHEN Yun-fei

..............page:1641-1644

Measurement System for in-situ Extracting Material Parameters of MEMS Thin Film Based on Data Acquisition
LI Qiao-ping;LI Wei-hua

..............page:1535-1537,1541

Study on Measurement of Surge Micro-Shape Using Three-Dimensional MEMS Mechanical Quantity Sensor
XU Ke-bao;WANG Jun-cheng;CHEN Guang-qing;GAO Li-li;LI Xiao-bo

..............page:1509-1511

The Method and System for Testing and Calibration of Three-Dimensional Micro Tactile MEMS Sensor
ZHAO Da-bo;LI Da-chao;LI Yuan;FU Xing;HU Xiao-tang

..............page:1504-1508

Simultaneous Measurements of Thermal Conductivities of Nd:YAG Crystal and SiO2/ZrO2 Antireflective Films by 3ω Method
WANG Zhao-liang;TANG Da-wei

..............page:1545-1549

Study on the Performance of Phase-Shifter in the MEMS Microscopic Interferometric Measuring System
GUO Tong;HU Chun-guang;CHEN Jin-ping;FU Xing;HU Xiao-tang

..............page:1500-1503,1508

Au Surface Mechanical Behavior Research with Electro-Thermo-Mechanical Coupled Action Using Atomic Force Microscope
WANG Quan;DING Jian-ning;XUE Wei;YU Peng-qing

..............page:1497-1499

Measuring MEMS Deep-Trench Structures with White Light Interference
XUE Chen-yang;KONG Fan-hua;ZHANG Wen-dong;XIONG Ji-jun;ZHANG Bin-zhen;ZHENG Li-na

..............page:1516-1518,1522

Structure Design and Optimization of MEMS Micro Tactile Probe for NMM
LI Yuan;LI Da-chao;HU Xiao-tang;ZHAO Da-bo;GUO Tong;CHEN Jin-ping

..............page:1512-1515

Finite Element Analysis on Solder Joint Stress of BGA under Shock Load
ZHANG Jie;YANG Ping

..............page:1591-1594,1598

Mechanical Characterization of Nanostructures Using Nanobending-Based Test
XU Lin-yan;LI Da-chao;HU Xiao-tang;ZHANG Hai-xia;HUANG Yu-bo

..............page:1493-1496,1499

A Phase Unwrapping Method Based on Template in MEMS/NEMS 3-D Surface Profile Measurement
HUANG Yu-bo;LI Da-chao;HU Xiao-tang;HU Chun-guang;ZHANG Wen-dong;XU Lin-yan

..............page:1488-1492

The Design and Fabrication of 3D Micro Spring Type MEMS Probe Card
JING Xiang-meng;CHEN Di;ZHANG Ye;ZHANG Bao-zeng;LIU Jing-quan;CHEN Xiang;ZHU Jun

..............page:1484-1487

Experimental Study on the Uniformity of Micro-Electroforming Based on no Backing Process
LIU Hai-jun;DU Li-qun;QIN Jiang;ZHU Shen-miao

..............page:1481-1483,1487

Study on Fabrication of 3D Micro-Structure in Polymer Photovoltaic Cells Based on Nanoimprint Lithography Technology
YIN Lei;LIU Hong-zhong;DING Yu-cheng;LU Bing-heng

..............page:1455-1458

Fabrication of Micro/ nano Structures Using Mechanical Scratching Method with AFM Tip
YAN Yong-da;SUN Tao;DONG Shen

..............page:1451-1454

TiN Membrane for MEMS Applications
YANG Mei;SHU Qiong;CHEN Jing

..............page:1448-1450,1454

The Growth and Adhesion Properties Research of the Cu/NiFe Films on the Silicon Substrates
ZHANG Tao;WU Yi-hui;ZHANG Ping;WANG Shu-rong

..............page:1444-1447

Laminated Photoresist Sacrificial Layer Technology for MEMS
ZHANG Yong-hua;DING Gui-fu;JIANG Zheng;CAI Bing-chu;LAI Zong-sheng

..............page:1422-1425

A Multichannel Microprobe for Neural Recordings
SUI Xiao-hong;ZHANG Ruo-xin;PEI Wei-hua;LU Lin;CHEN Hong-da

..............page:1419-1421,1425

Deep Reactive Ion Etching (DRIE) Device in the MEMS Fabrications
CHEN Te-chao;YU Qing-rong;GONG Jie-hong;ZHANG Dong-yan;WI Bo;LI Jian-zhi

..............page:1415-1418

Fabrication and Characterization of Free Standing Structure Membrane with High Width-Thickness Ratio
LI Bo;XU Chen;ZHAO Hui;ZHAO Lin-lin;HUO Wen-xiao;SONG Yi-chao;SHEN Guang-di

..............page:1391-1394

Studies on MEMS Neural Micro Probe
CHENG Zheng-xi;HUANG Wei-ning;ZHOU Jia;HUANG Yi-ping;BAO Min-hang

..............page:1388-1390,1394

Low Temperature Wafer Direct Bonding Using Wet Chemical Surface Activation
LIN Xiao-hui;LIAO Guang-lan;SHI Tie-lin;NIE Lei

..............page:1384-1387,1403

ICP Process in Fabrication of Micro-Inertial Devices
ZHUO Min;JIA Shi-xing;ZHU Jian;ZHANG Long

..............page:1381-1383

Method of System-level Dynamic Simulation for A MEMS Cantilever Based on the Mechanical Description
ZHANG Jian;LI Wei-hua

..............page:1376-1380

The Research of Anti-Adhesive Film by RIE Deposition in MEMS/NEMS
GU Pan;LIU Jing-quan;CHEN Di;SUN Hong-wen

..............page:1395-1397,1400

Deflection Model and Optimization of Piezoelectric Multilayer Cantilever Based on Silicon
FANG Hua-jun;LIU Li-tian;REN Tian-ling

..............page:1330-1332,1336

3D Structure Building Algorithm of MEMS Device Based on Layout And Process
DENG Wei;LI Wei-hua

..............page:1344-1347,1353

The System Lever Application of Comb Resonator Macromodel
LI Jun;LI Xiao-ying;LV Xiang-lian;YAN Zi-jian;CHANG Hong-long

..............page:1340-1343

Improvement of Transient Response of Eletrostatically Actuated MEMS An State Feedback Viewpoint
FENG Ren-jian;YU Shang-min;WAN Jiang-wen;WU Yin-feng

..............page:1337-1339,1343

A Novel Transfer Method from 3D Model to 2D Mask Layout
XU Jing-hui;YUAN Wei-zheng;CHANG Hong-long;XIE Jian-bing

..............page:1333-1336

The Numerical Value Simulation Studying of Flip-Chip Thermal Stress Under Temperature Impulsion
LOU Wen-zhong;MA Ting;YU Xiu-li

..............page:1623-1625

Mechanical Behavior Experimental Study of Microstructure with Mechatronic Coupling
XUE Wei;WANG Quan;DING Jian-ning;YU Peng-qing

..............page:1620-1622

Analysis for Load Limitation of Square Shaped Boron-Doped Silicon Diaphragm
XU Chen;SHI Meng-yu;ZHAO Lin-lin;LI Bo;SHEN Guang-di

..............page:1617-1619

Analytical Modeling on Thermally Induced Packaging Effect of MEMS Devices
SONG Jing;HUANG Qing-an;TANG Jie-ying

..............page:1613-1616

A Failure Mode of Micro Mechanical Shock Sensors
SUN Yuan-cheng;YANG Bo;PENG Bo;ZHAO Long;ZHANG Qian-mei

..............page:1610-1612

Research on the Cr Membrane Igniting Resistance in MEMS Solid Propellant Micro-Thruster
XU Chao;LI Zhao-ze;WAN Hong;WU Xue-zhong

..............page:1411-1414,1418

The Electronic Properties of SiC Films Deposited by RF Magnetron Sputtering
ZHOU JI-cheng;ZHENG XU-qiang

..............page:1407-1410

Design and Fabrication of a Multichannel Silicon-based Microelectrode Probe for Neural Recording
ZHANG Ruo-xin;SUI Xiao-hong;PEI Wei-hua;CHEN Hong-da

..............page:1404-1406,1410

A Technology for Making Silicon Film on Trenched Silicon Substrate
ZHANG Zheng-yuan;XU Shi-lu;FENG jian;HU Ming-yu

..............page:1401-1403

Micro-Gear Fabrication Using Amorphous Carbon Films
ZHANG Ji-cheng;WU Wei-dong;TANG Yong-jian

..............page:1398-1400

Modeling and Simulation of the Drug Release from PLGA Drug Delivery Micro-system Based on Monte Carlo model
WANG Xiao-peng;CHEN Tian-ning;YANG Zhan-xiao

..............page:1327-1329

One Novel MEMS Integrated Design Tool with Maximal Six Design Flows
CHANG Hong-long;XIE Jian-bing;XU Jing-hui;YAN Zi-jian;YUAN Wei-zheng

..............page:1323-1326

MEMS Macromodeling Based on Krylov Subspace Projection Method
YAN Zi-jian;YUAN Wei-zheng;LV Xiang-lian;LI Jun;CHANG Hong-long

..............page:1319-1322

Investigation of Selectively Forming Nano-Porous Silicon for the application of MEA
WANG Wen-jing;WANG Xiao-hong;JIANG Yin-qi;HU Xiao-long;LIU Li-tian

..............page:1477-1480

Micro Milling of the Inertial Components with 3D structure
WANG Bo;LIANG Ying-chun;SUN Ya-zhou;TAN Ya-ming

..............page:1473-1476

Simulation of the Distribution of the Deep UV Light Intensity in SU-8 PR
FENG Ming;HUANG Qin-gan;LI Wei-hua;ZHOU Zai-fa;ZHU Zhen

..............page:1470-1472,1476

Study on Effects of Heat Transfer Coefficient between Polymer and Mold on Melt Filling Flow in Micro Injection Molding
ZHUANG Jian;YU Tong-min;WANG Min-jie

..............page:1466-1469

Novel Fabrication Technique for Nanogroove Using Ion Beam Etching
SHI Ming-fu;JIAO Ji-wei;BAO Xiao-qing;FENG Fei;YANG Heng;LI Tie;WANG Yue-lin

..............page:1462-1465

Study of Preparation of AIN Thin Films for FBAR Application by RF Sputtering
LI Kan;DONG Shu-rong;WANG De-miao

..............page:1459-1461,1465

System-Level Design Methodology and Application in Integrated Testing System
GUAN Le;CHU Jin-kui;WANG Xiao-dong;ZHANG Duan-qin;WANG Li-ding

..............page:1313-1318

Structural Design of Novel Micro Piezoelectric Cantilevers with Low Stiffness and High Resonance Frequency
ZHAO Gang;CHU Jia-ru

..............page:1348-1353

The Algorithm of Automatic Optimization of MEMS Devices
LAI Wen-bin;LI Wei-hua

..............page:1372-1375

Macromodeling of Electrostatically Actuated Circular Plate Based on mode analysis
LIN Xie-Zhao;YING Ji

..............page:1368-1371

Pulse Duration of AFM Induced Oxidation and Si Nano-Fabrication
LIU Qing-gang;HE Bo-tao;ZHANG Chao-yan;QI Sen;ZHANG Shi-lin;HU Xiao-tang

..............page:1441-1443,1447

A Study on Cr Thin Films Depositing and its Wet-Etching
LI Zhao-ze;XU Chao;WU Xue-zhong;WAN Hong;LI Sheng-yi

..............page:1437-1440

PVD Sputtering Technology and It's Application on MEMS
WANG Xiong;WU Xue-zhong

..............page:1434-1436,1440

Research for Manufactuuring the Proximal Circular Silicon Membrane Using Anistropic Etching with EPW
ZHAO Xiao-feng;WEN Dian-zhong;WANG Tian-qi;REN Hua

..............page:1430-1433

A Model of Deep-RIE in MEMS Fabrications
ZHANG Jian;HUANG Qing-an;LI Wei-hua

..............page:1426-1429,1433

A Nodal Analysis Method for An Electrically Actuated Microbeam
LI Min;HUANG Qing-an;LI Wei-hua

..............page:1364-1367

A Nodal Analysis Model for In-Plane Electrothermal Microactuators
LI Ren-gang;HUANG Qing-an;LI Wei-hua

..............page:1358-1363,1367

Nonlinear Dynamic Study of Micro-Resonator Including Viscous Air Damping
GAO Rong;WANG Xiao-jing;ZHANG Xiao-xiang;WANG Min;YU Mao-hua;XIE Ming-chun

..............page:1354-1357