Optical coatings for DUV Lithography
ZHANG Li-chao;CAI Xi-kun;SHI Guang;State Key Laboratory of Applied Optics;Changchun Institute of Applied Optics;Fine Mechanics and Physics;Chinese Academy of Sciences;
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Co-aperture optical system for imaging and laser transmitting
LI Yan-jie;JIN Guang;ZHANG Yuan;KONG Lin;National & Local United Engineering Research Center of Small Satellite Technology;Changchun Institute of Optics;Fine Mechanics and Physics;Chinese Academy of Sciences;University of the Chinese Academy of Sciences;
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