..............page:43-45,57
..............page:8-10,21
Survey on MEMS technology and its application in biology domain
liu yuan ; binc zhi-gang; liu jing-tai students affairs division; tianjin university of technology and education; tianjin 300222; china department of automation; tianjin university of technology and education; tianjin 300222; china institute of robotics and automatic information system; nankai university; tianjin 300071 ; china
..............page:40-42
..............page:22-24,39
..............page:1-7,13