Chinese Journal of Semiconductors 2007 Issue 2 Study on the Material Removal Mechanism in Chemical Mechanical Polishing at the Molecular Scale

Study on the Material Removal Mechanism in Chemical Mechanical Polishing at the Molecular Scale
Wang Yongguang;Zhao Yongwu

..............page:308-312

Model of Non-Normal Process Capability Indices to Semiconductor Quality Control
Wang Shaoxi;Jia Xinzhang

..............page:227-231

Duration of Startup of GaAs Wet Etching Measured by Infrared-Image of Linear Liquid Film
Liu Lin;Ye Yutang;Wu Yunfeng;Fang Liang;Lu Jiajia;Chen Zhenlong

..............page:222-226

Pressure-Free Localized Laser Bonding for Silicon and Glass
Ma Ziwen;Tang Zirong;Liao Guanglan;Shi Tielin;Nie Lei

..............page:217-221

Low-Temperature Wafer-to-Wafer Bonding Using Intermediate Metals
Zhang Xiaoying;Chen Songyan;Lai Hongkai;Li Cheng;Yu Jinzhong

..............page:213-216

Fabrication of 1nm/s High Deposition Microcrystalline Silicon and Its Application in Solar Cells
Zhang Xiaodan;Zhang Farong;Zhao Ying;Chen Fei;Sun Jian;Wei Changchun;Geng Xinhua;Xiong Shaozhen

..............page:209-212

Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer
Xu Jingbo;Zhao Yulong;Jiang Zhuangde;Zhang Dacheng;Yang Fang;Sun Jian

..............page:302-307

An 80dB Dynamic Range ∑-△ Modulator for a GSM System
Chen Jianqiu;Ren Junyan;Xu Jun;Wang Zhaogang;Li Yiran

..............page:294-301

A Novel Oscillator Based on RTD/MOSFET
Wang Wei;Niu Pingjuan;Guo Weilian;Yu Xin;Zhang Shilin

..............page:289-293

Separate Absorption and Multiplication 4H-SiC Ultraviolet Avalanche Photodetector
Zhu Huili;Chen Xiaping;Wu Zhengyun

..............page:284-288

Deformation Simulation on the Beam of InP-Based MOEMS Tunable Devices
Wu Xuming;Wang Xiaodong;He Guorong;Wang Qing;Cao Yulian;Tan Manqing

..............page:280-283

Coupling Theory and Simulation of a High Speed Optical Receiver Module
Chen Shiyu;Wang Gang

..............page:275-279

Modeling, Fabrication, and Characterization of a Novel Optically Driven Deformable Mirror
Xiang Dong;Wang Qingling;Zhang Guangyong;Zhou Lina

..............page:269-274

Fabrication and Characteristics of Nano-Aperture Vertical-Cavity Surface-Emitting Laser
Gao Jianxia;Song Guofeng;Gan Qiaoqiang;Xu Yun;Guo Baoshan;Chen Lianghui

..............page:265-268

Injection Locked Erbium-Doped Fiber Ring Laser and Its Wavelength Tuning
Zhang Xin;Zhang Tao;Chen Wei;Liu Yu;Wang Xin;Xie Liang;Zhu Ninghua;Feng Boxue

..............page:258-264

A 155Mbps 0.5μmCMOS Limiting Amplifier
Jiao Yang;Wang Zhigong;Wang Rong;Guan Zhiqiang

..............page:176-181

Total Ionizing Dose Radiation Effects on MOS Transistors with Different Layouts
Li Dongmei;Huangfu Liying;Gou Qiujing;Wang Zhihua

..............page:171-175

New Lateral Super Junction MOSFETs with n+-Floating Layer on High-Resistance Substrate
Duan Baoxing;Zhang Bo;Li Zhaoji

..............page:166-170

SOICMOS Integrated Circuit of Laser Range Finding Working at High Temperatures
Gao Yong;Zhang Xin;Liu Mengxin;An Tao;Liu Shanxi;Ma Liguo

..............page:159-165

InP/InGaAs Heterojunction Bipolar Transistor with Base μ-Bridge and Emitter Air-Bridge
Yu Jinyong;Liu Xinyu;Su Shubing;Wang Runmei;Xu Anhuai;Qi Ming

..............page:154-158

Ohmic Contact Properties of Multi-Metal Films on n-Type 4H-SiC
Han Ru;Yang Yintang;Wang Ping;Cui Zhandong;Li Liang

..............page:149-153

DCXRD Investigation of a Ge/Si(001) Island Multilayer Structure
Shi Wenhua;Xue Chunlai;Luo Liping;Wang Qiming

..............page:145-148

Self-Seeding of DFB Laser to Improve the Frequency Response
Wang Xin;Wen Jimin;Huang Hengpei;Yuan Haiqing;Xie Liang;Zhu Ninghua

..............page:254-257

RF-CMOS Modeling:Parasitic Analysis for MOST On-Wafer Test Structure
Liu Jun;Sun Lingling;Xu Xiaojun

..............page:246-253

Total Ionizing Dose Effects of Deep Submicron nMOSFET Devices
Meng Zhiqin;Hao Yue;Tang Yu;Ma Xiaohua;Zhu Zhiwei;Li Yongkun

..............page:241-245

Regular Perturbation Method for Studying the Subthreshold Characteristics of Nano-Scaled MOSFETs
Dai Yuehua;Chen Junning;Ke Daoming

..............page:237-240

A Novel Double RESURF TG-LDMOS Device Structure
Xu Shengrui;Hao Yue;Feng Hui;Li Dechang;Zhang Jincheng

..............page:232-236

Physical Vapor Transport Growth and Characterization of Large Bulk AlN Crystal
Dong Zhiyuan;Zhao Youwen;Wei Xuecheng;Li Jinmin

..............page:204-208

Effect of Pretreatment on Thermal Donors in Neutron-Irradiated Czochralski Silicon
Deng Xiaoran;Yang Shuai

..............page:200-203

Luminescence and Recombination Centers in ZnO/Si Films
Liu Cihui;Yao Ran;Su Jianfeng;Ma Zeyu;Fu Zhuxi

..............page:196-199

Detailed Routing Algorithm with Optical Proximity Effects Constraint
Zhou Qiang;Cai Yici;Zhang Wei;Hong Xianlong

..............page:189-195

A Fully Integrated CMOS Readout Circuit for Particle Detectors
Zhang Yacong;Chen Zhongjian;Lu Wengao;Zhao Baoying;Ji Lijiu

..............page:182-188