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Microring Resonator with High Quality Factor Based on Silicon on Insulator
GUO Kaili;WANG Zhi;LI Zhiyong;LI Qiang;LE Yansi;WU Chongqing;Key Lab.Luminescence and Optical Information of the Ministry of Education;Institute of Optical Information;School of Science;Beijing Jiaotong University;State Key Lab.of Integrated Optoelectronics;Institute of Semiconductors;Chinese Academy of Science;
..............page:487-491
..............page:492-494+504
The Silicon Nitride Mask for Isotropic Wet Etching
LIU Yadong;ZHANG Weiping;TANG Jian;WANG Yinghai;XING Yaliang;SUN Dianjun;National Key Lab.of Science and Technology on Micro/Nano Fabrication;Lab.for Thin Film and Micro Fabrication of the Ministry of Education;Shanghai Key Lab.of Navigation and Location-based Services;School of Electronic Information and Electrical Engineering;Shanghai Jiao Tong University;
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