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Effect of Air Damping on pull-in Voltage of Torsion Electrostatic Micro-actuator
LIU Jun;LI Haihua;HU Kexiang;WANG Qingkang;Key Lab.for Thin Film and Micro fabrication of the Ministry of Education;National Key Lab.of Science and Technology on Micro/Nano Fabrication;Department of Microelectronics and Nanoscience;School of electronic information and Electrical engineering;Shanghai Jiao Tong University;
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..............page:650-656
UV Laser Processing Technology of Flapping-wing Microair Vehicles
ZHANG Wei;ZHANG Weiping;KE Xijun;ZOU Yang;CHAI Shuangshuang;YE Yinan;National Key Lab.of Science and Technology on Micro/Nano Fabrication;Key Lab.of Thin Film and Micro Fabrication of the Ministry of Education;Department of Micro/Nano Electronics;School of Electronic Information and Electrical Engineering;Shanghai Jiaotong University;
..............page:657-660+666
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