Progress in Natural Science 1996 Issue 5 THERMAL CHARACTERISATION OF MICROELECTRONICS MATERIALS AT VARIOUS SCALES

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Progress in Natural Science
1002-0071
1996 Issue 5

THERMAL CHARACTERISATION OF MICROELECTRONICS MATERIALS AT VARIOUS SCALES

..............page:467

Thermoelastic and electronic strain contributions to the frequency transmission photoacoustic effect in semiconductors

..............page:471

Fresnel diffraction theory for surface photo-displacement in semiconductors

..............page:475

Characterization of electronic transport properties in semiconductors by scanning photothermal microscopy

..............page:479

Photoacoustic frequency transmission technique:carrier transport parameters measurements in semiconductor bulk and thin film samples

..............page:483

Heat transport monitoring in porous silicon by the photoacoustic technique

..............page:487

Determination of thermal diffusivity of semiconductors using transmission PDS

..............page:491

Noncontact Photothermal Radiometric Deep-Level Transient Spectroscopy of Undoped Semi-Insulating GaAs

..............page:494

Analysis of Subsurface Damage in Silicon by Photoluminescence and Photothermal Heterodyne Methods

..............page:498

Photothermal investigation of implanted Si wafers:Influence of thermal diffusivity

..............page:503

Photothermal reflection signal versus temperature:Study of implanted Si wafers

..............page:507

Photothermal Characterization of Ion Implanted SiC

..............page:511

Photothermally modulated optical and microwave response from ion implanted semiconductors

..............page:515

Quantitative thermal imaging of current densities and heat flow in electronic microstructures

..............page:519

Second-harmonic photoacoustic imaging of dynamic integrated circuits

..............page:524

Photoacoustic subsurface defects inspection in semiconductor technology

..............page:528

Evaluation of ROM Chips Using Modulated Photo-Reflectance Technique

..............page:531

Investigation of 980 nm waveguide lasers by photothermal microscopy

..............page:535