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Chinese Journal of Vacuum Science and Technology
1672-7126
2015 Issue 1
Effects of Mo Buffer Layer on Properties of Mo/Cu Electrode Stack
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page:1-5
First-Principles Calculationand Characterization of Optical Property of La-Doped SnO2 Coating
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page:6-11
Impact of Sputtering Pressure on Li-W Co-Doped ZnO Thin Films
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page:12-17
Properties and Application of Indium-Tin-Oxide Coatings Deposited by Energy Filtering Magnetron Sputtering at Room Temperature
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page:18-22
Influence of Annealing Temperature on Microstructures and Optical Properties of CuGa0.8Ge0.2Se2 Films
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page:23-26
Synthesis and Photocatalytic Properties of Ag-Modified N-Doped TiO2 Thin Films
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page:27-32
Synthesis and Electrical Propertiesin 300 ~ 500℃ Range of YSZ/STO/YSZ-STO Superlattice Thin Films
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page:33-37
Viscosity Correction of Rarefied Gas in Confinement Ring Based on Quadratic Optimization
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page:38-43
Novel Type of Planetary Rotating Sample-Holder for Film Growth on Cylindrical Dewar by Vacuum Evaporation
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page:44-48
Modeling andSimulation of Three-Nozzle Steam Jet Pump
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page:49-56
Novel Technique to Rapidly Evaluate Precise-Volume of Irregularly-Shaped Container
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page:57-61
Modeling and Calculation of Micro-Gripper Based on Vacuum Adsorption
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page:62-68
Influence of Helium Permeation in Polytetrafluoroethene Gasket on Leak Detection
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page:69-73
Impact of Heat Transfer on Pressure Response in Vacuum Chamber of Pneumatic Vacuum System
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page:74-78
Novel Type of Highly Reliable Electric Heater for Thermal Cathode of Microwave Vacuum Electron Device
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page:79-83
Photothermal Properties of Nanofluid in Direct Absorption Solar Collectors
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page:84-88
Design Optimization of Confinement Ring in Reactive Ion Etching Reactor of 450 mm Silicon Wafer
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page:89-99
Optimization of Cl2 and SF6 Flow Rates in Reactive Ion Etching of Amorphous-Si on Industrial Scale
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page:100-104
Passivation of Polycrystalline Black Siliconby Plasma Enhanced Atomic Layer Deposition of Al2O3
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page:105-108
Effect of Solid-Carbon Source Temperature on Graphene Growth by Chemical Vapor Deposition
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page:109-113
Influence of Modulation Period on Mechanical Behavior of Ti-TiN-Zr-ZrN Multi-Layered Coatings
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page:114-118
Calculation and analysis of computer chassis temperature field and flow field at different altitudes
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page:119-124