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Journal of Vacuum Science and Technology
1672-7126
2001 Issue 4
Role of Ozone in Preparing Transparent Conductive IMO Films at Low Temperature by Thermal Reactive Evaporation
meng yang ; yang xi liang ; chen hua xian ; shen jie ; jiang yi ming ; zhang zhuang jian ; hua zhong yi
..............page:259-262,268
ADXPS Study of Effects of Oxygen Plasma Treatment on Surface Chemical States of Indium Tin Oxide
song wei jie ; su shu jiang ; wang dao yuan ; cao li li
..............page:263-268
Formation of Intermetallic Compounds by Zr and V Ion Implantation into Aluminum
miao wei ; tao zuo ; li bin ; liu bai xin
..............page:269-272,280
Study of Delay Characteristics of Thin Film Cold Cathode Electron Source Lighting Device
qian feng ; deng shao zhi ; chen jun ; xu ning sheng
..............page:273-276
Study of Preparation,Characterization of Pt/Fe2O3/TiO2 and Its Photocatalytic Activity
yang jian jun ; li dong xu ; zhang zhi jun ; li qing lin ; wang han qing
..............page:277-280
Influence of O2 on Growth of Diamond Films by Microwave Plasma Chemical Vapor Deposition
shu xing sheng ; zuo qin chong ; liang rong qing
..............page:281-284,290
Study of Organic Electroluminescent Thin Film Devices Using Organic Complex of Rare-earth Euripium Eu(DBM)2 (AA)phen as Emitting Layer
fan xi zhi ; chen jun ; ling qi dan ; liu xu ; gu pei fu ; tang jin fa
..............page:285-290
Effcet of Annealing on Si1-x-yGexCy Alloys Grown by Ultra-high Vacuum Chemical Vapor Deposition
wang ya dong ; ye zhi zhen ; huang jing yun ; zhao bing hui ; zuo zhen
..............page:291-293
The Mathematical Model of Particle in Cell of the Inductively Coupled Plasma
huang guang zhou ; yu ji rong ; yang ying jie ; liu xiong ying
..............page:294-297
New Type of Ultraviolet Light Source-Excimer Lamp
xu jin zhou ; liang rong qing ; ren zhao xing
..............page:298-302
Progress of Single-electron Tunneling Device
jiang peng ; he sheng tai ; shi dong xia ; zhang zuo xu ; gao hong jun
..............page:303-310,335
Magnetron Sputtering Target Materials
wu li jun
..............page:342-347
y of a-Si1-xCx∶H Films with High Hydrogen Content Prepared from Two Different Mixtures
liu yu xue ; liu yi chun ; shen de zhen
..............page:336-341
Effect of Perpendicular Magnetic Field on Properties of Fe-N Films Grown by Reactive Magnetron Sputtering
zhu yan ; di guo qing ; chen ya jie ; zhao deng tao ; yang hai feng
..............page:332-335
Studies of CNx Films Grown by VCAD
yuan zhen hai ; fu zhi qiang ; deng qi sen ; lin song sheng ; zheng jian hong ; dai da huang
..............page:329-331
Studies of (Pb1-xSrx)TiO3 Ferroelectric Thin Films Grown by Magnetron-sputtering
sun ping ; wang mao xiang ; sun ; tong ; shu qing
..............page:326-328
Reduction of Effects of Electron Mean Escape Length on AES/XPS Depth Profile
ji zhen guo ; guo wei min
..............page:322-325
Discharge Characteristics of Slot Antenna Plasma Source in Broad Pressure Range
wu cong feng ; huang wei dong ; wen xiao hui ; zhan ru juan
..............page:319-321
Optimization Design of Immersion Magnetic Lenses Used for Projection Electron Beam Lithography
cheng min ; tang tian tong ; yao zhen hua ; guo de zheng
..............page:315-318