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Journal of Vacuum Science and Technology
1672-7126
1997 Issue 3
qi ti wei liu liang biao zhun zhuang zhi de yan zhi
li wang kui
..............
page:145-152
yi zhong xin xing gui wei ji xie zhan zhi xing xie zhen zhen kong ji
wang ya qiang
..............
page:153-159
ti/aln kuai su tui huo jie mian fan ying de shi yan yan jiu
chen xin
..............
page:160-166
