Vacuum 2016 Issue 4 The influence of substrate movement modes on the film thickness uniformity prepared by magnetron sputtering with a rectangle target

The influence of substrate movement modes on the film thickness uniformity prepared by magnetron sputtering with a rectangle target
ZHANG Xiang-xiu;ZHANG Peng-fei;ZHAO Jin-zhu;GUO Pan;DU Xiao-song;School of Optoelectronic Information;University of Electronic Science and Technology of China;

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zhen kong za zhi zai he xin qi kan zhong de di wei he pai ming

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zhen kong za zhi shun li tong guo guo jia xin wen chu ban guang dian zong ju di yi pi xue shu qi kan ren ding

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Application of magnetron sputtering in small particles coating
YANG Jing;LI Yuan-yuan;National Key Laboratory for Reactor Fuel and Materials;The Fourth Department of Nuclear Power Institute of China;

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zhong guo zhen kong xue hui hui yi tong zhi

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Analysis of improving the utilization rate of sputtering target of planar magnetic
SUN Zhen-hua;SHEN Li-ru;Southwestern Institute of Physics;

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Microstructure and interfacial characteristic of Al coating prepared by MFMSIP on depleted Uranium surface
LIU Qing-he;WANG Qing-fu;CHEN Lin;LANG Ding-mu;GUAN Wei-jun;XIAO Hong;Institute of Materials;China Academy of Engineering Physics;

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zhen kong ling yu you yi bu da xing gong ju shu zhen kong gong cheng she ji chu ban fa xing

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Effect of cooling structure on the thermal deformation of screw vacuum pump rotor
ZHANG Dong-qing;CHEN Zong-wu;GUO Jin-guang;CUI Yu-hao;ZHU min;Shandong Bozhong Vacuum Equipment Co.;Ltd;Institute of Vacuum Technology and equipment;Hefei University of Technology;

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zhong guo jian cheng shi jie zui da hang tian qi zong zhuang ji cheng ce shi zhong xin
yao tian yu ; cai xiao zuo ; fu yi fei ;

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Discussion on Roots vacuum pump performance test methods
CHEN Xian-chun;ZHONG Yun-hui;JIANG Zhao-qiao;LUO Gen-song;YANG Zhi-ming;JIN Xin;Zhejiang Vacuum Equipment Group Co.;Ltd.;

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Research of the gas flow through leak channels
Gerhard Voss;Leybold GmbH Bonner;

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dong tai xiang dui fa zhen kong biao zhun zhuang zhi jian jie

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Design of vacuum device for fully enclosed α spectrum measurement system
ZHANG Ning;FEI Yue;WU Yong;Institute of Materials;China Academy of Engineering Physics;

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tou gao xu zhi

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Software design for online film-thickness monitor based on LabWindows/CVI
ZHANG Guo-tong;LIU Yang;Henan Polytechnic institute;

..............page:36-40

zhong guo ke xie jiao yu bu ke ji bu wei sheng ji sheng wei zhong ke yuan gong cheng yuan zi ran ke xue ji jin hui yin fa fa biao xue shu lun wen wu bu zhun

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Simulation on discharge and extraction characteristics of miniaturized Penning ion source
SHI Lei;LI Ming;WANG Ya-jun;Institute of Electronic Engineering;Chinese Academy of Engineering Physics;

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Modeling of vacuum glazing based on unsteady-state heat transfer
DU Ping;WANG Lei;WANG Yuan-qi;Special Glass Key Lab of Hainan Province;College of Information Science & Technology;Hainan University;Polytechnic University of Milan;

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bian xie shi dong tai xiang dui fa zhen kong biao zhun zhuang zhi jian jie

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Design and strength analysis of plug welding in HL-2M vacuum vessel
LI Yong;RAN Hong;CAI Li-jun;LIU De-quan;CAO Zeng;Southwestern Institute of Physics;

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Functionalized Graphene for selective adsorption of heavy metal ions
CHEN Jing-bang;HUANG Lei;SUN Ting;College of Science;Northeastern University;

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Study on nonlinear hysteretic model of vibration compaction-soil system
TENG Yun-nan;HAN Ming;School of Mechanical Engineering & Automation;Northeastern University;

..............page:61-64

Analysis of exhaust gas of plasmas on EAST
ZHANG Yong;LI Jian-gang;HU Jians-heng;CAO Bin;LI Jia-hong;WANG Hou-yin;University of Science and Technology of China;Institute of Plasma Physics Chinese Academy of Sciences;

..............page:65-70

shang hai hui yi shi ye you xian gong si jian jie

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Current research status and development of electron beam melting
LIU Yan;ZHANG Jun;LI Jian-jun;Shenyang University;Shenyang Vacuum Technology Institute;

..............page:71-74

zai ren hang tian yu tai kong lv you zheng shi chu ban

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The temperature field design and simulation optimization of vacuum eutectic welding equipment
WANG Cheng-jun;WANG Hong-jie;GUO Hua-feng;WANG Yong-qing;China Electronics Technology Group Corporation NO.2 Research;

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zhong guo zhi wang yu zhen kong za zhi she lian he sheng ming

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di shi jiu jiang zhen kong jian she du mo
zhang yi chen ;

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huan ying ding yue 2016 nian zhen kong za zhi

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2015 nian fa bu de zhen kong ji shu biao zhun

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2016 nian fa bu de zhen kong ji shu biao zhun

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zhong guo zhen kong xue hui 2016 nian huo dong ji hua