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Vacuum
1002-0322
2013 Issue 1
Influence of electrode cone angle on plasma generation characteristics of surface flashover discharge in vacuum
WANG Hao;LIU Wen-zheng;ZHANG De-jin
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page:62-66
Capacitance-voltage property investigation of TiO2/SiOxNy/SiO2 gate dielectric stacks
XU Wen-bin
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page:34-36
Vacuum pumping and leak calibration for the global tightness test system of ITER conductor
HAN Peng;WU Yu;WANG Xiao-ming;LIU Hua-jun;GUO Liang;CAI Deng-gang;XU Cheng-cheng
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page:48-51
Influences of preferential sputtering on depth profile and depth resolution
LIU Yi;WANG Jiang-yong
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page:15-19
zheng gao qi shi
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page:27
Study on measurement method for the noise of Roots pump
YANG Hua-fei;DONG Xiu-jiao;LUO Gen-song;GAO Xun-yi
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page:80-83
CFD simulation of viscous gas flow in the spiral-grooved drag structure
CHEN Da-peng;ZHOU Jia-nan;ZHAO Teng;ZHANG Lin;GAN Shu-yi
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page:71-74
Design of high-frequency half-bridge dc magnetron sputtering power
CHEN Wen;PU Shi-Hao;CHEN Dong-Lai
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page:58-61
Two dimensional magnetic-fluid simulation of RF inductively coupled ion source plasma discharge
NIE Jun-wei;CHEN Qing-chuan;HUANG Qi;FENG Chun-tang;ZHAO Zhe;GENG Shao-fei
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page:67-70
Numerical analysis and optimization on the thermal bridge effect of vacuum insulation panel
KAN An-kang;HAN Hou-de;ZHANG Ting-ting
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page:87-91
Study of the C-SiC coating on stainless steel and its hydrogen resistance
DU Ji-fu
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page:37-40
Study on the application of silicon in the infrared optical coatings
WANG Li-rong;SHI Peng
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page:31-33
Review of development of calibration technology for pressure leak
FENG Yan;LI De-tian;ZHANG Di-xin;SHENG Xue-min;CHENG Yong-jun;SUN Wen-jun
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page:41-47
Effects of negative bias on the structure and deposition rate of TiN films fabricated by arc ion plating
PAN Yu-peng;HUANG Mei-dong;XUE Li;LIU Ye;XU Shi-peng
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page:20-22
A novel technique for vacuum oil-filling in a single hole
YU Qi-bing
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page:92-94
Control system design of flood-lubricated rotary screw vacuum pump
QIAN Di;LUO Yu-hui;XIE Zheng-kun;LI Gui-lin
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page:84-86
Preparation of Sn doped CdO transparent conductive film and its photoelectric properties
ZHENG Bi-ju;HU Wen
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page:10-14
On the factors of getter's degassing
ZHU Lei;WANG Hai-jing;PENG Song-hua;HUANG Li-sheng
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page:75-79
di shi ba jiang zhen kong zheng fa du mo
zhang yi chen
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page:95-96
Leak and flaw detection of vacuum equipment
ZHOU She-zhu;PING Qiang
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page:52-57
The structural features and industrial applications of the multi-chamber coating machine
YANG Nai-heng;BA De-chun;WANG Xiao-dong;LIU Kun
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page:1-9
Study on post-annealing effect of NiZnCo ferrite magnetic films fabricated by magnetron sputtering
XU Xiao-yu
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page:28-30
Surface morphology and tribological properties of TiN film deposited with different arc currents
SHI Xin-wei
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page:23-27