Vacuum 2011 Issue 6 The uniformity experimentation of Al2O3 films simultaneously deposited on two large-area glasses by reactive sputtering

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Vacuum
1002-0322
2011 Issue 6

The uniformity experimentation of Al2O3 films simultaneously deposited on two large-area glasses by reactive sputtering
WANG Shuang;CHI Hua-jing;GUO Shuai;ZHOU Xu;CHEN Ge;ZHANG Qi-chu

..............page:35-39

Microstructure and interfacial adhesion of Ti(CN)/TiC/Al2O3/TiN multilayer ceramic coatings
ZHANG Jin;CHENG Xiao-wei;XUE Qi

..............page:25-28

On the “vacuum migration” of the desorption of ethanol-loaded activated carbon by microwave irradiation
LIAN Ming-lei;FENG Quan-li;NING Ping;Hu Jiang-liang

..............page:61-64

Analysis of MEMS silicon piezoresistive pressure sensor
LI Ye;SHI Xin

..............page:72-75

xin xi dong tai

..............page:50,64

Study on the vacuum characteristics of a freeze-drying chamber for mannitol
XIA Peng

..............page:58-60

Design of digital controlled mid-frequency magnetron sputtering power supply based on FPGA
LIU Yi-chao;CHEN Wen-guang;RAO Yi-hua;LI Yun-cheng

..............page:65-68

Study of the oxidation resistance of CrNx hard coating
SUN Ai-xiang;ZHAO Guang-bin;ZHANG Xin-yuan;MENG Zhi-lin;LUAN Dao-cheng

..............page:32-34

Application of liquid ring pump in the production of ketene
SHEN De-zhi;BAO Zhong-xiang;SONG Wei-li;QUI Cong-guang;WANG Zheng-long

..............page:51-53

Dynamic balance calculation of the single-threaded and fixed pitch rotor in dry screw vacuum pump
GU Zhong-hua;ZHANG Shi-wei;ZHANG Zhi-jun

..............page:46-50

Experimental study of heat insulation TiN film deposited on large-area PET substrate by MF reactive magnetron sputtering
ZHAI Yu-tao;DAI Bin;WANG Jun-sheng;HAN Da-kai;WANG Zhi-an

..............page:40-45

Review on deposition of c-axis oriented AlN films by reactive magnetron sputtering
ZHOU Jian;ZHAO Kai;FENG Bin;JIN Hao;WANG De-miao

..............page:1-9

Numerical simulation of the effects of pressure, speed and type of quenching gas on the workpiece cooling performance in vacuum high-pressure gas quenching furnace
WANG Zhi-jian;SHANG Xiao-feng

..............page:76-80

Design of the vacuum toilet system for passenger train
CHU Xiang-qian;ZHU Wu;HE Lei

..............page:54-57

Effects of TiO2 buffer layers on the preparation and properties of W-doped VOx thermosensitive intelligent glass
LIU Tao;LI He-qin;LIU Dan;WU Da-wei;LV Xiao-qing;SONG Ze-run

..............page:21-24

di shi qi jiang bao mo yu biao mian ji shu ji chu
zhang yi chen

..............page:81-83

Effect of RF power on the photoelectric properties of amorphous silicon thin films
SHAN Xiu-wen;LEI Qing-song;XUE Jun-ming;YANG Rui-xia;AN Hui-jing;LI Guang

..............page:29-31

Leak detection for the vacuum system of carbon tube furnace
JIA Jia-lin;XIONG Xiao-mei;JI Ping;LI Gao-shan;YAN Guo;LI Cheng-shan

..............page:69-71

Preparation and properties of PEO-based composite polymer electrolyte thick films dispersed with BaTiO3
XIAO Yun-jun;ZHU Xiao-hong;ZHANG Kai-xin;XU Yun-hui;ZHANG Qiang;ZHU Jian-guo

..............page:10-14

Study of photoelectrical properties of ITO thin films prepared by magnetron sputtering
MA Wei-hong;CAI Chang-long

..............page:18-20

Effect of reaction temperature on carbon nanotubes
YUE Yu-chen;REN Wei;LI De-jun;ZHAO Meng-li;GUO Mei-xian;ZHANG Yi-teng;GU Han-qing

..............page:15-17