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Vacuum
1002-0322
2011 Issue 2
Study on testing method of Roots pump
WANG Xi-long;LUO Gen-song;ZHU Sai-sai;WANG Ling-ling
..............page:67-72
Research on PDMS-based multi-layer interconnection system for chip and electrodes
RUI Yue-feng;LIU Jing-quan;YANG Chun-sheng;HE Qing;LI Yi-gui
..............page:60-62
No.17:Fundamentals of film and surface technology
ZHANG Yi-chen
..............page:86-88
Effects of the acetic acid on the surface texture uniformity of textured AZO film
XUE Jin-kui;WANG Hai-yan;WANG Xin-xing;ZHANG Jia-chao;MU Hui-hui;YAO Ning;LI Shuang-yang;WANG Xing-yu
..............page:33-36
Structural analysis of ultra-thin DLC films deposited by FCVA
CHE Xiao-zhou;YIN Yun-fei;MA Hong-tao;LIU Fan-xin
..............page:28-32
Tungsten disulfide films deposited by magnetron sputtering and their properties
SONG Yu-bo;DAI Ming-jiang;YU Zhi-ming;WEI Chun-bei;HOU Hui-jun;XIAO Xiao-ling
..............page:25-27
Phase transition temperature of VO2 films prepared by thermal oxidation
ZENG Fu-qiang;YE Qin;ZHANG Jun-shuang;WANG Quan-kang;LI Shi-ping
..............page:22-24
Analysis of residual gas\' influence on laser gyro and selection of laser gyro getter
ZHAO Hong-chang;WANG Wen-lin;ZHANG Bin;XIAO Guang-zong
..............page:51-55
Preparation and applications of boron-doped diamond films
CHU Xiang-qian;ZHU Wu;ZUO Dun-wen
..............page:15-18
Simulation analysis of magnetic field of circular planar magnetron sputtering target by ANSYS
ZHANG Yi-chen;WANG De-zhi;LI Can-lun;WANG Wei
..............page:1-5
Study on N-type microcrystalline silicon film deposited on glass or stainless steel substrate
ZHENG Wen;CHEN Yong-sheng;LU Jing-xiao
..............page:40-43
Preparation and micro-patterning of bulk PZT thick films for piezoelectric micropower harvester
TANG Gang;LIU Jing-quan;YANG Chun-sheng;LIU He-sheng;LI Yi-gui
..............page:19-21
Numerial simulation of magnetic field of anode magnetic shielded Hall ion source
ZHAO Jie;WANG Shi-qing;LIU Jian;XU Li
..............page:63-66
Effects of working parameters of quadrupole mass spectrometer on calibration factor
CHEN Lian;CHEN Guang-qi;QIU Jia-wen;SUN Dong-hua
..............page:47-50
xin xi dong tai
..............page:9,14,32,43,46,59,66,72,75,82
Design of performance testing system of cryopumps for environment simulator
GUO Xin;SHAO Rong-ping;YAN Rong-xin
..............page:79-82
Power supply system of ion beam etching machine
CHEN Yuan-di;TAN Zhi-xin
..............page:56-59
Reforming a vacuum sputtering line by ultralow-temperature freezing process
LIU Xin;XU Bin;ZOU Yin-feng
..............page:76-78
Deposition of Al2O3 films by MF reactive magnetron sputtering with graded PLC closed-loop control of target voltage
CHI Hua-jing;WANG Shuang;ZHOU Xu;ZHANG shou-bin;CHEN Ge;ZHANG Qi-chu
..............page:10-14