High Power Laser and Particle Beams 2016 Issue 6 High-g dual-threshold MEMS inertial switch

High-g dual-threshold MEMS inertial switch
Zhou Zhijian;,Nie Weirong;,Xi Zhanwen;,Wang Xiaofeng;,Luo Qiao;

..............page:23-28

Calculus-like analysis method for analyzing bulk acoustic wave force sensors’sensitivity
Gao Yang;,Zhao Kunli;,Zhao Junwu;

..............page:064101-1-064101-7

Rigorous electromagnetic field model based on waveguide method for 3D thick resist lithography simulation
Wang Yuxin;,Zhou Zaifa;,Hua Jie;,Wang Fei;,Xu Huanwen;,Huang Qing’an;

..............page:064102-1-064102-5

Feasibility of MEMS vector hydrophone application in submerged buoy system
Han Jianjun;,Zhang Guojun;,Zhang Wendong;,Guo Jing;,Liu Yuan;

..............page:064103-1-064103-5

Integral algorithm design in sliding mode controller of MEMS gyroscope
Tian Ying;,Chen Li;,Chen Danhua;,Wang Yayun;

..............page:064104-1-064104-5

Micro-opto-electro-mechanical systems mirror based on electrostatic repulsive circular rotation actuator
Ma Wenying;,Wei Yaohua;,Wang Weimin;,Wang Qiang;

..............page:064106-1-064106-5

Effect of loading potential variation on direct methanol fuel cell anode performance
Huang Naibao;,Li Wan;,Liang Chenghao;,Xu Lishuang;,Wang Xiaoye;,Sun Tianhang;,Sun Min;

..............page:064107-1-064107-7

Cooperative multi-physics simulation on self-heating effect of capacitive RF MEMS switch
Gao Yang;,Li Junru;

..............page:064108-1-064108-5

Optimization of silicon etching process using response surface method
Fu Wenting;,Liang Qiao;,Cui Kefu;,Shi Tianli;,Zhang Na;,Zheng Dongming;,Tang Hui;,Sun Haiwei;

..............page:064109-1-064109-5

Development of IFOG assembly quality control system using minitype endoscope
Liu Haoting;,Ma Yuzhou;,Wang Wei;,Yan Beibei;,Shan Lianjie;,Yu Wenpeng;

..............page:064110-1-064110-6

Improvement of microfluidic chip mould thickness uniformity by ultrasonic agitation during electroforming process
Du Liqun;,Yang Tong;,Zhao Ming;,Tao Yousheng;,Luo Lei;,Wang Lei;,Liu Chong;

..............page:064111-1-064111-5

Fabrication of micro piezoelectric energy harvester using eutectic bonding and polishing technology
Li Yigui;,Yan Ping;,Huang Yuan;,Sugiyama Susumu;

..............page:064112-1-064112-5

Automatic measurement for pressure resistance of microspheres
Dai Changsheng;,Rong Weibin;,Sun Lining;

..............page:064113-1-064113-6

A calibration and compensation method for piezoresistive atmosphere pressure sensor
Du Lidong;,Zhou Xiaoyu;,Wei Kejing;,Zhao Zhan;,Fang Zhen;,Sun Xuejin;

..............page:064114-1-064114-5

Multifunction sensor for pressure and acceleration measurements based on nano-polysilicon thin film resistors
Mu Ailin;,Zhao Xiaofeng;,Li Baozeng;,Wen Dianzhong;,Wu Yalin;

..............page:064115-1-064115-7

Enhanced electrochemical performance of laser scribed graphene films incorporating poly(3,4-ethylenedioxythiophene)nanoparticles
Chen Yan;,Xu Jianhua;,Yang Yajie;,Xu Lu;,Mao Xiling;,Yang Wenyao;,Zhao Yuetao;

..............page:064116-1-064116-6

Investigations of water droplet formation on conical micromanipulation probe at microscale
Fan Zenghua;,Rong Weibin;,Wang Lefeng;

..............page:064117-1-064117-5

Impacting dynamics of ultraviolet induced nanoparticle colloid microjet
Song Xiaozong;,Zhou Youxin;

..............page:064118-1-064118-6

Temperature-frequency characteristics of quartz tuning fork for temperature sensing
Xu Jun;,Liu Chunhua;,Ma Jing;,Li Xin;

..............page:064119-1-064119-6

Encapsulation of nano-silica particles by polystyrene with dispersion polymerization
Zhang Kai;,Ma Yan;,Fan Jinghui;

..............page:064120-1-064120-6

Numerical analysis of anchor mode effect in elliptic mode MEMS ring resonator
Xiong Zhuang;,Yang He;,Yuan Mingquan;

..............page:064121-1-064121-4

Fabrication of micro packed gas chromatography column for gas analysis
Ning Zhanwu;,Sun Jianhai;,Zhang Yanni;,Liu Jinhua;,Zhu Xiaofeng;,Ma Tianjun;,Chen Zhenhai;

..............page:064122-1-064122-4

Effects of fabrication error on thermal drift of capacitive micro accelerometer
Peng Peng;,Peng Bei;,Zhou Wu;,Yu Huijun;,Qu Hao;,He Xiaoping;

..............page:064123-1-064123-4

Influence of SU-8 removal process on mechanical properties of electrodeposited nickel
li jian hua ;, fu bo ;, ou xiu long ;

..............page:064124-1-064124-5

Crosslinked micrometer-sized polystyrene microspheres reference material
Fan Jinghui;,Wu Juying;,Ma Yan;

..............page:064125-1-064125-4

Heat transfer performance of microchannels in LTCC substrate
Hu Duwei;,Miao Min;,Fang Runiu;,Cui Xiaole;,Jin Yufeng;

..............page:064126-1-064126-5

Design of high-efficiency scanning grating mirror for near-infrared micro-spectrometer
Yang Tingyan;,Wen Zhiyu;,Zhou Ying;

..............page:064127-1-064127-6

Analysis of terahertz wave atmospheric propagation and communication capacity for nanonetwork applications
Wang Yuwen;,Dong Zhiwei;,Li Hanyu;,Zhou Xun;

..............page:064128-1-064128-7

Design and analysis of giant magnetostrictive material transducer with bow type structure
Li Dongwei;,Yang Zhaoshu;,Xue Guangming;

..............page:064129-1-064129-6

A differential resonant pressure micro sensor with identical sensitivity of two resonant beams
Xing Yonghao;,Xie Bo;,Chen Jian;,Chen Deyong;,Wang Junbo;

..............page:064130-1-064130-6

Elastic stopper design for MEMS device under shock environment
Jiang Tao;,Sun Lin;,Liu Guangjun;

..............page:064131-1-064131-6

Photoelectrocatalytic digestion of total phosphorous utilizing TiO2 nanotubes fabricated by anodic oxidation
Hou Jiahong;,Tong Jianhua;,Bian Chao;,Zhang Jiangang;,Xia Shanhong;

..............page:064132-1-064132-4

Method for extracting parameters of performance model of thin film bulk acoustic wave resonator
Cai Xun;,Gao Yang;,Huang Zhenhua;

..............page:064133-1-064133-5

Influence of ultraviolet irradiation on dielectric properties of polyetherimide film
Li Lin;,Cheng Min;,Liu Wenyuan;,Ke Changfeng;,Duan Li;,Fu Hongmei;,Guo Pingwen;

..............page:064134-1-064134-5