Pupil Shaping Techniques in High Resolution Projection Exposure Tools
Hu Zhonghua1;2 Yang Baoxi1 Zhu Jing1 Xiao Yanfeng1;2 Zeng Aijun1Huang Lihua1 Zhao Yongkai1 Huang Huijie11Laboratory of Information Optics and Optoelectronic Technology;Shanghai Institute of Optics andFine Mechanics;Chinese Academy of Sciences;Shanghai 201800;China2Graduate University of Chinese Academy of Sciences;Beijing 100049;China
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Research Progress of Chalcogenide Glass Waveguide
Chen Yu1 Shen Xiang1 Xu Tiefeng1 Zhang Wei1 Chen Fen1 Li Jun1Song Bao′an1 Dai Shixun1 Nie Qiuhua1 Wang Zhanshan21College of Information Science and Engineering;Ningbo University;Ningbo;Zhejiang 315211;China2Department of Physics;Tongji University;Shanghai 200092;China
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