Transducer and Microsystem Technologies 2001 Issue 1 A silicon capacitive acceleration sensor made in micromachining technology

Journals A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

Transducer and Microsystem Technologies
1000-9787
2001 Issue 1

A silicon capacitive acceleration sensor made in micromachining technology
LI Yue-jin;YANG Yin-tang;ZHU Zuo-yun;MA Xiao-hua;CHEN Jin-du

..............page:57-59

Developing status and trend of MEMS technology
LIU Guang-Hui;KANG Chun-mei

..............page:52-56

..............page:50-51

..............page:48-49

Single-track overload sensor of thick-film hybrid integration
SUN Hui-ming;YU Quan;GUO Hong-wei;FAN Mao-jun

..............page:45-47

Data analysis of transducer based on fuzzy reasoning error model
SONG Guo-min;ZHANG Wei-gong;ZHAI Yu-jian

..............page:42-44

Consensus measurement　in micro-inertial sensors
ZHANG Hao;TONG Tiao-sheng;ZHANG Fan;LIU Hong-li

..............page:40-41

..............page:37-39

..............page:34-36

High Tc DC-SQUIDs　with silicon bicrystal junctions
QI Han-hong;WEI Yan-jun;WANG Tian-sheng;TIAN Yong-jun

..............page:31-33

A new magneto-sensitive integrated angular sensor and its measurement system
LAI Zong-sheng;CAI Yan;ZHENG Xue-jun;HE De-hong;ZHENG Xiao-li

..............page:28-30

..............page:26-27

..............page:23-25

Study on H2S gas sensor of WO3-ZnS nanosized material
HUANG Shi-zheng;LIN Wei;CHEN Wei;Chen Zhi-Qian

..............page:21-22

Research for an intelligent double-axis tilt sensor
WANG Jin-song;WANG Qi;ZHAO Jia-long

..............page:18-20

..............page:16-17

A method for target-recognition by a multisensor
LI Zheng-dong;HE Wu-liang;CHEN Xing-wu

..............page:14-15

Study on the humidity sensors based on sulfide material
ZHAO Zhi-yong;ZHANG Tong;REN Hui;XU Bao-kun;XU Wei;CHEN Hong-qi;QUAN Bao-fu

..............page:10-13

..............page:7-9

Development of DNA biosensor
HUANG Zhi-wei;HUANG Chen

..............page:4-6

..............page:1-3