Vacuum Science and Technology 2011 Issue 4 Simulation of RF Impedance Matching of Magnetron Sputtering Based on Genetic Algorithm

Simulation of RF Impedance Matching of Magnetron Sputtering Based on Genetic Algorithm
Wang Hongbo;Huang Wen;Chen Changqi

..............page:500-504

Production of 5N Copper by Directional Solidification and Electron Beam Refining
Chen Jie;Fu Yabo;Liu Ning;Lu Yiping;Li Tingju

..............page:495-499

Parasitic-Mode-Suppression in TM₃₁₀-Mode Coaxial Resonator of Multiple-Beam Klystron
Han Huipeng1;2;Wang Yong1;Zhang Rui2

..............page:413-418

Growth of Aluminum Electrode and Alumina Dielectric Layer for Plasma Display Panel
Liu Qifa;Wang Yan;Wang Hong;Ding Guifu

..............page:419-423

Oxidation Resistance of Novel Ag-Based Cr/Cu/Ag/Cu/Cr Composite Film Electrodes
Weng Weixiang;Jia Zhen;Yu Guanglong;Li Yu;Guo Tailiang

..............page:381-385

Design of Plasma Source Dedicated to Active Protection from Space Radiation
Jia Xianghong1;2;Xu Feng2;Wan Jun1;Jia Shaoxia1;Wang Shouguo1

..............page:481-484

Energy Efficiency Evaluation of Water-Ring Vacuum Pumps
Xu Fajian;Lei Chundong;Liu Baoxin;Sun Meng

..............page:449-452

Localized Pumping and Wall-Thickness Uniformity of Hollow Industrial Work-Piece Produced by Extrusion Blow Molding
Huang Hong1;Wang Xuanlun1;Dai Bing1;Wang Haimin2;Li Nengwen1Co.;Ltd.;Dongguan 523187;China)

..............page:505-509

Latest Development of Heat Dissipation of Slow-Wave Structure in Helix Traveling Wave Tube
Liu Yanwen;Han Yong;Liu Pukun;Zhang Lianzheng;Lu Yuxin

..............page:424-434

Diagnosis of Glow Discharge Plasma with Langmuir Probe inGrowth of Magnetron Sputtered a-Si:H Film
Li Hongtao1;Jiang Bailing1;Yang Bo1;Cao Zheng1;Guo Weihua2;Jiao Dongmao1

..............page:476-480

Analysis in Small Signal Theory of Traveling-Wave-Tube with Negative-Positive Phase Velocity Tapering Slow-Wave Structure
Yi Hongxia1;2;Liu Pukun1;Xiao Liu1;Hao Baoliang1;2;Li Fei1;2

..............page:406-412

Quantum Efficiencies of Transmission-Mode GaN Photocathode under Front and Back Illumination
Du Xiaoqing;Zhong Guangming;Tian Jian

..............page:397-401

Surface Modification of Cast Titanium Used as Denture Framework
Tong Yu1;Guo Tianwen1;Wang Jing1;Liang Haifeng2;Mi Qian2

..............page:402-405

Impacts of Growth Conditions on Microstructures and Mechanical Properties of ZrB₂/AlN Multilayers
Gong Jie;Liu Mengyan;Wang Haiyuan;Xue Fengying;Yan Jingyue;Zhang Shuai;Wang Hui;Li Dejun

..............page:453-458

Development of Repetitive Pellet Injector with Screw Extruder in HL-2A TOKAMAK
Xu Hongbing;Liu Dequan;Zhu Genliang;Wang Mingjian

..............page:510-513

Growth and Optical Properties of Pulsed Laser Deposited SnS Films
Li Lili1;Liang Qi1;Shi Chengwu2;Kong Mingguang3;Li Bing2

..............page:386-392

Growth of CrN Films by Plasma Ion Implantation & Deposition Based on High Power Pulsed Magnetron Discharge
Wu Zhongzhen;Tian Xiubo;Wang Zeming;Gong Chunzhi;Yang Shiqin

..............page:459-464

Possible Reaction Paths of Silica in Vacuum Extraction of Aluminum by Fluoridization
Li Qiuxia1;2;Liu Yongcheng2;Jin Bi1;Yang Bin1;Dai Yongnian1

..............page:490-494

Influence of O₂/Ar Flow Ratio on Microstructures and Photoluminescence of ZnO Films
Wang Xiaoxiao1;Xia Qiping1;Lü Jianguo1;2;Song Xueping1;Sun Zhaoqi1

..............page:393-396

Newly-Developed Power Supply Control Unit for Plasma Generator of Neutral Beam Injector
Chen Changqi1;Wang Gensheng1;Liu Zhimin2;Song Shihua2

..............page:440-443

zhen kong ke xue yu ji shu xue bao zheng gao shuo ming

..............page:514

Behavior of Fe₂O₃ in Al Extraction by Alumina Carbothermic Reduction-Chlorination in Vacuum
Zhu Fulong1;2;Yu Qingchun1;Yang Bin1;Yuan Haibin1;Xu Baoqiang1;Dai Yongnian1

..............page:485-489

Growth and On-Line Stress Evaluation of TiO₂ and SiO₂ Films
Leng Jian1;Xue Wei1;Yu Zhinong1;Lu Weiqiang1;Wang Huaqing2;Zhang Dongpu1

..............page:465-469

Mechanism Analysis and Simulation of Vacuum Agitating Deaeration of High Viscosity Liquids
Liu Xiaobo1;Zhang Jianrun1;Li Pu1;Wang Xinhua2

..............page:444-448

Measurement of Extremely Low Gas Flow
Li Detian;Feng Yan;Cheng Yongjun;Zhang Dixin;Guo Meiru

..............page:435-439

Dynamical Simulation of Modification of Inner Surfaces of Square Tubes by Plasma Ion Implantation
Wang Zhijian1;Tian Xiubo1;Gong Chunzhi1;Yang Shiqin1;Ricky Fu2

..............page:470-475