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Vacuum Science and Technology
0253-9748
2007 Issue 6
Molecular Dynamics Simulation of Growth of Diamond-Like Carbon Films
zhang yujun*; dong guangneng; mao junhong; zeng qunfeng and xie youbai theory of lubrication and bearing institute; modern design and rotor-bearing key laboratory of education ministry; xi an jiaotong university; xi an 710049; china
..............page:455-459
Progress in Discharge Plasma Simulation of Planar DC Magnetron Sputtering
qiu qingquan1; li qingfu1*; su jingjing1; jiao yu2; finely jim2 1.school of electrical engeneering; xi an jiaotong university; xi an 710049; china; 2.ppg glass r&d center; pittsburgh; pennsylvania; 15238; usa
..............page:493-499
Hydrogen-Induced Optical and Electric Changes in Thin Films of Transition Metals
fang fang; zhang jing; zhu jian; zheng shiyou; chen guorong; sun dalin* (department of materials science; fudan university; shanghai 200433; china)
..............page:485-492
Synthesis and Characterization of Al-N Codoped Zn_(1-x)Mg_xO Thin Films
gao guohua; ye zhizhen*; jian zhongxiang; lu yangfan; hu shaohua and zhao binghui (state key laboratory of silicon materials; zhejiang university; hangzhou 310027; china)
..............page:471-474
Electron Energy Loss Spectroscopy Study of a-C/Ta-C and Al/AlN Multilayers
xiao xiaoling1*; dai mingjiang1; zhou kesong1; liu min1; d.g.mcculloch2; p.c.t.ha3; d.r.mckenzie3; m.m.m.bilek3 1.guangzhou research institute of non-ferrous metals; guangzhou; 510651; china; 2.applied physics; school of applied sciences; rmit university; city campus; g.p.o.box 2476v; melbourne 3001 victoria; australia; 3.applied and plasma physics; school of physics(a28); university of sydney; sydney 2006 new south wales; australia
..............page:540-544
Vacuum System Design of Transport Line in Shanghai Synchrotron Radiation Facility
zhang haiou*; wang zhishan (shanghai institute of applied physics; shanghai 201800; china)
..............page:553-556
Study of the Charging Compensation on the Al_2O_3 under Heating
wang li1; fu jingyong1; ji yuan1*; zhang yinqi1; xu xuedong1; qian pengxiang2 (1.beijing university of technology; institute of microstructure and property of advanced materials; beijing 100022; china; 2.state key lab of high performance ceramics and super-fine microstructures; shanghai institute of ceramics; chinese academy of sciences; shanghai 200050; china)
..............page:531-534
Radiant Heat Loss Reduction fo Cathode-Filament Module
bao jixiu*; wang peijun; wan baofei (institute of electronic beams and vacuum technology; shanghai jiaotong university; shanghai; 200030; china)
..............page:522-525,530
Microstructures and Stoichiometries of Magnetron Sputtered Co Films
lin xiaoping1*; he lijing1; li xiaohui2; wang xiaodong1 1.school of material science and engineering; hebei university of technology; tianjin 300130; china; 2.college of science; hebei university of technology; tianjin; 300130; china
..............page:504-507
Measurement of Internal Stresses in Hard Films Grown on Metal Substrate
huang bilong; wu ying; dai jiawei; li geyang* (state key laboratory of metal matrix composite; shanghai jiao tong university; shanghai 200030; china)
..............page:545-548
Theoretical and Experimental Studies of Vacuum Cooling of Liquids
dai jianxia; zuo ran* (school of energy and power engineering; jiangsu university; zhenjiang 212013; china)
..............page:549-552
Cw-Cavity Ring-Down Spectroscopy for in Situ Quantitative Measurements of HO_2 Radicals in Dielectric Barrier Discharge Plasmas
liu zhongwei1; xu yong1; 2*; yang xuefeng1; 2; zhao guoli1; wang weiguo1; zhu aimin1; 2 (1.laboratory of plasma physical chemistry; dalian university of technology; dalian 116024; china; 2.state key laboratory of material modification by ion; electron; and laser beams; dalian university of technology; dalian 116024; china)
..............page:535-539
Growth of Poly-Crystalline Si Films on Flexible Substrate by Hot Wire Chemical Vapor Deposition
chang yan; chen guanbi; wang lei; yang deren* (state key lab of silicon materials and department of materials science and engineering; zhejiang university; hangzhou 310027; china)
..............page:475-478
Highly Orientated Al Film Grown on LiNbO_3 by Ion Beam Assisted Deposition
gu yu; zeng fei; gao yang and pan feng (laboratory of advanced materials; department of materials science and engineering; tsinghua university; beijing 100084; china)
..............page:500-503
Effect of Pulsed Bias on TiN Film Deposition on Internal Wall of Deep Tubes by Arc Ion Plating
shi changlun; zhang min; lin guoqiang* state key laboratory of materials modification by laser; ion and electron beams; dalian university of technology; dalian 116024; china
..............page:517-521
Growth and Properties of Transparent Conductive ZnO∶Al Films by Magnetron Sputtering at Low Temperature
wang tao1; diao xungang1*; ding peng1; shu yuanjie2; wu zhe3 1.school of science; beihang university; beijing 100083; china; 2.institute of chemical materials; caep; mianyang 621900; china; 3.school of aeronautic science and technology; beihang university; beijing 100083; china
..............page:511-516
Photoluminescence of Cu or Mn Doped Amorphous AlN films
ba dechun1*; tong hongbo1; 2; wen lishi3 1.school of mechanical engineering & automation; northeastern university; shenyang 110004; china; 2.school of mechanical engineering; liaoning shihua university; fushun 113001; china; 3.institute of metal research; chinese academy of science; shenyang 110016; china
..............page:508-510
Kinetic Model of Al_2O_3 Nano-Particle Growth by RF-Plasma Chemical Vapor Deposition
wang junwen (college of chemistry and chemical engineering; taiyuan university of technology; taiyuan; 030024; china)
..............page:467-470
Optical and Electrical Properties of CdIn_2O_4 Thin Films Prepared by DC Reactive Magnetron Sputtering
yang fengfan1; 2; fang liang2; 3*; sun jiansheng1; xu qintao1; wu suyou1; zhang shufang2 and dong jianxin2 1.institute 53 of china s ordnance industry group; jinan 250031; china; 2.department of applied physics; chongqing university; chongqing 400044; china; 3.key laboratory of optoelectronic technology and systems of the education ministry of china; chongqing university; chongqing 400044; china
..............page:460-466
Synthesization of ZrN Films by Inductively Coupled Plasma Assisted RF Magnetron Sputtering
liu feng; meng yuedong*; ren zhaoxing; shen keming; shu xingsheng (institute of plasma physics; chinese academy of sciences; hefei 230031)
..............page:526-530
Growth Conditions and Properties of Magnetron Sputtered TiO_2 Films
zhang wenjie1; 2*; yang lili1; 3; li ying2; zhu shenglong2; and wang fuhui2 1.school of environmental and chemical engineering; shenyang ligong university; shenyang 110168; china; 2.institute of metal research; the chinese academy of sciences; shenyang 110016; china; 3.school of resources & civil engineering; northeastern university; shenyang 110006; china
..............page:479-484