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Vacuum Science and Technology
0253-9748
2007 Issue 3
Fabrication of Nb-doped Pb(Zr,Ti)O_3 Ferroelectric Capacitors on Si with Ti-Al Barrier
liu baoting1; ma liang2; bian fang1; yan xiaobing1; zhang xin1; zhao qingxun1 and yan zheng11.college of physics science & technology; hebei university; baoding 071002; 2.college of electronic and informational engineering; hebei university; baoding 071002
..............page:177-180
Laser Damages and Two Diamond-Like Carbon Growth Techniques
xu junqi; su junhong; xie songlin and liang haifeng(school of optoelectronic engineering; xi an technological university; xi an 710032; china)
..............page:181-184
Fabrication of Field Emitter Array with Dry Etching
wei wei; zhou hongjun; xu xiangdong; fu shaojun; wang yong; pei yuanji(national synchrotron radiation laboratory; ustc; hefei 230029; china)
..............page:218-221
Growth of Plasma Polymerized Maleic Anhydride Films by Pulsed Dielectric Barrier Discharge
tang wenjie; chen qiang; zhang yuefei and ge yuanjing(laboratory of plasma physics and materials; beijing institute of graphic communication; beijing 102600; china)
..............page:246-249
Optimization of Signal Processing in Dual-Light Beams Film Thickness Monitoring System
xu shijun1; 2; ren xiaoling3(1.department of mathematics & physics; xi an technological university; xi an 710032; china; 2.school of science; xi an jiaotong university; xi an 710049; china; 3.school of computer; xi an polytechnic university; xi an 710048; china)
..............page:230-235
Electronic Structures of Titanium Oxide Films Grown by Dynamic Ion Beam Mixing
zhan changyong; du jifu and huang ningkangkey laboratory of radiation physics and technology of education ministry of china; institute of nuclear science and technology; sichuan university; chengdu 610064; china
..............page:241-245
Imperfect Boundaries:Thermal Simulation of Heater-Cathode Assembly
hu taikang1; 2; yu shiji1; ding yaogen1 and meng mingfeng11.institute of electronics; chinese academy of sciences; beijing 100080; china; 2.graduate school of the chinese academy of sciences; beijing; 100039; china
..............page:208-212
Microstructures and Stoichiometries of Indium-Tin-Oxide Films
cai qi1; cao chunbin2; jiang xishun3; song xueping1 and sun zhaoqi11.school of physics and material science; anhui university; hefei 230039; china; 2.school of science; anhui agricultural university; hefei 230036; china; 3.department of electronics and information engineering; chuzhou college; chuzhou 239012; china
..............page:195-199
Diagnosis of Low-Pressure Methane Plasma by Optical Emission Spectroscopy
luo lixia1; 2; wu weidong1; 2; sun weiguo1; tang yongjian2 and zhu yonghong1; 21.institute of atomic and molecular physics; sichuan university; chengdu 610065; china; 2.research center of laser fusion; caep; p.o.box 919-987; mianyang 610065; china
..............page:203-207
Study on Sheet Beam Klystron Electron Optics System in Uniform Magnetic Field
wang shuzhong; wang yong; yang jinghua; ding yaogen and ruan cunjun(institute of electronics; chinese academy of sciences; beijing 100080; china)
..............page:226-229
Electromagnetic Shielding Fabrics with Magnetron Sputtered Copper Coating
chen wenxing; du lijuan; yao yuyuan and lu shenshui key laboratory of advanced textile materials and manufacturing technology; ministry of education; zhejiang sci-tech university; hangzhou 310018; china
..............page:264-268
Microstructures and Properties of Tantalum Film Grown by DC Magnetron Sputtering
cui jiangtao1; liu xiangli2; tian xiubo1; 3; hu xindong1 and yang shiqin1; 31.state key laboratory of advanced welding production technology; harbin institute of technology; harbin 150001; china; 2.shenzhen graduate school; harbin institute of technology; shenzhen 518055; china; 3.shenzhen key lab.of composite materials; shenzhen-tech-innovation international; shenzhen 518057; china
..............page:259-263
Growth of Microcrystalline Silicon Films by RF Plasma Enhanced Chemical Vapor Deposition
yang gen; gu jinhua; lu jingxiao; chen yongsheng; zhang liwei; wu fang; wang changzhou and li hongju(key laboratory of materials physics of ministry of education; zhengzhou university; zhengzhou 450052; china)
..............page:250-253
Simulation and Design of Magnetic Fluid Sealing Devices
sun mingli; li decai; he xinzhi and hao ruican(school of mechanical; electronic and control engineering; beijing jiaotong university; beijing 100044; china)
..............page:269-272
Electrophoretic Deposition and Field Emission Characteristics of Patterned Carbon Nanotube Cathode
lu wenhui1; 2; song hang1; jin yixin1; zhao hui1; 2; zhao haifeng1; li zhiming1; jiang hong1; miao guoqing1 and liu naikang11.key laboratory of excited state processes; changchun institute of optics; fine mechanics and physics; chinese academy of sciences; changchun 130033; china; 2.graduate school of the chinese academy of sciences; beijing 100039; china
..............page:213-217
Dynamic Dielectric Recovery Characteristics of Vacuum Circuit-Breakers with Double-Break
liao minfu; duan xiongying and zou jiyan(dept.of electrical and electronic engineering; dalian university of technology; dalian 116024; china)
..............page:190-194
Feeding Capacity Modeling for Superalloy Vacuum-Electromagnetic Casting and Its Applications
jin wenzhong; li tingju and yin guomaostate key laboratory of materials modification & school of materials science and engineering; dalian university of technology; dalian 116024; china
..............page:185-189
Microstructures of Intrinsic nc-Si:H Films
liu xuwei; gao xiaoyong; zhao jiantao; yang shie; chen yongsheng; gu jinhua and lu jingxiao(the key lab of materials physics of ministry of education; zhengzhou university; zhengzhou 450052; china)
..............page:200-202
Growth and Optical Properties of Fluorinated Diamond-Like Carbon Films
xiao jianrong1; 2; xu hui1; zhang deheng1 and ma songshan11.school of physics science and technology; central south university; changsha; 410083; china; 2.department of physics and math; guilin university of technology; guilin; 541004; china
..............page:236-240
Low Temperature Desorption and Activation of GaAs Photocathode
zou jijun1; 2; gao pin1; yang zhi1 and chang benkang11.institute of electronic engineering and opto-electronic technology; nanjing university of science and technology; nanjing 210094; china; 2.department of electronic engineering; east china institute of technology; fuzhou 344000; china
..............page:222-225
Influence of Sputtering Power on Microstructures of TiO_2 Films
liu guiang; yang guijin; zheng feisheng(department of physics; zhanjiang normal university; zhanjiang; guangdong; 524048; china)
..............page:254-258