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Vacuum Science and Technology
0253-9748
2006 Issue 6
Inductively Coupled Plasma Etching of 4H-SiC in Cl_2+A_r Mixture
jia hujun~*; yang yintang; chai changchun and li yuejin(key laboratory of ministry of edu.for wide band gap semiconductor materials and devices; xidian university; xi an 710071; china)
..............page:500-503
Generation and Calculation of Intense Electron Beam with Micro-Spot Size
guo xiaoli~*; tang tiantong; kang yongfeng and ren yan(key lab of electronic physics and device of ministry of educations; xi an jiaotong university; xi an; 710049; china)
..............page:435-440
Study of Discharge Process for Different Plasma Display Panel Structures
tu yan; jiang youyan; cui wei; zhang xiong and wang baoping(collage of electronics science & engineering; southeast university; nanjing 210018; china)
..............page:429-434
Molecular Dynamics Simulation of Gd Adatom Diffusion on Cu Low Index Surfaces
xie guofeng~(*1) and chen nanxian~21.faculty of material and photoelectronic physics; xiangtan university; xiangtan; 411105; china; 2.department of applied physics; tsinghua university; beijing; 100084; china
..............page:451-454
Study on Selective Absorber Coatings of Cr/Cr_2O_3 Cermet Deposited by DC Magnetron Sputtering
pan yongqiang~(*1; 2); y.yin~2(1.school of opto-electronic engineering; xi an technological university; xi an 710032; china; 2.school of physics; the university of sydney; nsw 2006; australia)
..............page:517-521
In Situ RHEED Monitored Growth of Epitaxial LaAlO_3/BaTiO_3/SrTiO_3 Tricolor Superlattices by Laser Molecular Beam Epitaxy
qin wenfeng~*; xiong jie; zhu jun; tang jinlong; zhang ying; luo wenbo; li yanrong(school of microelectronics and solid-state electronics; university of electronics science and technology of china; chengdu 610054; china)
..............page:508-511
Study of CrAlN Deposited by Pulsed Bias Arc Ion Plating
lu guoying and lin guoqiang~*(state key laboratory of materials modification by laser; ion and electron beams; dalian university of technology; dalian 116024; china)
..............page:441-445
Microstructure and Photoluminescence Properties of ZnO Thin Films Prepared by Pulsed Laser Deposition
sun bai; zou chongwen; liu zhongliang; xu pengshou~*; zhang guobin and wei shiqiang(national synchrotron radiation laboratory; university of science and technology of china; hefei 230029; china)
..............page:446-450
Study of Sintering Mechanism and Characteristics of ZBO Target
hou tianya~*; zhang gong; zhuang daming(department of mechanical engineering; tsinghua university; beijing 100084; china)
..............page:504-507
Review on Highly Reflecting Mirrors for Vacuum Ultraviolet and X-ray
gan shuyi~(1; 2); xu xiangdong~1; hong yilin~1; liu yin~1 and fu shaojun~(1*)1.national synchrotron radiation laboratory; ustc; hefei 230029; china; 2.dept.of mechanical and automobile engineering; hefei university of technology 230009; china
..............page:459-468
In-Situ Growth of ZnO Nano-Wire with Environmental Scanning Electron Microscope
tian yanbao; ji yuan~*; fu jingyong; zhang yinqi; quan xueling; zhang yuefei; zheng shanliang and han xiaodong(institute of microstructure and property of advanced materials; beijing university of technology; beijing; 100022; china)
..............page:487-490
Time Evolution of Water Vapor Temperature in Vacuum Cooling
lin meiying~*; chen ertong; zhou bing and xu bo(institute of cryobiology and food freezing; shanghai university of science and technology; shanghai 200093; china)
..............page:530-532
Laser Damage Characteristics of Diamond-Like Carbon Film
xie songlin; su junhong~* and xu junqi(school of optoelectronic; xi an technological university; xi an; 710032; china)
..............page:533-536
Latest Progress in Fabrication of Ultraviolet Detectors with Diamond Films Grown by Chemical Vapor Deposition
ma ying; wang linjun~*; liu jianmin; lou yanyan and xia yiben (school of materials science and engineering; shanghai university; shanghai 20072; china)
..............page:475-481
Influence of Transition Layers on Adhesion at Interface of Hydrogenated Amorphous Carbon Film and Stainless Steel Substrate
lin zeng~(1; 2*) and ba dechun~11.northeastern university; shenyang; 110004; china; 2.state key laboratory of plastic forming simulation and die & mould technology; wuhan; 430074; china
..............page:491-493
Applications of Freeze-Drying Technology in Development of Advanced Materials
jiang yabao; nie zuoren~*; xi xiaoli; tong peiyun; zhai lili; zou jingxia; song shunlin(college of materials science and engineering; beijing university of technology; beijing; 100022; china)
..............page:469-474
Dielectric and Ferroelectric Characteristics of (Pb_(1-x)Sr_x)TiO_3 Thin Films Prepared by Magnetron Sputtering
wang maoxiang~(1*) and sun pin~21.school of management and engineering; nanjing university; nanjing 210093; china; 2.university of toronto; toronto; m5sin4; canada
..............page:522-525
Humid Blocking of SiO_x films Grown by RF Plasma Enhanced Chemical Vapor Deposition
han erli~*; chen qiang and ge yuanjing(laboratory of plasma physics and material.beijing institute of graphic communication; beijing; 102600; china)
..............page:482-486
Experimental Study on the Braced Stress of the Vacuum Glazing
zhang ruihong~(1*); gao jian-he~1; gu xiang~1 and zhang hua~1(school of mechanical engineering; yangzhou university; yangzhou; 225009; china; )
..............page:455-458
Influence of Nickel Modification Layers on Gas Sensitivity of SnO_2-Based Gas Sensors
wang lei; du jun~*; mao changhui and yang zhimin (advanced electronic materials of institute; general research institute for nonferrous metals; beijing 100088; china)
..............page:512-516
XRD and XPS Study of La_(0.5)Sr_(0.5)CoO_(3-δ) Film Grown by Ion-Beam Sputtering
zhu zhiqiang; ding tiezhu~*; zhang liwen; wang qiang and zhao qian(department of physics; college of sciences and technology; inner mongolia university; hohhot 010021; china)
..............page:494-499
Influence of C Content on Chemical Structure and Properties of Silicon Carbonitride Film
piao yong; xu jun~*; gao peng; ding wanyu; lu wenqi; ma tengcai(state key laboratory of material modification by laser; ion and electron beams; dalian university of technology; dalian 116024; china)
..............page:526-529