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Vacuum Science and Technology
0253-9748
2006 Issue 3
Fabrication of High Efficiency M-type Cathode Assembly Used in Space Traveling-Wave Tube
liu yanwen~*; liu shenying; tian hong; zhang mingchen; xu zhenying; meng mingfeng and zhang honglai (the institute of electronic; chinese academy of science; beijing; 100080; china)
..............page:240-242
Study of High Quality Hydrophobic Fluorocarbon Polymer Films Grown by Inductive Coupled Plasma Chemical Vapor Deposition
yue ruifeng~*; zeng xuefeng; wu jiangang; kang ming and liu litian (institute of microelectronics; tsinghua university; beijing; 100084; china)
..............page:168-171
Etching of Sapphire with Inductively Coupled Plasma of Cl_2/BCl_3
song yingping; guo xia; ai weiwei; dong limin and shen guangdi~* (optoelectric lab; beijing university of technology; beijing; 100022; china)
..............page:243-246
Microstructures and Mechanical Properties of Zr-Si-N Films Prepared by Reactive Sputtering
liu yan~1; dong yunshan~1; huang jiazhen~2; zhang lizhong~2 and li geyang~(1*) 1.state key lab of metal matrix composites; shanghai jiaotong university; shanghai; 200030; china; 2.analysis and research center; east china university of science and technology; shanghai; 200237; china
..............page:200-203
Equivalent Circuit and Quantitative Characterization of Plasma Load in Pulsed-Bias Arc Ion Plating
qi dong~(1*); wang ninghui~1; lin guoqiang~2 and dong chuang~2 1.department of electrical and electronics engineering; dalian univ.of technol.; dalian; 116024; china; 2.state key laboratory for materials modification by laser; ion and electron beams; dalian univ.of technol; dalian; 116024; china
..............page:176-180
Electron Temperature of Hollow-Cathode N~(2+) Discharge Plasma
kui xiaoyun~(1*); wang jianzhong~1; liu yanping~1; yu jinyong~(1; 2); gao yuan~1 and xu zhong~1 1.taiyuan university of technology; research institute of surface engineering; taiyuan; 030024; china; 2.guiling university of electronic technology; guilin; 510014; china
..............page:223-227
Influence of Deposition Angle on Performance of MgO Protective Layer
fan yufeng~*; xia xing and liu chunliang (institute of physical electronics and devices; xi an jiaotong university; xi an; 710049; china)
..............page:181-184
Diagnosis and Properties of Newly Developed Surface-Wave-Sustained Plasma
xu junqi~(1; 2*); kousaka hiroyuki~3; umehara noritsugu~3 and diao dongfeng~4 1.xi an technologial university; xi an; 710032; china; 2.northwestern polytechnical university; xi an; 710072; china; 3.nagoya university; furo-cho; chikusa-ku; nagoya; 464-8603; japan; 4.xi an jiaotong university; xi an; 710049; china
..............page:214-218
TiN Coating on Inside Walls of Long Narrow Vacuum Pipes by DC Sputtering
wang yong~*; wei wei; zhang yaofeng; wang jianping; fan le; geng huiping and zhao feiyun (national synchrotron radiation laboratory; hefei 230029; china)
..............page:232-235
Influence of Annealing Temperature on Microstructures and Properties of Transparent Conductive ZAO Films
ye qin~* and wu kui (department of physics; jinan university; guangzhou; 510632; china)
..............page:195-199
Ultralong Single Crystal Silicon Nanowires Synthesized by Chemical Vapor Deposition
wei yongling; liu zhihong; wang lei and yang deren~* (state key laboratory of silicon materials; zhejiang university; hangzhou; 310027; china)
..............page:207-209
Multi-Information Measurement Technology for GaAs Photocathode Preparation
zou jijun~(*1; 2); qian yunsheng~1; chang benkang~1; wang hui~1 and wang shiyun~1 1.institute of electronic engineering & opto-electronic technology; nanjing university of science & technology; nanjing; 210094; china; 2.department of electronic engineering; east china institute of technology; fuzhou; 344000; china
..............page:172-175
Raman Spectroscopy Study of Diamond-Like Carbon Films Grown by Enhanced Pulsed-Arc Ion Plating
chen chaoping; zhu chang~* and guo rui (shanxi province thin film technology and optical test open key laboratory; xi an institute of technology; xi an 710032; china)
..............page:228-231
Plating Metals on Cenosphere Particles by Magnetron Sputtering
yu xiaozheng~(1; 2); xu zheng~(1; 2) and shen zhigang~(1; 2*) (1.beijing key laboratory for powder technology research and development; beijing university of aeronautics and astronautics; beijing; 100083; china; 2.micro-nanometer particles technology laboratory; nanotechnology industrialization base of china; tianjin; 300457; china)
..............page:247-250
Influence of Annealing Temperature on Microstructures and Electromagnetic Properties of CoFe Films
bai cuiqin~(1; 2*); wu ping~2; pan liqing~2; qiu hong~2 and tan hongge~1 1.college of science; civil aviation university of china; tianjin; 300300; china; 2.applied science school; beijing university of science and technology; beijing; 100083; china
..............page:219-222
Synthesis and Electrical Properties of p~+-Si/n-ZnO Nanowires Heterojunction
zheng kaibo~1; xiang xiaoyan~1; xu huahua~2; fang fang~1; shen haoting~1; zhang jing~1; zhu jian~1; ye chunnuan~1; sun dalin~(1*) and chen guorong~(1*) 1.department of materials science; fudan university; shanghai; 200433; china; 2.department of chemistry; fudan university; shanghai; 200433; china
..............page:163-167
Development of Linear Extended Microwave Plasma Chemical Vapor Deposition for Diamond Film Growth
tang weizhong~*; jiang kaiyun; geng chunlei and hei lifu (college of materials science and engineering; beijing university of science and technology; beijing; 100083; china)
..............page:251-254
Microstructures and Magnetic Properties of PtMn/Co Exchange Coupling Bilayers
zheng xiaolan; gu yousong; zhang yue~*; zhan xiaoyuan and li jianmin (department of materials physics and chemistry; beijing university of science and technology; beijing; 100083; china)
..............page:210-213
Study on Self-bias on Dielectric Substrate in RF Plasma
pan yongqiang~(*1; 2) and y.yin~2 1.school of photoelectric engineering; xi an technological university; xi an; 710032; china; 2.school of physics; the university of sydney; nsw 2006; australia
..............page:185-189
Electrical Properties of PolySiGe Grown by Metal-Induced Growth
wu guibin; ye zhizhen~*; zhao xing; liu guojun and zhao binhui (state key lab.of silicon materials; zhejiang university; hangzhou; 310027; china)
..............page:236-239
Influence of H_2 Addition on Discharge Characteristics of Ne-Xe in Color Alternate Current Plasma Display Panel
wei wei~*; sun jian and guo bingang (institute of physical electronics and devices; xi an jiaotong university; xi an; 710049; china)
..............page:204-206
Wear Resistance Comparison of CrN and Amorphous Carbon Films Grown by Ion Beam Assisted Deposition
du jun~(1*) and tian linhai~2 1.school of material science; the academic of armored forces engineering; beijing; 100072; china; 2.school of materials science and engineering; xi an jiaotong university; xi an; 710049; china
..............page:255-258
Microstructures and Properties of N-Doped TiO_2 Films Grown by Atmospheric Pressure Chemical Vapor Deposition
guo yu; zhang xiwen~* and han gaorong (department of materials science and engineering; silicon state key lab.zhejiang university; hangzhou; 310027; china)
..............page:190-194