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Vacuum Science and Technology
0253-9748
2005 Issue 4
Growth and Properties of TiN Films on Glass by Atmospheric Pressure Chemical Vapor Deposition
zhang tao; zhao gaoling~* and han gaorong (state key laboratory of silicon materials; department of materials science and engineering; zhejiang uinversity; hangzhou; 310027; china)
..............page:309-311
Real-time Optical Thin Film Thickness Monitor System
liu xiongying~*; huang guangzhou and yu jirong (college of elec and inf eng; south china university of technology; guangzhou; 510640; china)
..............page:306-308,311
Morphology and Physical Properties of Titanium Nitride Films Deposited by Magnetron Sputtering at Room Temperature
huang jiamu~*; xu chengjun; zhang xingyuan and wang yaping (institute of materials science and engineering; chongqing university; chongqing; 400045; china)
..............page:297-300
Growth and Properties of Microcrystalline Silicon Thin Films
zhang xiaodan~*; zhao ying; gao yantao; zhu feng; wei changchun; sun jian; geng xinhua and xiong shaozhen (1.institute of photo-electronics thin film devices and techmique of nankai university; tianjin; 300071; china; 2.key laboratory of photo-electronics thin film devices and technique of tianjin; tianjin; 300071; china; 3.key laboratory of opto-electronic information science and technology (nankai university; tianjin university); ministry of education; tianjin; 300071; china)
..............page:275-277,282
Influence of the Rotating Grounding Electrode on the Asymmetrical Geometry Dielectric Barrier Discharge
liu yong~*; zhou huisheng and he xiangning (power electronics institute of zhejiang univesity; hangzhou 310027; china)
..............page:241-244,255
Growth and Characterization of Nd-Doped SnO_2 Nanofilms
han fei; li jian~*; ji yatu and gaoyan (department of physics; college of sciences and technology; inner mongolia university; hohhot; 010021; china)
..............page:283-286,289
Enhanced Field Emission Properties of Vertically-oriented Silicon Nanowire Arrays
liu ming; sheng leimei; ge shuaiping and fan shoushan~* (tsinghua-foxconn nanotechnology research center; department of physic; tsinghua university; beijing 100084; china)
..............page:312-314
Growth of In_2O_3∶Mo Thin Films by DC Reactive Magnetron Sputtering at Room Temperature
miao weina; li xifeng; zhang qun~*; huang li; zhang zhuangjian; zhang li and yan xuejian (department of materials science; fudan university; shanghai; 200433; china)
..............page:301-305
Infulence of Substrate Orientation on Stress and Magnetostriction of TbDy-Fe Giant Magnetostrictive Film
zhou baiyang~*; deng guanghua and lin qingbin (college of materials science and engineering; fuzhou university; fuzhou; 350002; china)
..............page:268-270,274
Main Lens Curvature Design Soft Ware for Thomson Simulation Lens Set of Color Picture Tube
chen xiquan~(1*) and wu chuangfu~2 (1.thomson guangdong display; foshan 528000; china; 2.thomson display technology r&d; foshan 528000; china)
..............page:315-318
Growth of Vertically-Aligned Carbon Nanotube Arrays on Metallic Substrates and Their Field Emission Properties
sheng leimei and fan shoushan~* (tsinghua-foxconn nanotechnology research center; department of physic; tsinghua university; beijing; 100084; china)
..............page:249-251
Optical Waveguide Properties of LiNbO_3 Thin Films on Silicon Substrates
wang xinchang~1; ye zhizhen~(1*); li shiling~2; cao liangliang~1 and zhao binghui~1 1.the state key laboratory of silicon material; zhejiang university; hangzhou; 310027; china; 2.school of physics and microelectronics; shandong university; jinan; 250100; china
..............page:245-248
Characterization of SnS Films Prepared by Thermal Evaporation
cheng shuying~(*1; 2); zhong nanbao~1; huang cichang~1 and chen guonan~2 1.department of electronic science and applied physics; fuzhou university; fuzhou; 350002; china; 2.chemistry department; fuzhou university; fuzhou; 350002; china
..............page:290-292,296
Microstructures and Optical Properties of Copper-Phthalocyanine Film Grown by Vacuum Sublimation
he zhibing~(1*); han gaorong~2; wu weidong~1 and tang yongjian~1 1.laser fusion research center; china academe of engineering and physics; sichuan; mianyang 621900; china; 2.institute of inorganic materials; college of materials science and chemistry engineering; zhejiang university; hangzhou 310027; china
..............page:278-282
Phenol Photo-Catalystic Degradation with Nano-TiO_2 Films Grown by RF Magnetron Sputtering
zhang lili; liu pengyi~*; zhong fei; zhai lin and sun wangdian (school of science and technology; jinan university; guangzhou 510632; china)
..............page:259-262
Room Temperature Growth and Characterization of ZnO Films by Pulsed Laser Deposition
cao liangliang; ye zhizhen~*; zhang yang; zhu liping; zhang yinzhu; zhuge fei and zhao binghui (state key laboratory of silicon materials; zhejiang university; hangzhou; 310027; china)
..............page:256-258,262
XPS Study of Modified Nano-SiC by Surface Grafting
che jianfei; zhou li; ma jiajun; wu yulan and wang xin (department of polymer materials; nanjing university of science and technology; 210094; china)
..............page:252-255
Super-Hardness and Microstructures of TiN/Si_3N_4 Nano-Multilayers
hu xiaoping; dong yunshan; kong ming; li geyang~* and gu mingyuan (state key lab of metal matrix composites; shanghai jiao tong university; shanghai 200030; china)
..............page:263-267,274
Growth of SiO_x Films by Dielectric Barrier Discharge(DBD) Plasma Enhanced Chemical Vapor Deposition at Atmospheric Pressure
cheng cheng; fang peng; zhu xiaodong~*; geng song and zhan rujuan cas key laboratory of basic plasma physics; department of modern physics; university of science and technology of china; hefei; 230026; china
..............page:293-296
Study on Optical Properties of Diamond-Like Carbon with Ellipsometry
liang haifeng~* and yan yixin (key laboratory of film technology and optical measurement.xi an institute of technology; xi an; 710032; china)
..............page:287-289
Growth of TiN by Plasma Glow Discharge Sputtering,Diffusion and Ion Surface Alloying
liu yanping~(*1); xu jinyong~(1; 2); kui xiaoyun~1; wang jianzhong~1; gao yuan~1 and xu zhong~1 1.research institute of surface engineering; taiyuan university of technology; taiyuan; 030024; china; 2.guilin college of electronic industry; guilin; 541004; china
..............page:271-274