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Vacuum Science and Technology
0253-9748
2002 Issue 4
Fabrication of Nanostructures on the Surface of Titanium Film Using SPM Nanolithograpy Technique
shen ziyong; hou shimin; xue zengquan (department of electronics; peking university; beijing; 100871; china)
..............page:13-15,20
Alternating Stress Field and Superhardness Effect in TiN/NbN Nano-Multilayers
lai qianxi 1; yu xiaojiang 1; dai jiawei 1; li geyang 1; 2 ; ning zhaoyuan 21.state key lab.of mmcs; shanghai jiao tong university; shanghai; 200030; china 2.key laboratory of thin film materials; soochow university; suzhou; 215006; china
..............page:74-77
Microstructures and Optical Characteristics of Al Oxide Film Anodized in Oxygen Plasma
shi shouhua; sun daming; li aixia; sun zhaoqi(department of physics; anhui university; hefei; 230039; china)
..............page:64-67
Ti-Ag-Cu Active Metal Brazing of AlN Ceramics
lu yanping(beijing vacuum electronics research insitute; beijing; 100016; china)
..............page:54-56
Development of New Discharge Tube for Violet-Ray Radiation
zhao shouzhen; liang cuiguo; xie baosen; zhou qing (electron science and technology department of nankai university; tianjin; 300071; china)
..............page:51-53
Studies of Ultra Long Delay and Holding Time of Detectable Gas through Vacuum Mixing Leaks
zhu wei; du guoliang; shi xiaojun; mao fuming (dept.of electronic engineering; southeast university; nanjing; 210096; china) wang hui (nanjing university of technology; nanjing; 210009; china)
..............page:57-59,63
Photochromic and XPS Study of Spiropyran Films Grown by Vacuum Deposition
ji zhenguo; zhu ling (state key laboratory for silicon material insitute of msce; zhejiang university; hangzhou; 310027; china)y.ueda(faculty of engineering; kobe university rokko; nada; kobe 657 8501; japan)
..............page:48-50
Evaluation of Lens Correction in Exposal Flat
li gang; wang jianru; ying genyu (department of electronic engineering; tsinghua university; beijing; 100084; china)
..............page:16-20
Development of Electron Gun Capable of Double Electron Beams Scanning for High Luminance and High Definition Color Picture Tube
wu huaxia; hong guanglei; shen xudong(wuhu vacuum electronics institute; wuhu; 241000; china)
..............page:68-70
Theoretical Studies of Near Edge X-rays Absorption Fine Structure for Cl Self-assembly Growth on Ge(111) Surface
cao song 1; tang jingchang 1; 2 ; wang lei 2; li panfeng 1 (1.department of physics; zhejiang university; hangzhou; 310027; china; 2.state key laboratory for silicon material science; zhejiang university; hangzhou; 310027; china)
..............page:31-34
Study on Carrier Mobility of Transparent Conductive IMO Films
meng yang; zhang zhuangjian; hua zhongyi (department of materials science; fudan university; shanghai; 200433; china)
..............page:26-30
Microstructures and Properties of (TiCr)N Coatings Synthesized by Arc Ion Plating
liu yanyan; zhang qingyu; lin guoqiang(state key laboratory of materials modification by laser; ion and electron beams; dalian university of technology; dalian; 116024; china)
..............page:60-63
Influence of Annealing Temperature on the Structure and Surface Morphology of Titanium Oxide Thin Film
hou yaqi; zhuang daming; zhang gong; zhao ming; wu minsheng (department of mechanical engineering; tsinghua university; beijing; 100084; china)
..............page:8-12
Numerical Analysis of Substrate Temperature Distribution in Diamond Film Growth by Hot-Filament Chemical Vapor Deposition
qi xuegui 1; chen zeshao 1; wang guanzhong 2 (1 school of engineering science; university of science and technology of china; hefei; 230027; china; 2 department of physics; university of science and technology of china; hefei; 230026; china)
..............page:21-25
Latest Development of High Density Plasma Sources Used in Very-Large-Scale-Integrated Circuits Fabrication
wang ping; yang yintang; xu xinyan; yang guijie (microelectronics institute; xidian university; xi an; 710071; china)
..............page:35-42
Design of Radio Frequency Inductively Coupled Plasma Ion Source
xu shuhua; ren zhaoxing; shen keming; weng jian(institute of plasma physics; chinese academy of science; hefei; 230031)
..............page:71-73
Study of Metastable Reconstructions of Si(111) Surface by STM
hou shimin; tao chenggang; shen ziyong; guo dengzhu; zhao xingyu; liu weimin; xue zengquan (department of electronics; peking university; beijing; 100871; china)
..............page:4-7
The Study on the Magnetic Fluid Sealing of Dry Roots Pump
li decai; hong jianping; yang qingxin(the school of mechanical; electronic and control engineering; beijing; 100044; china)
..............page:78-81,73
Review of ZnO Thin Film Growth Technology
liu kun; ji zhenguo (the state key laboratory of silicon material; zhejiang university; hangzhou; 310027; china)
..............page:43-47,70