Alternating Stress Field and Superhardness Effect in TiN/NbN Nano-Multilayers
lai qianxi 1; yu xiaojiang 1; dai jiawei 1; li geyang 1; 2 ; ning zhaoyuan 21.state key lab.of mmcs; shanghai jiao tong university; shanghai; 200030; china 2.key laboratory of thin film materials; soochow university; suzhou; 215006; china