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Vacuum Science and Technology
0253-9748
1998 Issue 4
jin shu peng zhang shi zhen kong ji liang biao zhun
Lu Shiliang;Li Detian;Zhang Dixin;Tian Dongxu
..............page:266-271
duo kong sno2 bao mo de dao dian he qi min te xing
Wang Yue;Li Jianping;Han Jinghong;Fu Bingxiang
..............page:272-275
pecvd sheng chang nc-si h mo de chen ji ji li fen xi
Peng Yingcai He Yuliang;Liu Ming
..............page:283-288
ye zhuang zhi pin dong gan zhong sheng hua wen ti de vts you xian cha fen jie
Xu Shuhui;Zhou Minglian;Zhao Yueluo;Qi Xiling
..............page:276-282
yong yu da mian ji cai liao biao mian gai xing yan jiu de wei bo deng li zi ti yuan
Su Xiaobao;Wu Qinchong;Wan Yuangxi
..............page:289-293
- zu hua he wu ban dao ti dian hua xue yuan zi ceng wai yan
Fan Yuwei;Li Yongxiang;Wu Chongruo
..............page:302-307
ceo2 bao mo de zhi bei he biao zheng
Peng Dingmin;DU Xueyan;Liu Zhenxiang;Wan Dianfen;Xie Kan
..............page:247-251
gu tai bao mo ke zhong bian cheng de mo ni ke bian dian zu cun chu qi de zhi zao he xing neng
Shen Gonglie;Ou Jung;Li Zigao;Fu Bingxiang;Wang Li
..............page:294-297
ji pian yu chu li dui mwpcvd jin gang shi bao mo de ying xiang
Yu Shji;Wu Qinchong;Sui Yifeng
..............page:313-316
duo ci ji pian zhuan xi tong de ji suan ji fu zhu she ji
Zhang Xiaobing
..............page:259-265
xin xing xiao fei xing shi jian zhi pu ji de yan jiu
Liu Yuqing;Yu Xuedong;Lu Jiahe;Song Fenghua;Xue Kun;Dou Dejing;Cha Liangzhen Lang Renhe;Jiang Jingren;Ye Qingyong;Guo Yingzhan(Shenyang Third Factory of Vacuum Machinery;
..............page:239-246
wei tong dao ban dian ji biao mian de xps fen xi
Che Jing;Li Xiaofeng;Yang Weiyi;Chang Benkang
..............page:298-301
li zi shu zeng qiang chen ji tin bao mo de yan jiu
Xiang Wei;Lai Zuwu;Luo Siwei;Fang Renchang Li Wenzhi
..............page:308-312