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Journal of Vacuum Science and Technology
1672-7126
1996 Issue 1
MULTICHANNEL DETECTION OF SINGLE-ELECTRON PULSE COUNTING
Ding Li;WANG Hongjiang;Zhang Yong;Zhang Qiangji
..............page:68-72
MEASUREMENT AND CONTROL SYSTEM OF GAS FLOW STANDARD APPARATUS
MENG Yang;Li Wangkui
..............page:62-67
EFFECT OF WORKING GAS AND SUBSTRATE BIAS ON INTERNAL STRESS AND DENSITY OF RF SPUTTERED Al2O3 FILMS
ZHANG Jiliang;Li Ming;Yang Chunsheng;Zhao Xiaolin;Song Baiquan
..............page:58-61
UNBALANCED MAGNETRON SPUTTERING AND ITS APPLICATIONS
Dong Qi;Fan Yudian
..............page:51-57
QUANTITATIVE SIMS ANALYSIS OF Si IN GaAs
Zou Qingsheng;Cha Liangzhen;Liu Rong;Ma Nongnong;Han Xiangming
..............page:36-45
THE EFFECTS OF Pt DIFFUSION BARRIER ON THE CHEMICAL STRUCTURE AND PROPERTIES OF PZT/Si FILM
Zhu Yongfa;CAO Lili;Yan Peiyu;LI Longtu;Zhang Xiaowen
..............page:23-28
A STUDY OF DIFFUSION REACTION OF PZT/Si FILM
Zhu Yongfa;CAO Lili;Yan Peiyu;LI Longtu;Zhang Xiaowen
..............page:18-22
THE STUDY OF LASER BEAM EVAPORATED SURFACE COATING Sc-TYPE CATHODE
Wang Yiman;Pan Tongwu
..............page:10-17
INFLUENCE OF BOMBARDING ENERGY ON THE MICROSTRUCTURE AND MICROHARDNESS OF Cr-N THIN FILMS SYNTHESISED BY IBED
Wang Bing;Lai Zuwu;Jiang Chongbin;Li Wenzhi;He Xiaoming
..............page:5-9
PREPARATION AND MAGNETIC PROPERTIES OF IRON NITRIDES GRADIENT FILM
LIN Chuan;Jiang Enyong;Sun Duochun;Tian Minbo
..............page:1-4